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Selektive laserinduzierte Metallisierung von 3D-Schaltungsträgern aus Aluminiumoxid

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Keramische Zeitschrift

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Danksagung

Gefördert durch das Bundesministerium für Wirtschaft und Energie aufgrund eines Beschlusses des Deutschen Bundestages unter folgenden Kurzbezeichnungen: IGF Ladisk (488 Z), IGF TrantMed (18245 N) sowie IGF LasKer3D (18967 N).

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Authors and Affiliations

  1. Institut für Mikrointegration, Universität Stuttgart, Stuttgart, Germany

    Frank Kern, Philipp Ninz & Rainer Gadow

  2. Hahn-Schickard, Stuttgart, Germany

    Wolfgang Eberhardt & André Zimmermann

Authors
  1. Frank Kern
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  2. Philipp Ninz
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  3. Rainer Gadow
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  4. Wolfgang Eberhardt
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  5. Simon Petillon
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  6. André Zimmermann
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Kern, F., Ninz, P., Gadow, R. et al. Selektive laserinduzierte Metallisierung von 3D-Schaltungsträgern aus Aluminiumoxid. Keram. Z. 72, 42–47 (2020). https://doi.org/10.1007/s42410-020-0102-7

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  • DOI: https://doi.org/10.1007/s42410-020-0102-7

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