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Thermally Efficient Coplanar Architecture of Microheater and Inter-digitated Electrodes for Nanolayered Metal Oxide Based Hydrogen Gas Sensor

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Abstract

Chemoresistive hydrogen gas sensor with zinc oxide (ZnO) thin film as a sensing layer has been studied with a coplanar integrated architecture of microheater and interdigitated electrode (IDE). ZnO thin films are fabricated via a chemical route. The present study is based on the use of a coplanar microheater with IDE’s fabricated for the hydrogen sensor. Further, the effect of the integrated architecture over sensing properties of the sensor has been studied. The sensing response of the sensor with film thickness of 150 nm at an operating temperature of 160 °C comes out to be 10.97. The prime aim of the study is to present coplanar integrated architecture of microheater and IDE’sfor a ZnO based hydrogen sensor.

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  • 13 January 2021

    In the original publication of the article, the first author name was published incorrectly. The correct author name is given in this correction.

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Acknowledgements

Authors are thankful to the Department of Physics and Astrophysics, University of Delhi and Thapar Institute of Engineering and Technolgy, Patiala for providing the characterization equipment and financial support.

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Authors and Affiliations

  1. Electronics and Communication Engineering Department, Chandigarh University, Mohali, Punjab, India

    Sumit Mann, Ankur Garg & Manish Deshwal

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  1. Sumit Mann
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  2. Ankur Garg
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  3. Manish Deshwal
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Correspondence to Manish Deshwal.

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Mann, S., Garg, A. & Deshwal, M. Thermally Efficient Coplanar Architecture of Microheater and Inter-digitated Electrodes for Nanolayered Metal Oxide Based Hydrogen Gas Sensor. Trans. Electr. Electron. Mater. 20, 542–547 (2019). https://doi.org/10.1007/s42341-019-00147-1

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