Design and Analysis of Serpentine Flexure Based RF MEMS Switch for High Isolation with Low Pull-in voltage
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This paper presents the design and performance analysis of radio frequency micro electro mechanical system switches having serpentine flexure designs. In this paper, we have done, behavioral analysis by changing material, gap and thickness, increase in the actuation area using menders, impact of holes on effective working of the switch, stress analysis for low spring constant, electromechanical analysis for low pull-in voltage and high capacitance ratio, time dependent analysis for faster switching time, scattering parameter analysis for reducing RF losses are simulated and compared with the theoretical analysis. The significant improvements in this work are lesser air gap and beam thickness reduced the pull-in voltage to 2.75 V for 1.66 µm displacement, a rapid switching time of 0.9 µs obtained through simulation, an improved capacitance ratio of 157.25, isolation is 49.59 dB, insertion loss is 0.005 dB. Actuation area is increased, and switch area is reduced to achieve the optimum performance of the switch.
KeywordsRF MEMS switch Serpentine flexure design Pull-in voltage Switching time Insertion loss Isolation Capacitance ratio Electrostatics RF performance
The Authors would like to thank to NMDC supported by NPMASS, for providing the necessary computational tools.
Compliance with Ethical Standards
Conflict of interest
The authors declare that they have no competing interests.
- 1.P. Chawla, R. Khanna, Design, analysis and comparison of various MEMS switches for reconfigurable planar antenna. Acta Polytech. Hung. 11(10), 21–40 (2014)Google Scholar
- 4.A.K. Sharma, N. Gupta, Switching time analysis for non-uniform serpentine flexure based RF-MEMS switches. IEEE. ISBN: 978-1-4673-5630-5//13/ (2013)Google Scholar
- 8.U.S. Arathy, R. Resmi, Analysis of pull-in voltage of MEMS switches based on material properties and structural parameters, in International Conference on Control, Instrumentation, Communication and Computational Technologies (ICCICCT). IEEE. ISBN: 978-1-4673-9825-1/15 (2015)Google Scholar
- 10.J. Taye, K. Guha, S. Baishya, Design and analysis of RF MEMS shunt capacitive switch for low actuation voltage & high capacitance ratio, in Physics of Semiconductor Devices, ed. by V.K. Jain, A. Verma. https://doi.org/10.1007/978-3-319-03002-9_111
- 11.G.D. Patil, N.R. Kolhare, A review paper on RF MEMS switch for wireless communication. Int. J. Eng. Trends Technol. ISSN: 2231-5381, Issue 2 (2013)Google Scholar
- 15.F. Giacomozzi, V. Mulloni, S. Colpo, J. Iannacci, B. Margesin, A. Faes, A flexible fabrication process for RF MEMS devices. Roman. J. Inf. Sci. Technol. 14, 259–268 (2011)Google Scholar
- 16.G.M. Rebeiz (2003) RF MEMS: Theory, Design, and Technology. Wiley. ISBN: 0-471-20169-3Google Scholar