Abstract
A semilinear parabolic equation with constraint modeling the dynamics of a microelectromechanical system (MEMS) is studied. In contrast to the commonly used MEMS model, the well-known pull-in phenomenon occurring above a critical potential threshold is not accompanied by a break-down of the model, but is recovered by the saturation of the constraint for pulled-in states. It is shown that a maximal stationary solution exists and that saturation only occurs for large potential values. In addition, the existence, uniqueness, and large time behavior of solutions to the evolution equation are studied.
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Ambrosio, L., Gigli, N., Savaré, G.: Gradient flows in metric spaces and in the space of probability measures, 2nd edn. Lectures in Mathematics ETH Zürich. Birkhäuser Verlag, Basel (2008)
Barbu, V.: Nonlinear Differential Equations of Monotone Types in Banach Spaces. Springer Monographs in Mathematics. Springer, New York (2010)
Bernstein, D.H., Guidotti, P., Pelesko, J.A.. Analytical and numerical analysis of electrostatically actuated MEMS devices. In: Proceedings of Modeling and Simulation of Microsystems 2000, San Diego, CA, pp. 489–492 (2000)
Brézis H: Problèmes unilatéraux. J. Math. Pures. Appl. 51(9):1–168 (1972)
H. Brézis. Opérateurs maximaux monotones et semi-groupes de contractions dans les espaces de Hilbert. North-Holland Mathematics Studies, No. 5., North-Holland Publishing Co., 1973
Brezis, H., Strauss, W.A.: Semi-linear second-order elliptic equations in \(L^1\). J. Math. Soc. Japan 25, 565–590 (1973)
Brezis, H., Cazenave, T., Martel, Y., Ramiandrisoa, A.: Blow up for \(u_t - \Delta u=g(u)\) revisited. Adv. Differ. Equ. 1(1), 73–90 (1996)
Brubaker, N., Pelesko, J.A.: Analysis of a one-dimensional prescribed mean curvature equation with singular nonlinearity. Nonlinear Anal. 75, 5086–5102 (2012)
Cheng, Y.-H., Hung, K.-C., Wang, S.-H.: Global bifurcation diagrams and exact multiplicity of positive solutions for a one-dimensional prescribed mean curvature problem arising in MEMS. Nonlinear Anal. 89, 284–298 (2013)
Esposito, P., Ghoussoub, N., Guo, Y.: Mathematical analysis of partial differential equations modeling electrostatic MEMS, vol. 20 of Courant Lecture Notes in Mathematics, Courant Institute of Mathematical Sciences, New York; American Mathematical Society, Providence, RI (2010)
Flores, G., Mercado, G., Pelesko, J.A., Smyth, N.: Analysis of the dynamics and touchdown in a model of electrostatic MEMS. SIAM J. Appl. Math. 67, 434–446 (2007)
Fonseca, I., Leoni, G.: Modern Methods in the Calculus of Variations: \(L^p\) spaces. Springer Monographs in Mathematics. Springer, New York (2007)
Ghoussoub, N., Guo, Y.: On the partial differential equations of electrostatic MEMS devices: stationary case. SIAM J. Math. Anal. 38, 1423–1449 (2007)
Ghoussoub, N., Guo, Y.: Estimates for the quenching time of a parabolic equation modeling electrostatic MEMS. Methods Appl. Anal. 15, 361–376 (2008)
Guidotti, P., Bernstein, D.: Modeling and analysis of hysteresis phenomena in electrostatic zipper actuators. In: Proceedings of Modeling and Simulation of Microsystems 2001, Hilton Head Island, SC, pp. 306–309
Guo, Y., Pan, Z., Ward, M.J.: Touchdown and pull-in voltage behavior of a MEMS device with varying dielectric properties. SIAM J. Appl. Math. 66, 309–338 (2005)
Kaplan, S.: On the growth of solutions of quasi-linear parabolic equations. Comm. Pure Appl. Math XVI, 305–330 (1963)
Kinderlehrer, D., Stampacchia, G.: An introduction to variational inequalities and their applications. Reprint of the 1980 original. Classics in Applied Mathematics, 31. Society for Industrial and Applied Mathematics (SIAM), Philadelphia, PA (2000)
Laurençot, Ph.: Weak compactness techniques and coagulation equations. In: Banasiak, J., Mokhtar-Kharroubi, M. (eds.) Evolutionary Equations with Applications in Natural Sciences, Lecture Notes Math. 2126, Springer, pp. 199–253 (2015)
Laurençot, Ph., Walker, Ch.: Heterogeneous dielectric properties in MEMS Models. Preprint (2017) submitted for publication
Laurençot, Ph., Walker, Ch.: Some singular equations modeling MEMS. Bull. Am. Math. Soc. 54, 437–479 (2017)
Lê, C.H.: Etude de la classe des opérateurs m-accrétifs de \(L^1(\Omega )\) et accrétifs dans \(L^\infty (\Omega )\). Thèse de 3ème cycle (Université de Paris VI, Paris) (1977)
Lindsay, A.E., Lega, J., Glasner, K.G.: Regularized model of post-touchdown configurations in electrostatic MEMS: equilibrium analysis. Phys. D 280–281, 95–108 (2014)
Lindsay, A.E., Lega, J., Glasner, K.G.: Regularized model of post-touchdown configurations in electrostatic MEMS: interface dynamics. IMA J. Appl. Math. 80, 1635–1663 (2015)
Pan, H., Xing, R.: On the existence of positive solutions for some nonlinear boundary value problems and applications to MEMS models. Discrete Contin. Dyn. Syst. 35(8), 3627–3682 (2015)
Pelesko, J.A.: Mathematical modeling of electrostatic MEMS with tailored dielectric properties. SIAM J. Appl. Math. 62, 888–908 (2002)
Pelesko, J.A., Bernstein, D.H.: Modeling MEMS and NEMS. Chapman & Hall/CRC, Boca Raton (2003)
Simon, J.: Compact sets in the space \(L^p(0, T;B)\). Ann. Mat. Pura Appl. 146(4), 65–96 (1987)
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Part of this work was done while PhL enjoyed the hospitality and support of the Institut für Angewandte Mathematik, Leibniz Universität Hannover.
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Partially supported by the CNRS Project PICS07710.
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Laurençot, P., Walker, C. A constrained model for MEMS with varying dielectric properties. J Elliptic Parabol Equ 3, 15–51 (2017). https://doi.org/10.1007/s41808-017-0003-0
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DOI: https://doi.org/10.1007/s41808-017-0003-0