Abstract
This paper presents a detailed investigation of titanium nitride (TiN)-based microheaters for space applications. TiN-based microheaters with different thicknesses ranging from 25 to 400 nm are fabricated. These layers are structurally characterized using X-ray diffraction (XRD) technique and electrically characterized for sheet resistance and temperature coefficient of resistance (TCR). Thereafter, for targeted temperatures of 250–300 °C, V-I characteristics are studied for all the variants and the achieved temperatures are verified through thermal imaging. Further, to evaluate the thermal stability of fabricated microheater devices, a long-term stability experiment was carried to establish their performance for space applications.
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Singh, S., Kumar, D., Vashishath, M. et al. Investigation of CMOS compatible titanium nitride-based microheater for microthrusters. ISSS J Micro Smart Syst 11, 417–426 (2022). https://doi.org/10.1007/s41683-022-00097-6
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DOI: https://doi.org/10.1007/s41683-022-00097-6