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Ultrahigh-power iron oxysulfide thin films for microbatteries

用于微电池的超高功率密度铁氧硫化物薄膜

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Abstract

Areal power density is one of the core indicators determining how large areas a microbattery need to occupy when integrated directly with microelectronic devices for the Internet of Things. Unfortunately, the low power density of microbatteries hinders their applications, because microelectronic devices only provide finite areas for integration. Herein, we show that sputtered iron oxysulfide (FeOxSy) thin films subjected to in situ plasma pretreatment display ultrahigh power density. This in situ plasma pretreatment can be regarded as a universal interface optimization strategy for suppressing mechanical degradation upon extended cycling. The synergistic effects of high structural integrity (robust interfacial adhesiveness and stress-relieving islands), perfect electrochemical reversibility, and near-surface charge exchanges (pseudocapacitive lithium storage mechanism) result in extremely high power density and stable cycling performance. The pretreated FeOxSy thin films can output an areal power density as high as 14.6 mW cm−2 and a considerable volumetric energy density of 291 µW h cm−2 µm−1. Such a highpower density constitutes a new state-of-the-art level for sputtered thin-film materials with comparative areal capacity. This work provides an efficient and simple pretreatment method for achieving ultrahigh-power and stable thin-film electrodes for microbatteries.

摘要

作为微电池的核心指标之一, 面积功率密度决定了微电池与应用于物联网的微电子器件集成时所需的面积.目前, 由于微电子器件尺寸有限, 微电池的实际应用受到低面积功率密度的限制. 本文研究发现, 经过原位等离子体预处理衬底后, 溅射的铁氧硫化物薄膜(FeOxSy)具备超高功率特性. 这种原位等离子体预处理可作为一种通用的界面优化策略来抑制长循环过程中的机械衰变. 该正极薄膜展现出极高的功率密度和稳定的循环性能, 这是由其高度的结构完整性(强大的界面粘附性和应力释放的岛)、完美的电化学可逆性以及近表面电荷交换(赝电容锂存储机制)的协同作用导致的. 预处理的FeOxSy 薄膜可以输出高达14.6 mW cm−2的功率密度和291 μW h cm−2μm−1的体积能量密度.制备得到的正极薄膜的功率密度优于已报道的具有相当面积容量的溅射薄膜. 本工作提出了一种简单且高效的预处理方法来制备具有超高功率密度且稳定的微电池薄膜电极.

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Acknowledgements

This work was supported by the Award Program for Fujian Minjiang Scholar Professorship, the National Natural Science Foundation of China (11704071 and 51871188), the Excellent Youth Foundation of Fujian Scientific Committee (2019J06008), Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China (2021ZR146), and Fujian Provincial Department of Industry and Information Technology (82318075) The authors would like to thank Enago (http://www.enago.cn) for the English language review.

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Authors and Affiliations

  1. College of Physics and Information Engineering, Institute of Micro-Nano Devices and Solar Cells, Fuzhou University, Fuzhou, 350108, China

    Bingyuan Ke  (柯秉渊), Xinghui Wang  (王星辉), Shoulin Cheng  (程受麟), Wangyang Li  (李王阳), Renming Deng  (邓人铭) & Congcong Zhang  (张聪聪)

  2. Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou, 350108, China

    Xinghui Wang  (王星辉)

  3. Jiangsu Collaborative Innovation Center of Photovoltaic Science and Engineering, Changzhou, 213000, China

    Xinghui Wang  (王星辉)

  4. State Key Laboratory for Physical Chemistry of Solid Surfaces, Fujian Key Laboratory of Materials Genome, Collaborative Innovation Center of Chemistry for Energy Materials, College of Materials, Xiamen University, Xiamen, 361005, China

    Jie Lin  (林杰), Qingshui Xie  (谢清水) & Dong-Liang Peng  (彭栋梁)

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  1. Bingyuan Ke  (柯秉渊)
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  2. Xinghui Wang  (王星辉)
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  3. Shoulin Cheng  (程受麟)
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  4. Wangyang Li  (李王阳)
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  7. Jie Lin  (林杰)
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  9. Dong-Liang Peng  (彭栋梁)
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Contributions

Wang X and Peng DL designed the research. Ke B performed the experiments with Cheng S, Li W, Deng R and Zhang C Ke B wrote the paper with support from Lin J and Xie Q. All authors contributed to the general discussion.

Corresponding authors

Correspondence to Xinghui Wang  (王星辉) or Dong-Liang Peng  (彭栋梁).

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The authors declare that they have no conflict of interest.

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Supporting data are available in the online version of the paper.

Bingyuan Ke received his BSc degree from Qindao University in 2019. Now he is a PhD Student at the College of Physics and Information Engineering, Fuzhou University His current research focuses on the all-solid-state thin film microbatteries

Xinghui Wang recieved his PhD degree in condensed matter physics from Lanzhou University in 2013, and then worked as research staff at Nanyang Technological University and Singapore-MIT Alliance for Research and Technology in sequence. He is currently a Minjiang Scholar Professor at the College of Physics and Information Engineering, Fuzhou University. His research interests involve the fabrication of nanomaterials and thin film electrodes for energy storage applications, mainly including thin film microbattery, planar supercapacitor, flexible energy storage device, lithium metal anode and sulfur cathode

Dong-Liang Peng received his BSc (1983), MSc (1989) and PhD (1997) degrees in condensed matter physics from Lanzhou University (China). He received another PhD degree in materials science and engineering from Nagoya Institute of Technology (Japan) in 2002. Currently he is a Nanqiang Distinguished Professor of Materials Science and Engineering at Xiamen University (China). He received the National Natural Science Fund for Distinguished Young Scholars. His research focuses on the nanostructured and nanoscale functional materials, and their applications in energy storage, electromagnetics and catalysis

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Ke, B., Wang, X., Cheng, S. et al. Ultrahigh-power iron oxysulfide thin films for microbatteries. Sci. China Mater. 66, 118–126 (2023). https://doi.org/10.1007/s40843-022-2152-3

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