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Conformal Three-Dimensional Platinum Coating Using Rotary-Type Atomic Layer Deposition for a Diesel Oxidation Catalyst Application

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Abstract

A novel rotary-type atomic layer deposition (ALD) process for coating platinum thin film on three-dimensional (3D) substrates is demonstrated. High uniformity and conformability of the platinum thin-film deposition on 3D substrates were confirmed, ensuring the controllability of the new ALD technique. The results for this technique surpassed those of the conventional wet method and ordinary atomic layer deposition, which both have a limited specific surface area. To demonstrate the application of this new technology, Pt nano-film coated γ-Al2O3 was produced using the rotary-type ALD and applied to diesel oxidation catalysts (DOCs). The produced DOCs showed high Pt content when the number of ALD cycles was increased, and thereby exhibited more complete combustion of gaseous pollutants, such as CO, C3H8, and NO, even at lower temperatures. Pt nano-film deposition by the rotary-type ALD process was first optimised on Si wafer substrates. The process was controlled by four parameters: processing temperature, number of ALD cycles, precursor pulse time, and reactant pulse time. Deposition of the Pt nano-film was mainly determined by the processing temperature and the number of ALD cycles. The average growth per cycle and density of the Pt nano-film were found to be 0.8 Å/cycle and 21.0 g/cm3, respectively. The same procedure and conditions were applied to 3D γ-Al2O3 powder substrates for DOCs, which demonstrated greater conversion performance compared with conventional Pt-used DOCs.

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Acknowledgements

This work’s characterisation is supported by Research Institute of Advanced Materials (RIAM) at Seoul National University (SNU).

Funding

This work was supported by Material Innovation Leading Project through the National Research Foundation of Korea (NRF) funded by the Ministry of Science and ICT (2020M3H4A3081879). This work was supported by Tech-Bridge commercialization technology development project through Korea Technology and Information Promotion Agency (TIPA) funded by the ministry of SMEs (S3177448). This work was supported by the National Research Foundation of Korea (NRF) funded by the Ministry of Science and ICT (MSIT) of the Korean government (NRF-2021R1C1C1009200).

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Author notes

  1. Sung-Ho Yoon, Min Jong Kil and Jun-Hyeok Jeon These authors contributed equally to this work.

Authors and Affiliations

  1. Electronic Convergence Materials and Device Research Center, Korea Electronics Technology Institute (KETI), 25, Saenari-ro, Bundang-gu, Seongnam, 13509, Republic of Korea

    Sung-Ho Yoon, Min Jong Kil, Jun-Hyeok Jeon, Hyun-Mi Kim, Seul-Gi Kim, Jin Woo Cho & Hyeongkeun Kim

  2. Mechanical Engineering, Sungkyunkwan University (SKKU), Suwon, Republic of Korea

    Sung-Ho Yoon, Jun-Hyeok Jeon & Jae-Boong Choi

  3. Department of Nano Engineering, Sungkyunkwan University Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University (SKKU), Seobu-ro 2066, Jangan-gu, Suwon, 16419, Republic of Korea

    Sung-Ho Yoon, Jiye Han & Il Jeon

  4. Department of Mechanical and Aerospace Engineering, University of California, Los Angeles (UCLA), Los Angeles, USA

    Min Jong Kil

  5. IB Materials, Yeongnam, Republic of Korea

    Eui-Sung Lee & Youngmo An

  6. Department of Manufacturing Systems and Design Engineering, Seoul National University of Science and Technology, Seoul, Republic of Korea

    Jihwan An

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Contributions

SHY, MJK and HK conceived the idea. IJ and HMK supervised the project. HMK analysed Pt-coated Al2O3 powder by using transmission electron microscope. SGK and JH analysed Pt-coated Si wafer by x-ray reflectivity. ESL and YA tested Pt-coated DOC. SHY, MJK, JHJ and IJ wrote the manuscript. JWC, JA, JBC and IJ revised the manuscript. All authors read and approved the final manuscript.

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Correspondence to Il Jeon or Hyeongkeun Kim.

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Yoon, SH., Kil, M.J., Jeon, JH. et al. Conformal Three-Dimensional Platinum Coating Using Rotary-Type Atomic Layer Deposition for a Diesel Oxidation Catalyst Application. Int. J. of Precis. Eng. and Manuf.-Green Tech. 10, 1249–1261 (2023). https://doi.org/10.1007/s40684-022-00475-3

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