Abstract
Rotary near-field lithography (RNFL) technology provides a route to overcome the diffraction limit with a high throughput and low cost for nanomanufacturing. Utilizing the advantage of the passive flying of a plasmonic head, RNFL can achieve a 10 m/s processing speed with a perfect near-field condition at dozens of nanometers. The flying performance of the plasmonic flying head (PFH) is the pivotal issue in the system. The linewidth has a strong correlation with the near-field gap, and the manufacturing uniformity is directly influenced by the dynamic performance. A more serious issue is that the unexpected contact between the PFH and substrate will result in system failure. Therefore, it is important to model and analyze the flying process of the PFH at the system level. In this study, a novel full-coupled suspension-PFH-air-substrate (SPAS) model that integrates a six-degree of freedom suspension-PFH dynamics, PFH-air-substrate air bearing lubrication, and substrate vibration, is established. The pressure distribution of the air bearing is governed by the molecular gas lubrication equation that is solved by the finite element method (FEM) with a local pressure gradient based adaptive mesh refinement algorithm using the COMSOL Multiphysics software. Based on this model, three designs of the air bearing surface are chosen to study the static, dynamic, and load/unload performance to verify whether it satisfies the design requirements of RNFL. Finally, a PFH analysis solver SKLY.app is developed based on the proposed model.
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References
Schaller R. Moore’s law: Past, present and future. IEEE Spectrum 6(34): 52–59 (1997)
Hoefflinger B. CHIPS 2020 VOL. 2. Springer, 2016: 143–148.
Xu Z W, Fang F, Zeng G. In Handbook of Manufacturing Engineering and Technology. Springer, 2015: 1391–1423.
Vieu C, Carcenac F, Pepin A, Chen Y, Mejias M, Lebib A, Manin-Ferlazzo L, Couraud L, Launois H. Electron beam lithography: resolution limits and applications. Applied Surface Science 1(164): 111–117 (2000)
Blaikie R J, Melville D O, Alkaisi M M. Super-resolution near-field lithography using planar silver lenses: A review of recent developments. Microelectronic Engineering 4(83): 723–729 (2006)
Betzig E, Trautman J K. Near-field optics: microscopy, spectroscopy, and surface modification beyond the diffraction limit. Science 5067(257): 189–196 (1992)
Chaturvedi P, Wu W, Logeeswaran V J, Yu Z, Islam M S, Wang S Y, Williams R S, Fang N X. A smooth optical superlens. Applied Physics Letters 4(96): 43102 (2010)
Fang N, Lee H, Sun C, Zhang X. Sub–diffraction-limited optical imaging with a silver superlens. Science 5721(308): 534–537 (2005)
Lee W, Kim T, Choi G, Lim G, Joe H, Gang M, Moon H, Kim D, Min B, Park Y, Park N. Experimental demonstration of line-width modulation in plasmonic lithography using a solid immersion lens-based active nano-gap control. Applied Physics Letters 5(106): 51111 (2015)
Srituravanich W, Pan L, Wang Y, Sun C, Bogy D B, Zhang X. Flying plasmonic lens in the near field for high-speed nanolithography. Nature Nanotechnology 12(3): 733–737 (2008)
Pan L, Park Y, Xiong Y, Ulin-Avila E, Wang Y, Zeng L, Xiong S, Rho J, Sun C, Bogy D B, Zhang X. Maskless plasmonic lithography at 22 nm resolution. Scientific Reports 1: 116–120 (2011)
Ji J, Hu Y, Meng Y, Zhang J, Xu J, Li S, Yang G. The steady flying of a plasmonic flying head over a photoresistcoated surface in a near-field photolithography system. Nanotechnology 18(27): 185303 (2016)
Ji J, Meng Y, Hu Y, Xu J, Li S, Yang G. High-speed near-field photolithography at 1685 nm linewidth with linearly polarized illumination. Optics Express 15(25): 17571 (2017)
Wang Y, Wei X, Liang X, Yin S, Zi Y, Peng Y, Tsui K. The instability of angstrom-scale head-disk interface induced by electrostatic force. IEEE Transactions on Magnetics 11(51): 1–4 (2015)
Wu L, Bogy D B. Unstructured triangular mesh generation techniques and a finite volume numerical scheme for slider air bearing simulation with complex shaped rails. Magnetics, IEEE Transactions on 5(35): 2421–2423 (1999)
Zeng Q, Bogy D B. Dynamics of suspension-slider-air-bearing systems: experimental study. Mechatronics, IEEE/ ASME Transactions on 3(3): 210–217 (1998)
Wu H, Bogy D. Use of an embedded contact sensor to study nanoscale heat transfer in heat assisted magnetic recording. Applied Physics Letters 3(110): 33104 (2017)
Burgdorfer A. The influence of the molecular mean free path on the performance of hydrodynamic gas lubricated bearings. Trans ASME, Ser D 81: 94–100 (1959)
Mitsuya Y. Modified Reynolds equation for ultra-thin film gas lubrication using 1.5-order slip-flow model and considering surface accommodation coefficient. Journal of Tribology 2(115): 289–294 (1993)
Wu L, Bogy D B. New first and second order slip models for the compressible Reynolds equation. Journal of Tribology 3(125): 558–561 (2003)
Fukui S, Kaneko R. Analysis of ultra-thin gas film lubrication based on linearized Boltzmann equation: First report—derivation of a generalized lubrication equation including thermal creep flow. Journal of Tribology 2(110): 253–261 (1988)
Lu S, Stanley H M, Bogy D B, Bhatia C S, Hsia Y T. Design, simulation, fabrication and measurement of a 25-nm, 50-percent slider. IEEE Transactions on Magnetics 61(31): 2952–2954 (1995)
Lu S, Hu Y, O’Hara M, Bogy D B, Singh Bhatia C, Hsia Y. Air bearing design, optimization, stability analysis and verification for sub-25 nm flying. Magnetics, IEEE Transactions on 1(32): 103–109 (1996)
White J W, Nigam A. A factored implicit scheme for the numerical solution of the Reynolds equation at very low spacing. Journal of Tribology 1(102): 80–85 (1980)
Huang P, Wang H, Xu L, Meng Y, Wen S. Numerical analysis of the lubrication performances for ultra-thin gas film lubrication of magnetic head/disk with a new finite difference method. In Proceedings of 2005 ASME International Mechanical Engineering Congress and Exposition, Orlando, USA, 2005.
Hu Y. Head-disk suspension dynamics. University of California, Berkeley, 1996.
Cha E, Bogy D B. A numerical scheme for static and dynamic simulation of subambient pressure shaped rail sliders. Journal of Tribology 1(117): 36–46 (1995)
Garcia-Suarez C, Bogy D B, Talke F E. Use of an upwind finite element scheme for air bearing calculations. Tribology and Mechanics of Magnetic Storage Systems 1: 90–96 (1984)
Nguyen S H. p-Version finite element analysis of gas bearings of finite width. Journal of Tribology 3(113): 417–420 (1991)
Zeng Q H, Bogy D B. A simplified 4-DOF suspension model for dynamic load/unload simulation and its application. Journal of Tribology 1(122): 274–279 (2000)
Li L, Bogy D B. Operational Shock Failure Mechanisms in Hard Disk Drives. Journal of Tribology-Transactions of the ASME 136: 0319013 (2014)
Chang W R, Etsion I, Bogy D B. An elastic-plastic model for the contact of rough surfaces. Journal of Tribology (1987)
Greenwood J A, Williamson J B P. Contact of nominally flat surfaces. Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences 1442(295): 300–319 (1966)
Pan L. High-throughput plasmonic nanolithography. Ph.D. Thesis. Berkeley (USA): University of California, 2010
Ji J, Meng Y, Zhang J. Optimization of structure parameters of concentric plasmonic lens for 355 nm radially polarized illumination. Journal of Nanophotonics 1(9): 93794 (2015)
Juang J, Bogy D B. Air-bearing effects on actuated thermal pole-tip protrusion for hard disk drives. Journal of Tribology- Transactions of the ASME 3(129): 570–578 (2007)
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This work is financially supported by the National Natural Science Foundation of China (NSFC) with Grant No. 51635009.
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Yueqiang HU. He received his bachelor degree in mechanical engineering in 2013 from Southwest Jiaotong University, Chengdu, China. After then, he was a PhD student in the State Key Laboratory of Tribology at the Tsinghua University. His research interests include nanomanufacturing and nanophotonics.
Yonggang MENG. He is a professor in mechanical engineering, and serves as the director of the State Key Laboratory of Tribology (SKLT), Tsinghua University, China. Before he joined the SKLT in 1990, he obtained his master and PhD degrees in mechanical engineering from Kumamoto University, Japan, in 1986 and 1989, respectively. He is the author or co-author of over 160 peer-reviewed papers and 4 book chapters. His research area covers engineering tribology, surface and interface sciences, and micro/nanomanufacturing.
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Hu, Y., Meng, Y. Numerical modeling and analysis of plasmonic flying head for rotary near-field lithography technology. Friction 6, 443–456 (2018). https://doi.org/10.1007/s40544-017-0189-z
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DOI: https://doi.org/10.1007/s40544-017-0189-z