Abstract
Laser micro-machining process (LMMP) is an emerging technology used for various industrial applications like cutting, grooving, turning, drilling and milling etc. It uses the thermal energy to perform ablation process for making complex shapes in any material. Mathematical modeling of the LMMP process could help the researchers to pre-estimate the corresponding results prior to performing the actual machining process and is also very crucial for optimization of the process parameters. Response surface methodology (RSM) has been effectively used to establish the relationship between input variables (scanning speed, pulse frequency, laser power and number of passes) with the outputs like material removal rate (MRR), surface roughness (Ra) and heat effected zone (HAZ). It has also been used to investigate the influence of the input parameters on the output of the process. In this paper different approaches of mathematical model like RSM based model, heat flow model, strain induced model and groove taper angle model have been discussed. Main Significant parameters for surface roughness are laser scan speed and laser pulse intensity. HAZ width is linearly depends upon pulse intensity and inversely depends upon scanning speed. This paper contributes a review of the different methods of mathematical modeling utilized for laser beam micro-machining process and also significant researches done so far.
Similar content being viewed by others
Data Availability Statement
Data sharing not applicable to this article as no datasets were generated or analysed during the current study.
Abbreviations
- LMMP:
-
Laser micro-machining process
- DES:
-
Drug-eluting stents
- RSM:
-
Response surface methodology
- MOGA-II:
-
Multi-objective genetic algorithm II
- MRR:
-
Material removal rate
- µ-EDM:
-
Micro-electrical discharge machining
- Ra:
-
Surface roughness
- µ-LBM:
-
Micro-laser beam machining
- HAZ:
-
Heat effected zone
- µ-ECM:
-
Micro-electrochemical machining
- PRR:
-
Pulse repetition rate
- SV:
-
Scanning velocity
References
Parandoush, P., Hossain, A.: A review of modeling and simulation of laser beam machining. Int. J. Mach. Tools Manuf 85, (2014). https://doi.org/10.1016/j.ijmachtools.2014.05.008
Zhao, Y., Zhao, Y.-L., Wang, L.-K.: Application of femtosecond laser micromachining in silicon carbide deep etching for fabricating sensitive diaphragm of high temperature pressure sensor. Sens. Actuators, A 309, (2020). https://doi.org/10.1016/j.sna.2020.112017
Liu, G., Li, Y., Tong, H., Zhong, H.: Effect of anisotropically-etched silicon electrode on electrolytic products flow in micro ECM. Procedia CIRP 95, (2020). https://doi.org/10.1016/j.procir.2020.02.291
Saha, S., Ball, A.K., Mukherjee, A., et al.: Optimization of electrochemical etching process for manufacturing of micro electrodes for micro-EDM application. Proc. Inst. Mech. Eng., Part B: J. Eng. Manuf. 235, (2021). https://doi.org/10.1177/0954405420958961
Aslantas, K., Danish, M., Hasçelik, A., et al.: Investigations on surface roughness and tool wear characteristics in micro-turning of Ti-6Al-4V alloy. Materials 13, (2020). https://doi.org/10.3390/ma13132998
Serje, D., Pacheco, J., Diez, E.: Micromilling research: current trends and future prospects. Int. J. Adv. Manuf. Technol. 111, (2020). https://doi.org/10.1007/s00170-020-06205-w
Guckenberger, D.J., de Groot, T.E., Wan, A.M.D., et al.: Micromilling: a method for ultra-rapid prototyping of plastic microfluidic devices. Lab Chip 15, (2015). https://doi.org/10.1039/C5LC00234F
Gao, S., Huang, H.: Recent advances in micro- and nano-machining technologies. Front. Mech. Eng. 12, (2017). https://doi.org/10.1007/s11465-017-0410-9
James, S., Sonate, A.: Experimental study on micromachining of CFRP/Ti stacks using micro ultrasonic machining process. Int. J. Adv. Manuf. Technol. 95, 1539–1547 (2018). https://doi.org/10.1007/s00170-017-1298-6
Goswami, A., Singh, K., Aravindan, S., Rao, Pv.: Optimizing FIB milling process parameters for silicon and its use in nanoreplication. Mater. Manuf. Processes 32, 1052–1058 (2017). https://doi.org/10.1080/10426914.2016.1257127
Goswami, A., Umashankar, R., Gupta, A.K., et al.: Development of a microstructured surface using the FIB. J. Micromanuf. 1, 53–61 (2018). https://doi.org/10.1177/2516598418765357
Haghbin, N., Ahmadzadeh, F., Papini, M.: Masked micro-channel machining in aluminum alloy and borosilicate glass using abrasive water jet micro-machining. J. Manuf. Process. 35, 307–316 (2018). https://doi.org/10.1016/j.jmapro.2018.08.017
Deshmukh, S.S., Goswami, A.: Recent developments in hot embossing – a review. Mater. Manuf. Processes 36, 501–543 (2021). https://doi.org/10.1080/10426914.2020.1832691
Zeng, Z., Wang, Y., Wang, Z., et al.: A study of micro-EDM and micro-ECM combined milling for 3D metallic micro-structures. Precis. Eng. 36, 500–509 (2012). https://doi.org/10.1016/j.precisioneng.2012.01.005
Chen, C., Li, J., Zhan, S., et al.: Study of micro groove machining by micro ECM. Procedia CIRP 42, 418–422 (2016). https://doi.org/10.1016/j.procir.2016.02.224
Lasagni, F.A., Lasagni, A.F.: [Advanced structured materials] Fabrication and characterization in the micro-nano range, vol 10. In: Laser Micromachining, chapter 2, pp. 29–46 (2011). https://doi.org/10.1007/978-3-642-17782-8
Campanelli, S.L., Ludovico, A.D., Bonserio, C., et al.: Experimental analysis of the laser milling process parameters. J. Mater. Process. Technol. 191, (2007). https://doi.org/10.1016/j.jmatprotec.2007.03.005
Deshmukh, S.S., Goswami, A.: Investigation of deviation in width of embossed micro-structure by hot embossing. IOP Conf. Ser.: Mater. Sci. Eng. 872, 012069 (2020). https://doi.org/10.1088/1757-899X/872/1/012069
Darwish, S.M.H., Ahmed, N., Al-Ahmari, A.M.: Literature review. In: Laser Beam Micro-Milling of Micro-Channels in Aerospace Alloys, pp. 15–80 (2017). https://doi.org/10.1007/978-981-10-3602-6_2
Sahu, A.K., Jha, S.: Microchannel fabrication and metallurgical characterization on titanium by nanosecond fiber laser micromilling. Mater. Manuf. Processes 35, (2020). https://doi.org/10.1080/10426914.2020.1718702
Canel, T., Bağlan, İ, Sinmazcelik, T.: Mathematical modelling of laser ablation of random oriented short glass fiber reinforced Polyphenylene sulphide (PPS) polymer composite. Opt. Laser Technol. 115, (2019). https://doi.org/10.1016/j.optlastec.2019.02.049
Jain, A., Singh, B., Shrivastava, Y.: Heat-affected zone investigation during the laser beam drilling of hybrid composite using statistical approach. Arab. J. Sci. Eng. 45, (2020). https://doi.org/10.1007/s13369-019-04162-5
Ahmed, N., Ahmad, S., Anwar, S., et al.: Machinability of titanium alloy through laser machining: material removal and surface roughness analysis. Int. J. Adv. Manuf. Technol. 105, (2019). https://doi.org/10.1007/s00170-019-04564-7
Bachy, B., Al-Dunainawi, Y.: Influence of the effective parameters on the quality of laser micro-cutting process: Experimental analysis, modeling and optimization. J. Laser Appl. 32, (2020). https://doi.org/10.2351/1.5098080
Farasati, R., Ebrahimzadeh, P., Fathi, J., Teimouri, R.: Optimization of laser micromachining of Ti–6Al–4V. Int. J. Light. Mater. Manuf. 2, (2019). https://doi.org/10.1016/j.ijlmm.2019.08.002
Ahmed, N., Alahmari, A.M., Darwish, S., Naveed, M.: Laser beam micro-milling of nickel alloy: dimensional variations and RSM optimization of laser parameters. Appl. Phys. A 122, (2016). https://doi.org/10.1007/s00339-016-0553-2
Parmar, V., Kumar, A., Prakash, G.V., et al.: Investigation, modelling and validation of material separation mechanism during fiber laser machining of medical grade titanium alloy Ti6Al4V and stainless steel SS316L. Mech. Mater. 137, (2019). https://doi.org/10.1016/j.mechmat.2019.103125
Meijer, J.: Laser beam machining (LBM), state of the art and new opportunities. J. Mater. Process. Technol. 149, (2004). https://doi.org/10.1016/j.jmatprotec.2004.02.003
Ahmed, N., Darwish, S., Alahmari, A.M.: Laser ablation and laser-hybrid ablation processes: A review. Mater. Manuf. Processes 31, 1121 (2016). https://doi.org/10.1080/10426914.2015.1048359
Lei, C., Pan, Z., Jianxiong, C., Tu, Y.: Theoretical and experimental analysis of the impact on ablation depth of microchannel milling using femtosecond laser. Opt. Lasers Eng. 103, (2018). https://doi.org/10.1016/j.optlaseng.2017.12.005
Sen, A., Doloi, B., Bhattacharyya, B.: Experimental studies on fibre laser micro-machining of Ti-6al-4v. In: 5th International & 26th All India Manufacturing Technology, Design and Research Conference (AIMTDR 2014), vol. 14) (2014)
Agrawal, P.K.: Laser micromachining: technology and applications. In: International Journal of Engineering Research and Applications (IJERA), National Conference on Advances in Engineering and Technology (2014)
Rejab, M.R.M., Mon, T.T., Rashid, M.F.F., Shalahim, N.S.M. Ismail, M.F.: Virtual laser-micromachining of MEMS components. Int. J. Recent Trends Eng 1(5), 105–109 (2009)
Liu, X., Du, D., Mourou, G.: Laser ablation and micromachining with ultrashort laser pulses. IEEE J. Quantum Electron. 33, (1997). https://doi.org/10.1109/3.631270
Ohmura, E., Fukumoto, I.: Study on fusing- and vaporizing-process of fcc metal due to laser irradiation: Molecular dynamics simulation. J. Jpn. Soc. Precis. Eng. 61(1), 1433 (1995). https://doi.org/10.2493/jjspe.61.1433
Najeeb, H.N., Dahash, G.A., Haddawi, S.F., Jassim, M.: Study of changes in optical properties of PMMA film before and after irradiation by laser. Chem. Mater. Eng. 2, 145–147 (2014). https://doi.org/10.13189/cme.2014.020603
Sen, A., Doloi, B., Bhattacharyya, B.: Fibre laser microchanneling of polymethyl methacrylate (PMMA). Lasers Eng. 35, 123–138 (2016)
Wu T, Wang Y, Ke C (2018) Experimental investigations of quality trapezoidal shape PMMA microchannel prepared by CO2 laser. In: Yang Y (ed) Tenth International Conference on Information Optics and Photonics. SPIE
Santos, P., Teixidor, D., Maudes, J., Ciurana, J.: Modelling laser milling of microcavities for the manufacturing of DES with ensembles. J. Appl. Math. 2014, (2014). https://doi.org/10.1155/2014/439091
Mahanty, S., Roy, N., Kuar, A., Mitra, S.: Mathematical modelling of the Nd:YAG laser microdrilling of aluminium 5052 for process optimization and analysis of sensitivity. Int. J. Laser Sci. 1, 91–108 (2018)
Teixidor, D., Grzenda, M., Bustillo, A., Ciurana, J.: Modeling pulsed laser micromachining of micro geometries using machine-learning techniques. J. Intell. Manuf. 26, (2015). https://doi.org/10.1007/s10845-013-0835-x
Abdollahi, H., Shahraki, S., Teimouri, R.: Empirical modeling and optimization of process parameters in ultrasonic assisted laser micromachining of Ti–6Al–4V. Int. J. Light. Mater. Manuf. 2, (2019). https://doi.org/10.1016/j.ijlmm.2019.08.008
Hung, C.-H., Chang, F.-Y.: Curve micromachining on the edges of nitinol biliary stent by ultrashort pulses laser. Opt. Laser Technol. 90, (2017). https://doi.org/10.1016/j.optlastec.2016.10.018
Rao, R., Yadava, V.: Multi-objective optimization of Nd:YAG laser cutting of thin superalloy sheet using grey relational analysis with entropy measurement. Opt. Laser Technol. 41, (2009). https://doi.org/10.1016/j.optlastec.2009.03.008
Wang, Y., Zhang, Z., Zhang, G., et al.: Study on immersion waterjet assisted laser micromachining process. J. Mater. Process. Technol. 262, (2018). https://doi.org/10.1016/j.jmatprotec.2018.07.004
Poddar, R., Sahu, A.K., Jha, S.: Experimental investigation of nano second fiber laser micro grooving on cylindrical surface. Mater. Today: Proc. 44, (2021). https://doi.org/10.1016/j.matpr.2020.12.120
Abdo, B.M.A., El-Tamimi, A.M., Anwar, S., et al.: Experimental investigation and multi-objective optimization of Nd:YAG laser micro-channeling process of zirconia dental ceramic. Int. J. Adv. Manuf. Technol. 98, (2018). https://doi.org/10.1007/s00170-018-2374-2
Pramanik, D., Das, S., Sarkar, S., Debnath, S.K., Kuar, A.S., Mitra, S.: Experimental Investigation of Fiber Laser Micro-Marking on Aluminum 6061 Alloy. In: Sahoo, P., Davim, J. (eds) Advances in Materials, Mechanical and Industrial Engineering. INCOM 2018. Lecture Notes on Multidisciplinary Industrial Engineering. Springer, Cham (2019). https://doi.org/10.1007/978-3-319-96968-8_13
Ghosal, A., Manna, A.: Response surface method based optimization of ytterbium fiber laser parameter during machining of Al/Al2O3-MMC. Opt. Laser Technol. 46, (2013). https://doi.org/10.1016/j.optlastec.2012.04.030
Yunus, M., Alsoufi, M.S.: Mathematical modeling of multiple quality characteristics of a laser microdrilling process used in Al7075/SiC p metal matrix composite using genetic programming. Model. Simul. Eng. 2019, (2019). https://doi.org/10.1155/2019/1024365
Kibria, G., Doloi, B., Bhattacharyya, B.: Modelling and optimization of Nd:YAG laser micro-turning process during machining of aluminum oxide (Al 2 O 3) ceramics using response surface methodology and artificial neural network. Manuf. Rev. 1, (2014). https://doi.org/10.1051/mfreview/2014011
Kumar Dubey, A., Yadava, V.: Multi-objective optimisation of laser beam cutting process. Opt. Laser Technol. 40, (2008). https://doi.org/10.1016/j.optlastec.2007.09.002
Kuar, A.S., Doloi, B., Bhattacharyya, B.: Modelling and analysis of pulsed Nd:YAG laser machining characteristics during micro-drilling of zirconia (ZrO2). Int. J. Mach. Tools Manuf 46, (2006). https://doi.org/10.1016/j.ijmachtools.2005.10.016
Umer, U., Mohammed, M.K., Al-Ahmari, A.: Multi-response optimization of machining parameters in micro milling of alumina ceramics using Nd:YAG laser. Measurement 95, (2017). https://doi.org/10.1016/j.measurement.2016.10.004
Arumugam, A., Lakshmanan, P., Palani, S.: Micro groove cutting on the surfaces of Cu-B4C nanocomposites by fiber laser. Surf. Topogr. Metrol. Prop. 9, (2021). https://doi.org/10.1088/2051-672X/ac1c7f
Hossain, A., Hossain, A., Nukman, Y., et al.: A fuzzy logic-based prediction model for kerf width in laser beam machining. Mater. Manuf. Processes 31, 679 (2016). https://doi.org/10.1080/10426914.2015.1037901
Prakash, S., Kumar, S.: Fabrication of rectangular cross-sectional microchannels on PMMA with a CO 2 laser and underwater fabricated copper mask. Opt. Laser Technol. 94, (2017). https://doi.org/10.1016/j.optlastec.2017.03.034
Sen, A., Doloi, B., Bhattacharyya, B.: Parametric influences of fiber laser micro-machining for the generation of micro-channels on PMMA. J. Braz. Soc. Mech. Sci. Eng. 42, (2020). https://doi.org/10.1007/s40430-020-02516-x
Chen, X., Shen, J., Zhou, M.: Rapid fabrication of a four-layer PMMA-based microfluidic chip using CO 2 -laser micromachining and thermal bonding. J. Micromech. Microeng. 26, 107001 (2016). https://doi.org/10.1088/0960-1317/26/10/107001
Zhou, J., Xu, R., Jiao, H., et al.: Study on the mechanism of ultrasonic-assisted water confined laser micromachining of silicon. Opt. Lasers Eng. 132, (2020). https://doi.org/10.1016/j.optlaseng.2020.106118
Feng, S., Huang, C., Wang, J., Zhu, H.: Material removal of single crystal 4H-SiC wafers in hybrid laser-waterjet micromachining process. Mater. Sci. Semicond. Process. 82, (2018). https://doi.org/10.1016/j.mssp.2018.03.035
Deng, D., Xie, Y., Chen, L., Chen, X.: Experimental investigation on laser micromilling of SiC microchannels. Int. J. Adv. Manuf. Technol. 101, (2019). https://doi.org/10.1007/s00170-018-2800-5
Gopinath, C., Lakshmanan, P., Palani, S.: Fiber laser microcutting on duplex steel: parameter optimization by TOPSIS. Mater. Manuf. Processes 37, 985–994 (2022). https://doi.org/10.1080/10426914.2021.1981939
Kar, T., Deshmukh, S.S., Goswami, A.: Investigation of fiber laser micro-channel depth on silicon wafer. Mater. Today: Proc. 60, 2105–2110 (2022). https://doi.org/10.1016/j.matpr.2022.02.024
Saini, S.K., Dubey, A.K., Upadhyay, B.N., Choubey, A.: Study of hole characteristics in Laser Trepan Drilling of ZTA. Opt. Laser Technol. 103, 330–339 (2018). https://doi.org/10.1016/j.optlastec.2018.01.052
Chatterjee, S., Mahapatra, S.S., Bharadwaj, V., et al.: Prediction of quality characteristics of laser drilled holes using artificial intelligence techniques. Eng. Comput. 37, 1181–1204 (2021). https://doi.org/10.1007/s00366-019-00878-y
Cheng, J., Liu, C., Shang, S., et al.: A review of ultrafast laser materials micromachining. Opt. Laser Technol. 46, (2013). https://doi.org/10.1016/j.optlastec.2012.06.037
Teimouri, R., Amini, S., Lotfi, M., Alinaghian, M.: Sustainable drilling process of 1045 steel plates regarding minimum energy consumption and desired work quality. Int. J. Light. Mater. Manuf. 2, (2019). https://doi.org/10.1016/j.ijlmm.2019.04.011
Carslaw, H.S., Jaeger, J.C.: Conduction of heat in solids. Clarendon Press, Oxford (1959)
Negarestani, R., Sundar, M., Sheikh, M.A., et al.: Numerical simulation of laser machining of carbon-fibre-reinforced composites. Proc. Inst. Mech. Eng., Part B: J. Eng. Manuf. 224, (2010). https://doi.org/10.1243/09544054JEM1662
Pan, C.T., Hocheng, H.: The anisotropic heat-affected zone in the laser grooving of fiber-reinforced composite material. J. Mater. Process. Technol. 62, (1996). https://doi.org/10.1016/0924-0136(95)02192-2
Weber, R., Hafner, M., Michalowski, A., Graf, T.: Minimum damage in CFRP laser processing. Phys. Procedia 12, (2011). https://doi.org/10.1016/j.phpro.2011.03.137
Cheng, C.F., Tsui, Y.C., Clyne, T.W.: Application of a three-dimensional heat flow model to treat laser drilling of carbon fibre composites. Acta Mater. 46, (1998). https://doi.org/10.1016/S1359-6454(98)00090-1
Tangwarodomnukun, V., Likhitangsuwat, P., Tevinpibanphan, O., Dumkum, C.: Laser ablation of titanium alloy under a thin and flowing water layer. Int. J. Mach. Tools Manuf 89, (2015). https://doi.org/10.1016/j.ijmachtools.2014.10.013
Tangwarodomnukun, V., Chen, H.-Y.: Laser ablation of PMMA in air, water, and ethanol environments. Mater. Manuf. Processes 30, 685 (2015). https://doi.org/10.1080/10426914.2014.994774
Tangwarodomnukun, V., Mekloy, S., Dumkum, C., Prateepasen, A.: Laser micromachining of silicon in air and ice layer. J. Manuf. Process. 36, (2018). https://doi.org/10.1016/j.jmapro.2018.10.008
Faisal, N., Zindani, D., Kumar, K., Bhowmik, S.: Laser micromachining of engineering materials—a review. In: Micro and Nano Machining of Engineering Materials. Springer (2018). https://doi.org/10.1007/978-3-319-99900-5
Colin Moorhouse: Industrial applications of a fiber-based high-average-power picosecond laser. In: Proc. SPIE 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII, 72010F (2009). https://doi.org/10.1117/12.805506
Shi, Y., Jiang, Z., Cao, J., Ehmann, K.F.: Texturing of metallic surfaces for superhydrophobicity by water jet guided laser micro-machining. Appl. Surf. Sci. 500, (2020). https://doi.org/10.1016/j.apsusc.2019.144286
Bulushev, E., Bessmeltsev, V., Dostovalov, A., et al.: High-speed and crack-free direct-writing of microchannels on glass by an IR femtosecond laser. Opt. Lasers Eng. 79, (2016). https://doi.org/10.1016/j.optlaseng.2015.11.004
Pattanayak, S., Kumar Sahoo, S.: Micro engraving on 316L stainless steel orthopedic implant using fiber laser. Opt. Fiber Technol. 63, (2021). https://doi.org/10.1016/j.yofte.2021.102479
Zhang, Y., Wang, Y., Zhang, J., et al.: Effects of laser repetition rate and fluence on micromachining of TiC ceramic. Mater. Manuf. Processes 31, 832 (2016). https://doi.org/10.1080/10426914.2015.1037916
Jasim, H.A., Demir, A.G., Previtali, B., Taha, Z.A.: Process development and monitoring in stripping of a highly transparent polymeric paint with ns-pulsed fiber laser. Opt. Laser Technol. 93, (2017). https://doi.org/10.1016/j.optlastec.2017.01.031
Dalaq, A.S., Barthelat, F.: Three-dimensional laser engraving for fabrication of tough glass-based bioinspired materials. JOM 72, (2020). https://doi.org/10.1007/s11837-019-04001-w
Funding
The present work is supported by Science and Engineering Research Board (SERB) under Grant [SRG/2019002093(vide diary no. SERB/F/692)].
Author information
Authors and Affiliations
Corresponding author
Ethics declarations
Conflict of Interest
The authors declare no conflict of interest in this study.
Additional information
Publisher’s Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
Springer Nature or its licensor holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.
About this article
Cite this article
Kar, T., Goswami, A. Mathematical Modeling Approaches and New Development in Laser Micro Machining Process: A Review. Lasers Manuf. Mater. Process. 9, 532–568 (2022). https://doi.org/10.1007/s40516-022-00189-z
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s40516-022-00189-z