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Solid–liquid Interdiffusion Bonding of Cu/Sn/Ni Micro-joints with the Assistance of Temperature Gradient

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Acta Metallurgica Sinica (English Letters) Aims and scope

Abstract

A novel solid–liquid interdiffusion (SLID) bonding method with the assistance of temperature gradient (TG) was carried out to bonding Cu and Ni substrates with Sn as interlayer. The element distribution and grain morphology of interfacial intermetallic compound (IMC) in Cu/Sn/Ni micro-joints during both SLID and TG-SLID bonding and in the final Cu/(Cu,Ni)6Sn5/Ni full IMC micro-joints were analyzed. Under the effect of Cu-Ni cross-interaction, interfacial (Cu,Ni)6Sn5 dominated the IMC growth at all the interfaces. The morphology of the (Cu,Ni)6Sn5 grains was closely related to Ni content with three levels of low, medium and high. The full IMC micro-joints consisted of L-(Cu,Ni)6Sn5, M-(Cu,Ni)6Sn5 and H-(Cu,Ni)6Sn5 grains after SLID bonding or TG-SLID bonding with Ni as hot end, while only L-(Cu,Ni)6Sn5 grains after TG-SLID bonding with Cu as hot end, showing that the direction of TG had a remarkably effect on the growth and morphology of the interfacial (Cu,Ni)6Sn5 during TG-SLID bonding. Thermodynamic analysis revealed the key molar latent heat and critical Ni content between fine-rounded-like (Cu,Ni)6Sn5 and block-like (Cu,Ni)6Sn5 were 17,725.4 J and 11.0 at.% at 260 °C, respectively. Moreover, the growth kinetic of the interfacial IMC was analyzed in detail during bonding with and without TG. Under the combination of TG and Cu-Ni cross-interaction, void-free full IMC micro-joints were fast formed by TG-SLID bonding with Cu as hot end. This bonding method may present a feasible solution to solve the problems of low formation efficiency and inevitable Cu3Sn growth of full IMC joints for 3D packaging applications.

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References

  1. K.N. Tu, Y.X. Liu, Mater. Sci. Eng. R 136, 1 (2019)

    Article  Google Scholar 

  2. Y.Y. Qiao, H.T. Ma, F.Y. Yu, N. Zhao, Acta Mater. 217, 117168 (2021)

    Article  CAS  Google Scholar 

  3. Y. Chen, Z.Q. Gao, Z.Q. Liu, Acta Metall. Sin. -Engl. Lett. (2022). https://doi.org/10.1007/s40195-021-01357-4

    Article  Google Scholar 

  4. C.T. Ko, K.N. Chen, Microelectron. Reliab. 52, 302 (2012)

    Article  Google Scholar 

  5. L. Arnaud, C. Karam, N. Bresson, C. Dubarry, S. Borel, M. Assous, G. Mauguen, F. Fournel, M. Gottardi, T. Mourier, MRS Commun. 10, 549 (2020)

    Article  CAS  Google Scholar 

  6. Z.Y. Zhang, J.S. Chen, J.N. Wang, Y.Z. Han, Z.Y. Yu, Q.Z. Wang, P.L. Zhang, S.L. Yang, Weld. World 66, 973 (2022)

    Article  Google Scholar 

  7. L. Sun, M.H. Chen, L. Zhang, P. He, L.S. Xie, J. Alloys Compd. 818, 152825 (2020)

    Article  CAS  Google Scholar 

  8. C.T. Ko, K.N. Chen, Microelectron. Reliab. 53, 7 (2013)

    Article  CAS  Google Scholar 

  9. Y. Zhong, N. Zhao, W. Dong, H.T. Ma, M.L. Huang, L.Q. Yin, C.P. Wong, J. Mater. Res. 32, 3128 (2017)

    Article  CAS  Google Scholar 

  10. N.S. Bosco, F.W. Zok, Acta Mater. 52, 2965 (2004)

    Article  CAS  Google Scholar 

  11. J.F. Li, P.A. Agyakwa, C.M. Johnson, Acta Mater. 58, 3429 (2010)

    Article  CAS  Google Scholar 

  12. Y. Tian, H. Fang, N. Ren, Y.T. Zhao, B.L. Chen, F.S. Wu, K.W. Paik, J. Alloys Compd. 828, 154468 (2020)

    Article  CAS  Google Scholar 

  13. Y.S. Chiu, H.Y. Yu, H.T. Hung, Y.W. Wang, C.R. Kao, Microelectron. Reliab. 95, 18 (2019)

    Article  CAS  Google Scholar 

  14. J.W. Yoon, B.S. Lee, Thin Solid Films 660, 618 (2018)

    Article  CAS  Google Scholar 

  15. Y.W. Chang, C.C. Hu, H.Y. Peng, Y.C. Liang, C. Chen, T.C. Chang, C.J. Zhan, J.Y. Juang, Sci. Rep. 8, 1 (2018)

    Google Scholar 

  16. Y.Q. Lai, S. Chen, X.L. Ren, Y.Y. Qiao, N. Zhao, Mater. Charact. 186, 111803 (2022)

    Article  CAS  Google Scholar 

  17. N. Zhao, Y. Zhong, M.L. Huang, H.T. Ma, W. Dong, Sci. Rep. 5, 13491 (2015)

    Article  CAS  Google Scholar 

  18. J.N. Wang, J.S. Chen, Z.Y. Zhang, P.L. Zhang, Z.S. Yu, S.Y. Zhang, Solder. Surf. Mt. Technol. 34, 124 (2022)

    Article  Google Scholar 

  19. H.Z. Wang, X.W. Hu, X.X. Jiang, Mater. Charact. 163, 110287 (2020)

    Article  CAS  Google Scholar 

  20. Y.S. Huang, H.Y. Hsiao, C. Chen, K.N. Tu, Scr. Mater. 66, 741 (2012)

    Article  CAS  Google Scholar 

  21. H.J. Dong, Z.L. Li, X.G. Song, H.Y. Zhao, H. Tian, J.H. Liu, J.C. Yan, Mater. Sci. Eng. A 705, 360 (2017)

    Article  CAS  Google Scholar 

  22. K.D. Min, C.J. Lee, B.U. Hwang, J.H. Kim, J.H. Jang, S.B. Jung, Appl. Surf. Sci. 551, 149396 (2021)

    Article  CAS  Google Scholar 

  23. L.P. Mo, C.W. Guo, Z. Zhou, F.S. Wu, C.Q. Liu, J. Mater. Sci. Mater. Electron. 29, 11920 (2018)

    Article  CAS  Google Scholar 

  24. N. Zhao, Y. Zhong, M.L. Huang, W. Dong, H.T. Ma, Y.P. Wang, J. Alloys Compd. 682, 1 (2016)

    Article  CAS  Google Scholar 

  25. N. Zhao, J.F. Deng, Y. Zhong, H.T. Ma, Y.P. Wang, C.P. Wong, J. Mater. Res. 32, 3555 (2017)

    Article  CAS  Google Scholar 

  26. T.L. Bergman, F.P. Incropera, D.P. DeWitt, A.S. Lavine, Fundamentals of Heat and Mass Transfer (Wiley, New York, 2011)

    Google Scholar 

  27. M.V. Peralta-Martinez, W.A. Wakeham, Int. J. Thermophys. 22, 395 (2001)

    Article  CAS  Google Scholar 

  28. S.J. Wang, C.Y. Liu, J. Electron. Mater. 32, 1303 (2003)

    Article  CAS  Google Scholar 

  29. Y.Q. Lai, X.W. Hu, Y.L. Li, X.X. Jiang, J. Mater. Sci. Mater. Electron. 29, 11314 (2018)

    Article  CAS  Google Scholar 

  30. C.Y. Liu, J.T. Chen, Y.C. Chuang, L. Ke, S.J. Wang, Appl. Phys. Lett. 90, 112 (2007)

    Google Scholar 

  31. H. Frederikse, R. Fields, A. Feldman, J. Appl. Phys. 72, 2879 (1992)

    Article  CAS  Google Scholar 

  32. F. Meydaneri, B. Saatçi, M. Özdemir, Fluid Phase Equilib 298, 97 (2010)

    Article  CAS  Google Scholar 

  33. C.W. Chang, S.C. Yang, C.T. Tu, C.R. Kao, J. Electron. Mater. 36, 1455 (2007)

    Article  CAS  Google Scholar 

  34. S.J. Wang, C.Y. Liu, J. Electron. Mater. 35, 1955 (2006)

    Article  CAS  Google Scholar 

  35. K. Zeng, J.K. Kivilahti, J. Electron. Mater. 30, 35 (2001)

    Article  CAS  Google Scholar 

  36. C.Y. Li, J.G. Duh, J. Mater. Res. 20, 3118 (2005)

    Article  CAS  Google Scholar 

  37. G. Zeng, S.D. McDonald, D.K. Mu, Y. Terada, H. Yasuda, Q.F. Gu, K. Nogita, Intermetallics 54, 20 (2014)

    Article  CAS  Google Scholar 

  38. F. Gao, T. Takemoto, H. Nishikawa, J. Electron. Mater. 35, 2081 (2006)

    Article  CAS  Google Scholar 

  39. F. Gao, T. Takemoto, J. Alloys Compd. 421, 283 (2006)

    Article  CAS  Google Scholar 

  40. C.Y. Yu, W.Y. Chen, J.G. Duh, Intermetallics 26, 11 (2012)

    Article  CAS  Google Scholar 

  41. K. Chu, Y. Sohn, C. Moon, Scr. Mater. 109, 113 (2015)

    Article  CAS  Google Scholar 

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Acknowledgements

This work was financially supported by the National Natural Science Foundation of China (No. 52075072) and the Fundamental Research Funds for the Central Universities (No. DUT20JC46).

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Correspondence to Ning Zhao.

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Lai, Y., Chen, S., Ren, X. et al. Solid–liquid Interdiffusion Bonding of Cu/Sn/Ni Micro-joints with the Assistance of Temperature Gradient. Acta Metall. Sin. (Engl. Lett.) 35, 1912–1924 (2022). https://doi.org/10.1007/s40195-022-01424-4

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  • DOI: https://doi.org/10.1007/s40195-022-01424-4

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