Fabrication and characterization of Mn-implanted GaN layers followed by annealing

Abstract

We report the effect of Mn incorporation on the structural and optical properties of GaN grown on a sapphire substrate in a plasma-enhanced molecular-beam epitaxy system followed by Mn ion implantation and annealing. The crystalline quality and phase purity were determined by high-resolution X-ray diffraction (XRD). The XRD results indicated that no macroscopic second phases were present in the Mn-implanted GaN layer after the annealing process. High-resolution transmission microscopy and energy dispersive X-ray spectroscopy revealed that the as-grown GaN epilayer and Mn-implanted GaN layer after annealing were single crystals with a hexagonal wurtzite structure, and they grew with a c-axis orientation perpendicular to the sapphire substrate. The Raman and photoluminescence spectra showed that the Mn-implanted GaN layer fabricated with a Mn ion dose of 5 × 1015 cm−2 followed by annealing at 800 °C for 30 min had higher crystalline quality than the Mn-implanted GaN layers fabricated with Mn ion doses of 5 × 1015 and 2 × 1016 cm−2 followed by annealed at 900 °C for 30 and 80 min.

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Acknowledgments

This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) grant funded by the Ministry of Education, Science and Technology (MEST) (NRF-2016R1D1A1B03930992), (NRF-2016R1A6A1A03012877).

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Correspondence to Im Taek Yoon.

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Yoon, I.T., Fu, D. Fabrication and characterization of Mn-implanted GaN layers followed by annealing. J Theor Appl Phys (2020). https://doi.org/10.1007/s40094-020-00399-w

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Keywords

  • Mn-implantation
  • GaN
  • Thermal annealing
  • Raman
  • Photoluminescence