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Linearity enhancement and noise reduction in a passivated AlGaAs/InGaAs/GaAs high-electron mobility transistor


AlGaAs/InGaAs high-electron mobility transistors (HEMTs) are fabricated using a developed highly selective process and then characterized. The AlGaAs/InGaAs HEMTs undergo (NH4)2Sx treatment prior to gate metal deposition. The experimental results demonstrate that the gate voltage swing (GVS) and the breakdown voltage of the studied HEMTs are increased upon passivation. Passivation also reduces the gate leakage current of the HEMTs. Sulfide passivation improves device linearity and reduces the minimum noise figure.

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This investigation was supported by the Ministry of Science and Technology of the Republic of China (Contract No. MOST 108-2221-E-259-002-MY2 and MOST 110-2221-E-259-019).

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Correspondence to Yu-Shyan Lin.

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Lin, YS., Huang, JJ. Linearity enhancement and noise reduction in a passivated AlGaAs/InGaAs/GaAs high-electron mobility transistor. J. Korean Phys. Soc. 79, 828–831 (2021).

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  • HEMT
  • Passivation
  • GVS
  • Linearity
  • Minimum noise figure