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Crystallization of silicon oxide films using Al as a catalyst

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Abstract

Poly-Si films were fabricated through crystallization of silicon oxide (SiOx, 0 ≤ x < 2) by the action of an Al catalyst. The crystallization was carried out by thermally annealing a SiOx–Al bilayer formed on a SiO2 layer grown on Si wafer. The resulting poly-Si film was found to possess a higher crystallinity than amorphous silicon (a-Si). Transmission electron microscopy and energy dispersive X-ray spectroscopy results clearly indicated that layer exchange was achieved in the case of SiOx with a low x value, but no distinct layer exchange was observed in the case of SiOx with a high x value. Possible explanations for the poly-Si formation were given.

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References

  1. S. Kumar, M. Nehra, A. Deep, D. Kedia, N. Dilbaghi, K.-H. Kim, Renew. Sustain. Energy Rev. 73, 821 (2017)

    Article  Google Scholar 

  2. B.G. Gribov, K.V. Zinov’ev, O.N. Kalashnik, N.N. Gerasimenko, D.I. Smirnov, V.N. Sukhanov, N.N. Kononov, S.G. Dorofeev, Semiconductors 51, 1675 (2017)

    Article  ADS  Google Scholar 

  3. J. Wang, J. Zhang, Y. Zhou, H. Liu, Q. Xue, X. Li, C.C. Chueh, H. Yip, Z. Zhu, A.K.Y. Jen, Nat. Commun. 11, 177 (2020)

    Article  ADS  Google Scholar 

  4. M.A. Green, A. Ho-Baillie, H.J. Snaith, Nat. Photon. 8, 506 (2014)

    Article  ADS  Google Scholar 

  5. X. Miao, S. Tongay, M.K. Petterson, K. Berke, A.G. Rinzler, B.R. Appleton, A.F. Hebard, Nano Lett. 12, 2745 (2012)

    Article  ADS  Google Scholar 

  6. S. Casaluci, M. Gemmi, V. Pellegrini, A.D. Carlo, F. Bonaccorso, Nanoscale 8, 5368 (2016)

    Article  ADS  Google Scholar 

  7. S.W. Lee, S.K. Joo, I.E.E.E. Elec, Dev. Lett. 17, 160 (1996)

    Article  Google Scholar 

  8. I. Gordon, L. Carnel, D. Van Gestel, G. Beaucarne, J. Poortmans, Prog. Photovoltaics Res. Appl. 15, 575 (2007)

    Article  Google Scholar 

  9. O. Nast, T. Puzzer, L.M. Koschier, A.B. Sproul, S.R. Wenham, Appl. Phys. Lett. 73, 3214 (1998)

    Article  ADS  Google Scholar 

  10. O. Nast, S.R. Wenham, J. Appl. Phys. 88, 124 (2000)

    Article  ADS  Google Scholar 

  11. J.H. Kim, J.Y. Lee, Jpn. J. Appl. Phys. 35, 2052 (1996)

    Article  ADS  Google Scholar 

  12. M. Kurosawa, N. Kawabata, T. Sadoh, M. Miyao, Appl. Phys. Lett. 95, 132103 (2009)

    Article  ADS  Google Scholar 

  13. R. Numata, K. Toko, N. Usami, T. Suemasu, Thin Solid Films 557, 150 (2014)

    ADS  Google Scholar 

  14. H. Kim, D. Kim, G. Lee, D. Kim, S.H. Lee, Sol. Energy Mater. Sol. Cells 74, 323 (2002)

    Article  Google Scholar 

  15. J.H. Kim, J.Y. Lee, K.S. Nam, J. Appl. Phys. 77, 95 (1995)

    Article  ADS  Google Scholar 

  16. R. Drosd, J. Washbum, J. Appl. Phys. 53, 397 (1982)

    Article  ADS  Google Scholar 

  17. Y. Sugimoto, N. Takata, T. Hirota, K.I. Ikeda, F. Yoshida, H. Nakashima, H. Nakashima, Jpn. J. Appl. Phys. 44, 4770 (2005)

    Article  ADS  Google Scholar 

  18. R.J. Kobliska, S.A. Solin, Phys. Rev. B 8, 3799 (1973)

    Article  ADS  Google Scholar 

  19. J. Haschke, D. Amkreutz, B. Rech, Jpn. J. Appl. Phys. 55, 0404 (2016)

    Article  Google Scholar 

  20. W. Duan, F. Meng, J. Bian, J. Yu, L. Zhang, Z. Liu, App. Sur. Sci. 327, 37 (2015)

    Article  ADS  Google Scholar 

  21. H.F. Ragaie, Electron. Lett. 18, 74 (1982)

    Article  ADS  Google Scholar 

Download references

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Authors and Affiliations

  1. Department of Physics, Kangwon National University, 1 Gangwondaehak-gil, Chuncheon, 24341, Gangwon-do, Korea

    Jong-Hwan Yoon

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  1. Jong-Hwan Yoon
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Yoon, JH. Crystallization of silicon oxide films using Al as a catalyst. J. Korean Phys. Soc. 79, 746–750 (2021). https://doi.org/10.1007/s40042-021-00280-2

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  • DOI: https://doi.org/10.1007/s40042-021-00280-2

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