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Investigation into Generation of Micro Features by Localised Electrochemical Deposition

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Abstract

With the fast advancement of technology, localised electrochemical deposition (LECD) is becoming very advantageous in generating high aspect ratio micro features to meet the steep demand in modern precision industries of the present world. Except many other advantages, this technology is highly uncomplicated and economical for fabricating metal micro-parts with in micron ranges. In the present study, copper micro-columns have been fabricated utilizing LECD process. Different process parameters such as voltage, frequency, duty ratio and electrolyte concentration, which affect the deposition performance have been identified and their effects on deposition performances such as deposition rate, height and diameter of the micro-columns have been experimentally investigated. Taguchi’s methodology has been used to study the effects as well as to obtain the optimum values of process parameters so that localised deposition with best performance can be achieved. Moreover, the generated micro-columns were carefully observed under optical and scanning electron microscope from where the surface quality of the deposited micro-columns has been studied qualitatively. Also, an array of copper micro-columns has been fabricated on stainless steel (SS-304) substrate for further exploration of LECD process capability.

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References

  1. R.A. Said, Microfabrication by localized electrochemical deposition: experimental investigation and theoretical modelling. Nanotechnology 14, 523–531 (2003)

    Article  Google Scholar 

  2. B. Bhattacharyya, Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology (Elsevier, Massachusetts, 2015)

    Google Scholar 

  3. E.M. El-Giar, R.A. Said, G.E. Bridges, D.J. Thomson, Localized electrochemical deposition of copper microstructures. J. Electrochem. Soc. 147, 586–591 (2000)

    Article  Google Scholar 

  4. R.A. Said, Localized electro-deposition (LED): the march toward process development. Nanotechnology 15, S649–S659 (2004)

    Article  Google Scholar 

  5. E.M. El-Giar, D.J. Thomson, Localized electrochemical plating of interconnects for microelectronics. WESCANEX 97: Proceedings of the IEEE Conference on Communications, Power and Computing, pp. 327–332, 1997

  6. J.D. Madden, I.W. Hunter, Three-dimensional microfabrication by localized electrochemical deposition. J. Microelectromech. Syst. 5, 24–32 (1996)

    Article  Google Scholar 

  7. L.J. Durney, Electroplating Engineering Handbook, 4th edn. (Van Nostrand-Reinhold, New York, 1984)

    Book  Google Scholar 

  8. M. Paunovic, M. Schlesinger, Fundamental of Electrochemical Deposition (Wiley, New York, 1998)

    Google Scholar 

  9. K. Shi, I. Zhitomirsky, Electrodeposition of carbon nanotubes triggered by cathodic and anodic reactions of dispersants. Mater. Manuf. Processes 30, 771–777 (2015)

    Article  Google Scholar 

  10. T. Ohgai, M. Mizumoto, S. Nomura, A. Kagawa, Electrochemical fabrication of metallic nanowires and metal oxide nanopores. Mater. Manuf. Processes 22, 440–443 (2007)

    Article  Google Scholar 

  11. D.H. He, P. Wang, P. Liu, X.K. Liu, F.C. Ma, J. Zhao, HA coating fabricated by electrochemical deposition on modified Ti6Al4V alloy. Surf. Coat. Technol. 301, 6–12 (2016)

    Article  Google Scholar 

  12. K. Ghezalia, L. Mentar, B. Boudine, A. Azizi, Electrochemical deposition of ZnS thin films and their structural, morphological and optical properties. J. Electroanal. Chem. 794, 212–220 (2017)

    Article  Google Scholar 

  13. J.M. Jang, S.W. Chung, H.C. Choe, W.A. Brantley, Electrochemical deposition behavior and characterization of Pd–Ag–HAp nanoparticles on ultra-fine TiO2 nanotubes. Surf. Coat. Technol. 320, 383–390 (2017)

    Article  Google Scholar 

  14. S.H. Yeo, J.H. Choo, Effects of rotor electrode in the fabrication of high aspect ratio microstructures by localized electrochemical deposition. J. Micromech. Microeng. (2001). doi:10.1088/0960-1317/11/5/301

    Google Scholar 

  15. S.H. Yeo, J.H. Choo, K.H.A. Sim, On the effects of ultrasonic vibrations on localized electrochemical deposition. J. Micromech. Microeng. (2002). doi:10.1088/0960-1317/12/3/312

    Google Scholar 

  16. M.M. Sundaram, A.B. Kamaraj, V.S. Kumar, Mask-less electrochemical additive manufacturing: a feasibility study. J. Manuf. Sci. Eng. 137, 1–9 (2015)

    Article  Google Scholar 

  17. C.Y. Lee, C.S. Lin, B.R. Lin, Localized electrochemical deposition process improvement by using different anodes and deposition directions. J. Micromech. Microeng. (2008). doi:10.1088/0960-1317/18/10/105008

    Google Scholar 

  18. J.C. Lin, T.K. Chang, J.H. Yang, Y.S. Chen, C.L. Chuang, Localized electrochemical deposition of micrometer copper columns by pulse plating. Electrochim. Acta 55, 1888–1894 (2010)

    Article  Google Scholar 

Download references

Acknowledgement

Authors acknowledge the financial support obtained from the University Grants Commission (UGC), New Delhi, for carrying out the research under CAS Phase-IV program of Production Engineering Department, Jadavpur University, Kolkata, India.

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  1. Production Engineering Department, Jadavpur University, Kolkata, 700032, India

    Subhrajit Debnath, Hanimur Rahaman Laskar & B. Bhattacharyya

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  1. Subhrajit Debnath
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  2. Hanimur Rahaman Laskar
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  3. B. Bhattacharyya
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Correspondence to Subhrajit Debnath.

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Debnath, S., Laskar, H.R. & Bhattacharyya, B. Investigation into Generation of Micro Features by Localised Electrochemical Deposition. J. Inst. Eng. India Ser. C 100, 113–119 (2019). https://doi.org/10.1007/s40032-017-0412-8

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  • DOI: https://doi.org/10.1007/s40032-017-0412-8

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