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Sauberkeitsanforderungen für High-Purity-Oberflächen

JOT Journal für Oberflächentechnik volume 62, pages 66–67 (2022)Cite this article

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  1. Vacom Vakuum Komponenten & Messtechnik GmbH, Großlöbichau, Germany

    Christian Worsch,  Thomas Kühn &  Michael Flämmich

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  1. Christian Worsch
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  2. Thomas Kühn
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  3. Michael Flämmich
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Worsch, C., Kühn, T. & Flämmich, M. Sauberkeitsanforderungen für High-Purity-Oberflächen. J Oberfl Techn 62 (Suppl 3), 66–67 (2022). https://doi.org/10.1007/s35144-022-1638-7

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  • DOI: https://doi.org/10.1007/s35144-022-1638-7