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Bandorf, R., Biehl, S. & Brand, J. Oberflächenintegrierte Dünnschichtsensoren. J Oberfl Techn 60, 48–50 (2020). https://doi.org/10.1007/s35144-019-0446-1
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DOI: https://doi.org/10.1007/s35144-019-0446-1