Electronic Materials Letters

, Volume 14, Issue 2, pp 101–111 | Cite as

Characterization of a Piezoelectric AlN Beam Array in Air and Fluid for an Artificial Basilar Membrane

  • Hyejin Jeon
  • Jongmoon Jang
  • Sangwon Kim
  • Hongsoo Choi
Article
  • 118 Downloads

Abstract

In this study, we present a piezoelectric artificial basilar membrane (ABM) composed of a 10-channel aluminum nitride beam array. Each beam varies in length from 1306 to 3194 μm for mimicking the frequency selectivity of the cochlea. To characterize the frequency selectivity of the ABM, we measured the mechanical displacement and piezoelectric output while applying acoustic stimulus at 100 dB sound pressure level in the range of 500 Hz–40 kHz. The resonance frequencies measured by mechanical displacement and piezoelectric output were in the range of 10.56–36.5 and 10.9–37.0 kHz, respectively. In addition, the electrical stimulus was applied to the ABMs to compare the mechanical responses in air and fluid. The measured resonance frequencies were in the range of 11.1–47.7 kHz in the air and 3.10–11.9 kHz in the fluid. Understanding the characteristics of the ABM is important for its potential use as a key technology for auditory prostheses.

Graphical Abstract

Keywords

Artificial basilar membrane (ABM) Piezoelectric AlN Frequency selectivity XeF2 dry etching Residual stress 

Notes

Acknowledgements

The authors would like to thank Center for Core Research Facilities of DGIST for technical support. This work is funded by the National Research Foundation of Korea (NRF) funded by the Ministry of Science, ICT & Future Planning (2014M3C1A9060874, 17-BD-0404) and by the DGIST R&D Program of the Ministry of Science.

References

  1. 1.
    Papsin, B.C., Gordon, K.A., Engl, N.: Cochlear implants for children with severe-to-profound hearing loss. J. Med. Overseas Ed. 357, 2380 (2007)Google Scholar
  2. 2.
    Waltzman, S.B.: Cochlear implants: current status. Expert Rev. Med. Devices 3, 647 (2006)CrossRefGoogle Scholar
  3. 3.
    Briggs, R.J., Eder, H.C., Seligman, P.M., Cowan, R.S., Plant, K.L., Dalton, J., et al.: Initial clinical experience with a totally implantable cochlear implant research device. Otol. Neurotol. 29, 114 (2008)CrossRefGoogle Scholar
  4. 4.
    Bachman, M., Zeng, F.-G., Xu, T., Li, G.-P.: Micromechanical resonator array for an implantable bionic ear. Audiol. Neurotol. 11, 95 (2006)CrossRefGoogle Scholar
  5. 5.
    White, R.D., Grosh, K.: Microengineered hydromechanical cochlear model. Proc. Natl. Acad. Sci. USA 102, 1296 (2005)CrossRefGoogle Scholar
  6. 6.
    Shintaku, H., Nakagawa, T., Kitagawa, D., Tanujaya, H., Kawano, S., Ito, J.: Development of piezoelectric acoustic sensor with frequency selectivity for artificial cochlea. Sens. Actuators A Phys. 158, 183 (2010)CrossRefGoogle Scholar
  7. 7.
    Lee, H.S., Chung, J., Hwang, G.T., Jeong, C.K., Jung, Y., Kwak, J.H., et al.: Flexible inorganic piezoelectric acoustic nanosensors for biomimetic artificial hair cells. Adv. Funct. Mater. 24, 6914 (2014)CrossRefGoogle Scholar
  8. 8.
    Inaoka, T., Shintaku, H., Nakagawa, T., Kawano, S., Ogita, H., Sakamoto, T., et al.: Piezoelectric materials mimic the function of the cochlear sensory epithelium. Proc. Natl. Acad. Sci. 108, 18390 (2011)CrossRefGoogle Scholar
  9. 9.
    Tanaka, K., Abe, M., Ando, S., Trans, I.E.E.E.A.S.M.E.: A novel mechanical cochlea “Fishbone” with dual sensor/actuator characteristics. Mechatronics 3, 98 (1998)CrossRefGoogle Scholar
  10. 10.
    Kim, S., Song, W.J., Jang, J., Jang, J.H., Choi, H.: Mechanical frequency selectivity of an artificial basilar membrane using a beam array with narrow supports. J. Micromech. Microeng. 23, 095018 (2013)CrossRefGoogle Scholar
  11. 11.
    Kim, S., Song, W.J., Jang, J., Jang, J.H., Choi, H.: Characterization and modeling of an acoustic sensor using AlN thin-film for frequency selectivity. Electron. Mater. Lett. 10, 299 (2014)CrossRefGoogle Scholar
  12. 12.
    Jang, J., Kim, S., Sly, D.J., O’leary, S.J., Choi, H.: MEMS piezoelectric artificial basilar membrane with passive frequency selectivity for short pulse width signal modulation. Sens. Actuators A Phys. 203, 6 (2013)CrossRefGoogle Scholar
  13. 13.
    Jang, J., Lee, J., Woo, S., Sly, D.J., Campbell, L.J., Cho, J.-H., et al.: A microelectromechanical system artificial basilar membrane based on a piezoelectric cantilever array and its characterization using an animal model. Sci. Rep. 5, 12447 (2015)CrossRefGoogle Scholar
  14. 14.
    Song, W.J., Jang, J., Kim, S., Choi, H.: Piezoelectric performance of continuous beam and narrow supported beam arrays for artificial basilar membranes. Electron. Mater. Lett. 10, 1011 (2014)CrossRefGoogle Scholar
  15. 15.
    Song, W.J., Jang, J., Kim, S., Choi, H.: Influence of mechanical coupling by SiO2 membrane on the frequency selectivity of microfabricated beam arrays for artificial basilar membranes. J. Mech. Sci. Technol. 29, 963 (2015)CrossRefGoogle Scholar
  16. 16.
    Jang, J., Lee, J., Jang, J.H., Choi, H.: A triboelectric‐based artificial basilar membrane to mimic cochlear tonotopy. Adv. Healthc. Mater. 5, 2481 (2016)CrossRefGoogle Scholar
  17. 17.
    Ren, T.: Longitudinal pattern of basilar membrane vibration in the sensitive cochlea. Proc. Natl. Acad. Sci. 99, 17101 (2002)CrossRefGoogle Scholar
  18. 18.
    Robles, L., Ruggero, M.A.: Mechanics of the mammalian cochlea. Physiol. Rev. 81, 1305 (2001)CrossRefGoogle Scholar
  19. 19.
    Jung, Y., Kwak, J.-H., Lee, Y.H., Kim, W.D., Hur, S.: Development of a multi-channel piezoelectric acoustic sensor based on an artificial basilar membrane. Sensors 14, 117 (2013)CrossRefGoogle Scholar
  20. 20.
    Chen, S.-J., Choe, Y., Baumgartel, L., Lin, A., Kim, E.S.: Edge-released, piezoelectric MEMS acoustic transducers in array configuration. J. Micromech. Microeng. 22, 025005 (2012)CrossRefGoogle Scholar
  21. 21.
    Kamohara, T., Akiyama, M., Kuwano, N.: Influence of molybdenum bottom electrodes on crystal growth of aluminum nitride thin films. J. Cryst. Growth 310, 345 (2008)CrossRefGoogle Scholar
  22. 22.
    Shen, D., Park, J.-H., Ajitsaria, J., Choe, S.-Y., Wikle III, H.C., Kim, D.-J.: The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting. J. Micromech. Microeng. 18, 055017 (2008)CrossRefGoogle Scholar
  23. 23.
    Baumgartel, L., Vafanejad, A., Chen, S.-J., Kim, E.S.: Resonance-enhanced piezoelectric microphone array for broadband or prefiltered acoustic sensing. J. Microelectromech. Syst. 22, 107 (2013)CrossRefGoogle Scholar

Copyright information

© The Korean Institute of Metals and Materials 2018

Authors and Affiliations

  • Hyejin Jeon
    • 1
    • 2
  • Jongmoon Jang
    • 1
    • 2
    • 3
  • Sangwon Kim
    • 1
    • 2
  • Hongsoo Choi
    • 1
    • 2
  1. 1.Department of Robotics EngineeringDaegu Gyeongbuk Institute of Science and Technology (DGIST)DaeguKorea
  2. 2.DGIST-ETH Microrobot Research Center, DGISTDaeguKorea
  3. 3.Microsystems LaboratoryÉcole Polytechnique Fédérale de LausanneLausanneSwitzerland

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