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Performance Enhancement of Piezoelectric MEMS Energy Harvester Using Split Proof Mass for Powering Ultralow Power Wireless Sensor Nodes

  • Research Article-Electrical Engineering
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Abstract

Recently, energy harvesting for battery-operated sensor nodes have received a great deal of attention in boosting their lifespan. Considering green energy sources like vibration, piezoelectric vibrational energy harvesting is an effective technique to provide add-on power to these sensor nodes. High power density at ultra-low frequency is crucial for designing a microcantilever-based piezoelectric energy harvester (PEH). An area optimized with high power efficiency micro-electromechanical system (MEMS) PEH using split proof mass arrangement is reported in this article. The proposed harvester is comprised of alternate layers of copper electrode and Barium Titanate \((BaTiO_3)\) piezoelectric material with tungsten split proof mass arrangement. Finite element method (FEM) simulation is used to evaluate the performance of harvester using unequal weighted proof masses at different lengths of the beam. The optimized split proof mass harvester results in 31 % reduction in resonance frequency compared to conventional single proof mass harvester beam. The maximum output power of 1.6 \(\mu \)W is obtained at 57.1 Hz of resonant frequency with an input acceleration of 1g. The normalized areal and volumetric power density was found to be \(4.44\times 10^{-2} \mu \hbox {W/mm}^2 \cdot \hbox {g}^2 \cdot \hbox {Hz}\) and \(4.95 \mu \hbox {W/mm}^3 \cdot \hbox {g}^2 \cdot \hbox {Hz}\).

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Authors and Affiliations

  1. Department of Electronics and Telecommunication Engineering, National Institute of Technology, Raipur, India

    Vicky Butram & Alok Naugarhiya

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  1. Vicky Butram
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  2. Alok Naugarhiya
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Correspondence to Vicky Butram.

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Butram, V., Naugarhiya, A. Performance Enhancement of Piezoelectric MEMS Energy Harvester Using Split Proof Mass for Powering Ultralow Power Wireless Sensor Nodes. Arab J Sci Eng 47, 2755–2762 (2022). https://doi.org/10.1007/s13369-021-05829-8

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  • DOI: https://doi.org/10.1007/s13369-021-05829-8

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