Arabian Journal for Science and Engineering

, Volume 39, Issue 3, pp 2331–2338 | Cite as

Study of Physical Aspects of Rarefied Gas Flow Through Micro/Nano Scale Channels Using DSMC

  • Abdolrasoul Rangrazi
  • Ehsan Roohi
  • Hassan Akhlaghi
Research Article - Mechanical Engineering


Rarefied gas flow through micro/nano electro mechanical systems does not perform exactly as that in macro-scale devices. The main goal of this study was to investigate mixed subsonic–supersonic flows in micro/nano channels and to provide physical descriptions on their behaviours. We use DSMC method as a reliable numerical tool to extend our simulation because it provides accurate solution for the Boltzmann equations over the entire range of rarefied flow regime or Knudsen numbers. As is known, the appearance of oblique/normal shocks at the inlet of a channel adds to the complexity of internal flow field analyses. We found some very unique physical aspects of micro/nano flows including mixed supersonic–subsonic flow regimes in constant area ducts and the attenuation of emitted shocks, which are attributed to the strong viscous forces and dominant rarefaction effects at micro/nano scales.


DSMC Micro/nano channel Rarefied flow Shock wave Mixed supersonic/subsonic flow 


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Copyright information

© King Fahd University of Petroleum and Minerals 2013

Authors and Affiliations

  • Abdolrasoul Rangrazi
    • 1
  • Ehsan Roohi
    • 1
  • Hassan Akhlaghi
    • 1
  1. 1.Department of Mechanical Engineering, Faculty of EngineeringFerdowsi University of MashhadMashhadIran

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