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Monolithic Tri-Axes Nickel-Based Accelerometer Design Verified Through Finite Element Analysis

  • Research Article - Electrical Engineering
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Abstract

The complete mathematical modeling and design verification of a novel monolithically integrated tri-axes MEMS capacitive accelerometer is presented in this paper. The designed accelerometer is a single structure having three individual single axis accelerometers, integrated on a single substrate uniformly centered on single axis with chip size of 3.2 mm × 3.5 mm. We have used standard commercially available surface micromachining technology MetalMUMPs available from MEMSCAP Inc. The designed accelerometer is optimized by analytical technique using Matlab. The physical level simulation is done in the Analyzer module of CoventorWare to verify the structural model of designed accelerometer. It is concluded that the results obtained from the physical level simulation are in good agreement with the analytically calculated results. The design has been successfully verified using the Finite Element Analysis.

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References

  1. Roylance L.M., Angell J.B.: Batch-fabricated silicon accelerometer. IEEE Trans. Electron Devices 26, 1911–1917 (1979)

    Article  Google Scholar 

  2. Yazdi N., Najafi K.: An all-silicon single-wafer micro-g accelerometer with a combined surface and bulk micromachining process. J. Microelectromech. Syst. 9(4), 544–550 (2000)

    Article  Google Scholar 

  3. Pottenger, M.D.: Design of micromachined inertial sensors. PhD Dissertation, Univ. of California (2001)

  4. Tsai, M.-H., Sun, C.-M., Wang, C., Lu, J., Fang, W.: A monolithic 3D fully-differential CMOS accelerometer. In: Proceedings of the 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Sanya, China, January 6–9 (2008)

  5. Tsuchiya T., Funabashi H.: A z-axis differential capacitive SOI accelerometer with vertical comb electrodes. Sens. Actuators A Phys. 116(3), 378–383 (2004)

    Article  Google Scholar 

  6. Toda, M.R., Takeda, N., Murakoshi, T., Nakamura, S., Esashi, M.: Electrostatically levitated spherical 3-axis accelerometer. In: Proceedings of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS’02), pp. 710–712 (2002)

  7. Chae J., Kulah H., Najafi K.: A monolithic three-axis micro-g micromachined silicon capacitive accelerometer. J. Microelectromech. Syst. 14(2), 235–242 (2005)

    Article  Google Scholar 

  8. Qu H., Fang D., Xie H.: A monolithic CMOS-MEMS 3-axis accelerometer with a low-noise, low-power dual-chopper amplifier. IEEE Sens. J. 8(9), 1511–1518 (2008)

    Article  Google Scholar 

  9. Hsu, T.-R.: MEMS and microsystems design and manufacture, 1st edn. The McGraw-Hill Companies, Inc., New York (2002)

  10. Zhou, Y.: Layout synthesis of accelerometers. Masters of Science project report, Department of Electrical and Computer Engineering, Carnegie Mellor University (1998)

  11. Bao, M.: Analysis and design principles of MEMS devices, 1st edn. Elsevier

  12. Cowen, A., Mahadevan, R., Johnson, S., Hardy, B.: MetalMUMPs design handbook, Rev. 2.0. MEMSCAP Inc

  13. CoventorWare ANALYZER, version 2008, Reference: MEMS and microsystems system-level design coventor, Inc

  14. Gad-el-Hak, M.: The MEMS handbook, pp. 3-18. CRC press LLC, Boca Raton

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Authors and Affiliations

  1. Faculty of Computer Science, Center for Advanced Studies in Engineering, Islamabad, Pakistan

    Shafaat A. Bazaz

  2. Department of Electrical Engineering, COMSATS Institute of Information Technology, Abbottabad, Pakistan

    Abid Iqbal

  3. Department of Electrical Engineering, COMSATS Institute of Information Technology, Lahore, Pakistan

    M. Shuja Khan

Authors
  1. Shafaat A. Bazaz
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  2. Abid Iqbal
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  3. M. Shuja Khan
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Correspondence to Shafaat A. Bazaz.

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Bazaz, S.A., Iqbal, A. & Khan, M.S. Monolithic Tri-Axes Nickel-Based Accelerometer Design Verified Through Finite Element Analysis. Arab J Sci Eng 38, 2103–2113 (2013). https://doi.org/10.1007/s13369-013-0585-2

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  • DOI: https://doi.org/10.1007/s13369-013-0585-2

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