Fabrication of various cross-sectional shaped polymer microchannels by a simple PDMS mold based stamping method


We describe a facile and simple stamping method to fabricate various cross-sectional shaped microfluidic channels in transparent polymer materials such as polydimethylsiloxane (PDMS), poly(methylmethacrylate) (PMMA), polystyrene (PS), and cyclic olefin copolymer (COC). First, microchannels of circular, rectangular, and triangular shape and different size were fabricated on a silicon wafer through an isotropic or anisotropic wet etching process, and the resultant microchannels on silicon wafers were transferred to PDMS through a replication technique. The produced PDMS with replicated convex microchannels served as a master mold. A variety of polymer solutions were pressed down against the PDMS master mold, and cured until the solvent was evaporated, generating circular, rectangular, and triangular shaped PDMS, PMMA, PS, and COC microchannels. The microchannels could be repeatedly prepared with a narrow standard deviation, thus demonstrating high reproducibility of the proposed method. The microchannel dimensions, shape, and surface roughness could be controlled by tuning the channel width of the mask, the wet etching direction, the etchant solution, and the concentration of KOH, respectively, when the microchannels were fabricated on a silicon wafer. This simple but efficient PDMS mold based stamping method can be widely used for fabricating different shaped microchannels on diverse polymer materials with high reproducibility, low cost, and high speed.

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  1. 1.

    Becker, H. & Gartmer, C. Polymer microfabrication methods for microfluidic analytical applications. Electrophoresis 21, 12–26 (2000).

    Article  CAS  Google Scholar 

  2. 2.

    Martynova, L. et al. Fabrication of plastic microfluid channels by imprinting methods. Anal. Chem. 69, 4783–4789 (1997).

    Article  CAS  Google Scholar 

  3. 3.

    McCormick, R.M., Nelson, R.J., Alonso-Amigo, M.G., Benvegnu, D.J. & Hooper, H.H. Microchannel electrophoretic separations of DNA in injection-molded plastic substrates. Anal. Chem. 69, 2626–2630 (1997).

    Article  CAS  Google Scholar 

  4. 4.

    Lee, D.B. Anisotropic etching of silicon. J. Appl. Phys. 40, 4569–4574 (1969).

    Article  CAS  Google Scholar 

  5. 5.

    Zubel, I. Silicon anisotropic etching in alkaline solutions III: On the possibility of spatial structures forming in the course of Si (100) anisotropic etching in KOH and KOH+IPA solutions. Sens. Actuators 84, 116–125 (2000).

    Article  Google Scholar 

  6. 6.

    Sato, K., Shikida, M., Yamashiro, T., Tsunekawa, M. & Ito, S. Roughening of single-crystal silicon surface etched by KOH water solution. Sens. Actuators 73, 122–130 (1999).

    Article  Google Scholar 

  7. 7.

    Nilsson, A., Petersson, F., Jonsson, H. & Laurell, T. Acoustic control of suspended particles in micro fluidic chip. Lab. Chip 4, 131–135 (2004).

    Article  CAS  Google Scholar 

  8. 8.

    Spierings, G.A.C.M. Wet chemical etching of silicate glasses in hydrofluoric acid based solutions. J. Mater. Sci. 28, 6261–6273 (1993).

    Article  CAS  Google Scholar 

  9. 9.

    Albero, J. et al. Fabrication of spherical microlenses by a combination of isotropic wet etching of silicon and molding techniques. Optics Express 17, 6283–6292 (2009).

    Article  Google Scholar 

  10. 10.

    Robbins, H. & Schwartz, B. Chemical etching of silicon. I. J. Electrochem. Soc. 106, 505–508 (1959).

    Article  CAS  Google Scholar 

  11. 11.

    Robbins, H. & Schwartz, B. Chemical etching of silicon. II. J. Electrochem. Soc. 107, 108–111 (1960).

    Article  CAS  Google Scholar 

  12. 12.

    Robbins, H. & Schwartz, B. Chemical etching of silicon. III. J. Electrochem. Soc. 108, 365–372 (1961).

    Article  Google Scholar 

  13. 13.

    Delamarche, E., Schmid, H., Michel, B. & Biebuyck, H. Stability of molded polydimethylsiloxane microstructures. Adv. Mater. 9, 741–746 (1997).

    Article  CAS  Google Scholar 

  14. 14.

    Hui, C.Y., Jagota, A., Lin, Y.Y. & Kramer, E.J. Constraints on microcontact printing imposed by stamp deformation. Langmuir 18, 1394–1407 (2002).

    Article  CAS  Google Scholar 

  15. 15.

    Choi, K.M. & Rogers, J.A. A photocurable poly(dimethylsiloxane) chemistry designed for soft lithographic molding and printing in the nanometer regime. J. Am. Chem. Soc. 125, 4060–4061 (2003).

    Article  CAS  Google Scholar 

  16. 16.

    Park, J., Kim, Y.S. & Hammond, P.T. Chemical nanopatterned surfaces using polyelectrolytes and ultraviolet-cured hard molds. Nano Lett. 5, 1347–1350 (2005).

    Article  CAS  Google Scholar 

  17. 17.

    Odom, T.W., Love, J.C., Wolfe, D.B., Paul, K.E. & Whitesides, G.M. Improved pattern transfer in soft lithography using composite stamps. Langmuir 18, 5314–5320 (2002).

    Article  CAS  Google Scholar 

  18. 18.

    Csucs, G., Kunzler, T., Feldman, K., Robin, F. & Spencer, N.D. Microcontact printing of macromolecules with submicrometer resolution by means of polyolefin stamps. Langmuir 19, 6104–6109 (2003).

    Article  CAS  Google Scholar 

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Correspondence to Tae Seok Seo.

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Choi, J.S., Piao, Y. & Seo, T.S. Fabrication of various cross-sectional shaped polymer microchannels by a simple PDMS mold based stamping method. BioChip J 6, 240–246 (2012). https://doi.org/10.1007/s13206-012-6306-1

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  • Various cross-sectional shaped microfluidic channels
  • Stamping method
  • PDMS mold
  • Polymethylmethacrylate (PMMA)
  • Cyclic olefin copolymer (COC)
  • Polystyrene (PS)