Abstract
This study proposes a facile method for fabricating long-period fiber gratings. Optical designs were created so that laser light could be written into the grating structure on the fiber cladding without the need to remove the protective polyimide (PI) buffer layer. A laser-assisted wet chemical etching process was used to fabricate a long-period fiber grating and to identify the etching rate and depth of the grating. Refraction occurred when the laser light first passed through the PI layer, and the refracted beam ablated the grating structure between the fiber cladding and the PI layer. The PI coating facilitated ablation by the refracted laser beam of regions in the fiber without the need to remove the buffer layer. Wet etching resulted in the formation of periodic crown structures on the fiber grating due to different etching speeds of the laser-ablated regions on the grating. The fiber sensor had a diameter of 55 μm and a period of 660 μm.
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Bai Z, Wang L, Zhang X, Ran C, Liao Q, Qin L (2020) A novel fiber-grafting-sensing testing method for temperature deformation of piezoelectric composites. Polym Testing 81:106162
Berghmans F, Geernaert T, Baghdasaryan T, Thienpont H (2014) Challenges in the fabrication of fibre Bragg gratings in silica and polymer microstructured optical fibres. Laser Photon Rev 8(1):27–52
Bushunov AA, Tarabrin MK, Lazarev VA (2021) Review of surface modification technologies for mid-infrared antireflection microstructures fabrication. Laser Photon Rev 15(5):2000202
Cao X, Tian D, Liu Y, Zhang L, Wang TJISJ (2018) Sensing characteristics of helical long-period gratings written in the double-clad fiber by CO2 laser. IEEE Sensors J 18(18):7481–7485
Corbari C, Champion A, Gecevičius M, Beresna M, Bellouard Y, Kazansky PG (2013) Femtosecond versus picosecond laser machining of nano-gratings and micro-channels in silica glass. J Optics Express 21(4):3946–3958
Dong X, Xie Z, Song Y, Yin K, Luo Z, Wang CJO et al (2017) Highly sensitive torsion sensor based on long period fiber grating fabricated by femtosecond laser pulses. Opt Laser Technol 97:248–253
Esposito F, Srivastava A, Sansone L, Giordano M, Campopiano S, Iadicicco A (2021) Label-free biosensors based on long period fiber gratings: a review. IEEE Sens J 21(11):12692–12705. https://doi.org/10.1109/JSEN.2020.3025488
Gao R, Jiang Y, Jiang L (2014) Multi-phase-shifted helical long period fiber grating based temperature-insensitive optical twist sensor. J Optics Express 22(13):15697–15709
Hnatovsky C, Taylor RS, Simova E, Bhardwaj VR, Rayner DM, Corkum PB (2005) Polarization-selective etching in femtosecond laser-assisted microfluidic channel fabrication in fused silica. Opt Lett 30(14):1867–1869. https://doi.org/10.1364/OL.30.001867
Hosseini Largani SR, Wen H-Y, Chen J-L, Chiang C-C (2019) Photoresist-free, laser-assisted chemical etching process for long-period fiber grating. Opt Express 27(20):28606–28617. https://doi.org/10.1364/OE.27.028606
Jayaprakash R, Whittaker CE, Georgiou K, Game OS, McGhee KE, Coles DM et al (2020) Two-dimensional organic-exciton polariton lattice fabricated using laser patterning. ACS Photonics 7(8):2273–2281
Jin X, Sun C, Duan S, Liu W, Li G, Zhang S et al (2019) High strain sensitivity temperature sensor based on a secondary modulated tapered long period fiber grating. IEEE Photonics J 11(1):1–8
Kawaguchi Y, Niino H, Sato T, Narazaki A, Kurosaki R (2007) A deep micro-trench on silica glass fabricated by laserinduced backside wet etching (LIBWE). J Phys: Conf Ser 59:380–383. https://doi.org/10.1088/1742-6596/59/1/080
Lee T, Jang D, Ahn D, Kim D (2010) Effect of liquid environment on laser-induced backside wet etching of fused silica. J Appl Phys 107(3):033112
Lorenz P, Ehrhardt M, Zimmer K (2012) Laser-induced front side and back side etching of fused silica with KrF and XeF excimer lasers using metallic absorber layers: a comparison. Appl Surf Sci 258(24):9742–9746
Luong KP, Tanabe-Yamagishi R, Yamada N, Ito Y (2020) Laser-assisted wet etching of silicon back surfaces using 1552 nm femtosecond laser. Int J Electr Mach 25:7
Marcinkevičius A, Juodkazis S, Watanabe M, Miwa M, Matsuo S, Misawa H et al (2001a) Femtosecond laser-assisted three-dimensional microfabrication in silica. Opt Lett 26(5):277–279
Marcinkevičius A, Juodkazis S, Watanabe M, Miwa M, Matsuo S, Misawa H et al (2001b) Femtosecond laser-assisted three-dimensional microfabrication in silica. J Optics Letters 26(5):277–279
Nguyen PT, Jang J, Kim S-M, Hwang T, Yeo J, Grigoropoulos CP et al (2021) Nanosecond laser-induced reshaping of periodic silicon nanostructures. Curr Appl Phys 22:43–49
Ross CA, MacLachlan DG, Choudhury D, Thomson RR (2018) Optimisation of ultrafast laser assisted etching in fused silica. Opt Express 26(19):24343–24356
Song Q, Chai L, Li Y, Pang D, Hu M (2020) Direct femtosecond laser ablation of large-area TaSe2, SnS2, and TiS2 thick films by a back ablation procedure. Appl Opt 59(25):7606–7612
Tabassum R, Kant R (2020) Laser-ablated core-shell nanostructures of MWCNT@ Ta2O5 as plasmonic framework for implementation of highly sensitive refractive index sensor. Sens Actuators A Phys 309:112028
Tanabe T, Okamoto T, Kannari F (2003) Spectrum-holographic formation of fine etching patterns on a silicon surface with pulse-shaped femtosecond laser pulses. Jpn J Appl Phys 42(9):5594–5597. https://doi.org/10.1143/jjap.42.5594
Turpin A, Loiko YV, Kalkandjiev TK, Mompart J (2016) Conical refraction: fundamentals and applications. Laser Photon Rev 10(5):750–771
Wang T-T, Bargiel S, Lardet-Vieudrin F, Wang Y-F, Wang Y-S, Laude V (2020) Collective resonances of a chain of coupled phononic microresonators. Phys Rev Appl 13(1):014022
Xi T, Wang D, Ma C, Yuan L (2021) Sensing characteristics of collapsed long period fiber gratings in tri-hole fiber. J Lightwave Technol 39(18):6008–6012
Yonemura M, Kato S, Hasegawa K, Takahashi H (2016a) Formation of through holes in glass substrates by laser-assisted etching. J Laser Micro Nanoeng 11(2):143
Yonemura M, Kato S, Hasegawa K, Takahashi H (2016b) Formation of through holes in glass substrates by laser-assisted etching. J Laser Micro Nanoeng 11(2):143
Zhang J, Tang X, Dong J, Wei T, Xiao H (2008) Zeolite thin film-coated long period fiber grating sensor for measuring trace chemical. J Optics Express 16(11):8317–8323
Zhang MY, Liu LZ, Hui K, Hui K (2017) Effect of alkali treatment on the mechanical property of polyimide film. Key Eng Mater Trans Tech Publ 744:364–369
Zhou K, Lai Y, Chen X, Sugden K, Zhang L, Bennion I (2007) A refractometer based on a micro-slot in a fiber Bragg grating formed by chemically assisted femtosecond laser processing. J Optics Express 15(24):15848–15853
Zimmer K, Böhme R, Rauschenbach B (2005) Adsorbed layer etching of fused silica by excimer laser with nanometer depth precision. Microelectron Eng 78:324–330
Acknowledgements
This study was financially supported by a grant from the Ministry of Science and Technology of Taiwan and by grant MOST 110-2221-E-992-054-MY3 and MOST 110-2222-E-309-001-.
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Wen, HY., Hsu, HC., Weng, JJ. et al. A facile process for fabricating long-period fiber grating sensors using a refracted laser beam and laser-assisted wet etching. Appl Nanosci 12, 2265–2276 (2022). https://doi.org/10.1007/s13204-022-02476-9
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DOI: https://doi.org/10.1007/s13204-022-02476-9