Study of lamellar multilayer grating near B K-edge and Si L-edge
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We present an efficient design of lamellar multilayer grating (LMG) for the extreme ultraviolet/soft X-ray region near both the Si L-edge and B K-edge. The designs of LMGs have been performed by exploring different materials combinations, which are capable of providing high resolution and peak reflectivity. The performance analysis of the designed LMGs is made analytically using the coupled wave theory for single-order regime. That provides an estimation of diffraction efficiency and resolution. The effect of structural imperfections such as tapering of the lamellar profile and interfacial width on the optical properties are also analysed to describe non-ideal LMG structures.
KeywordsDiffraction gratings Coupled wave theory Multilayers X-ray optics Interface roughness
PACS Nos.42.79.Dj 68.65.Ac 41.50. + h 68.35.Ct
The research group of the interfaces, multilayers, X-ray sources, and optics, from Laboratorie de Chimie Physique-Matière et Rayonnement, Paris, France is sincerely acknowledged for providing us the calculated efficiency profiles for NbC/Si-based ML and LMG structures using modal theory. Authors (MN and PCP) sincerely thank P. A. Naik and G. S. Lodha for constant support and encouragement throughout the work. PCP also thanks, Arijit Chakraborty for his help for “MATLAB” programming. PCP thanks, Homi Bhabha National Institute, India, for financial support.
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