Calibration of a Built-in Vacuum Sensor in a Gas Pressure Balance Down to 1 Pa Using RPG (Reverse-Operated Piston Gauge)
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In order to calibrate a built-in vacuum sensor installed in a gas pressure balance such as the PG7601 (Fluke, USA), the sensor should be detached from the platform, which is a laborious and time-consuming task. It is clear that the best way to calibrate such a vacuum sensor installed in a gas pressure balance is to calibrate it directly in the current position without disassembly. For this purpose, the RPG (Reverse-operated Piston Gauge) developed by KRISS is very useful. The RPG is based on a variable bell-jar pressure method and a unique weight loading mechanism. The RPG varies the pressure in a range of 1 Pa–3 kPa. In this paper, in situ calibration results of a built-in vacuum sensor from 1 to 10 Pa are described. To the best of the authors’ knowledge, this is the first trial in the world of pressure calibration to as low as 1 Pa using a pressure balance.
KeywordsBuilt-in Gas pressure balance RPG (Reverse-operated Piston Gauge)
This work was supported by the Korea Research Institute of Standards and Science under the project ‘Establishment of Giga Capacity Mechanical Measurement Standards for Mass and related Quantities,’ Grant 16011003.
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