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Quantification of the Evolution of Silicon Acoustic Properties in Si(1-x)Gex Binary Alloy

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Abstract

Si(1-x)Gex is an alloy whose properties strongly depend on the molar fraction, x, of Ge. It is our aim to quantify the effects of x on some elastic parameters such as surface acoustic wave, SAW, velocities (longitudinal, VL, transverse, VT, and Rayleigh, VR,) as well as acoustic impedances, Z. What is the evaluation of Silicon acoustic properties in Si(1-x)Gex binary alloy? From the numerical calculations of the elastic properties which have combined with the most powerful technique of the SAM scanning acoustic microscopy, we have succeeded in quantifying the evaluation of the acoustic properties of Silicon in the SiGe alloy. A general semi-empirical formula was determined for all SAW velocities of the form: \( {V}_{i\left( Si Ge\right)}={V}_{i(Si)}-2\left({V}_{i(Si)}+{V}_{i(Ge)}\right)x/5+3\left[{V}_{i(Ge)},{x}^2\right]/8 \) where the subscript i stands for longitudinal, transverse and Rayleigh modes. Moreover, a new relation for acoustic impedance, Z(x) of Si(1-x)Gex alloys was proposed in terms of known impedance values of Si and Ge, i.e., \( {Z}_{Si Ge}={Z}_{Ge}-\left[{Z}_{Ge}-{Z}_{Si}\right]{e}^{-9\ x/2} \). The importance of these relations lies in the possibility of deducing and predicting elastic properties of any given composition of SiGe alloys.

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Authors and Affiliations

  1. Laboratory of Semiconductors, Department of Physics, Faculty of Science, Badji Mokhtar University, BP 12, DZ-23000, Annaba, Algeria

    Ibtissem Touati, Abdellaziz Doghmane, Assia Khoualdia & Zahia Hadjoub

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  1. Ibtissem Touati
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  4. Zahia Hadjoub
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Touati, I., Doghmane, A., Khoualdia, A. et al. Quantification of the Evolution of Silicon Acoustic Properties in Si(1-x)Gex Binary Alloy. Silicon 14, 10873–10879 (2022). https://doi.org/10.1007/s12633-022-01821-5

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