Abstract
Photoluminescence (PL) imaging techniques and the minority carrier lifetime test system were employed to investigate the variation of the interstitial iron (Fei) concentration, the recombination activity of structural defects and the minority carrier lifetime of cast multicrystalline silicon (mc-Si) in response to the cooling rate after heating. The results showed that when the mc-Si wafers are heated to high-temperature (1000 °C) and then cooled to ambient temperature with different cooling rate, the Fei concentration, the number of recombination active dislocations and grain boundaries increased as the cooling rate rises while the minority carrier lifetime decreased. If cast mc-Si is heated followed by faster cooling at 30 °C/s, the Fei concentration increase by 223% and the electrical activity of grain boundaries, dislocations and intragrain increase significantly, that is to say, the whole wafer is heavily contaminated with metal impurities, and present extremely low minority carrier lifetime.
Similar content being viewed by others
References
Yi J, Kim SS, Lim DG (1997) Conduction processes in a-Si:H and poly-Si films. J Korean Phys Soc 30(SUPPL-PART1):S245–S250
Joshi DP (1986) Carrier recombination at grain boundaries in polycrystalline silicon under optical illumination. Solid State Electron 29(01):19–24
Arafunea K, Sasakia T, Wakabay F (2000) Iron contamination in silicon technology. Appl Phys A Mater Sci Process 70:489–534
International Technology Roadmap for Photovoltaic (ITRPV), Results 2020, Twelfth edition, March 2021:14. https://itrpv.vdma.org/en/
Buonassisi T, Andrei AI, Matthew AM et al (2005) Engineering metal-impurity nanodefects for low-cost solar cells. Nat Mater 4(9):676–679
Buonassisi T, Istratov A, Marcus M, et al. (2005) Synchrotron-based investigations into metallic impurity distribution and defect engineering in multicrystalline silicon via thermal treatments/Proc.31st IEEEPVSC, Lake Buena Vista, Florida, 1027–1030
Xi Z-q, Yang D-r, Chen J, Wang X-q, Wang L, Que D-l and H. J. Moeller (2003) Iron precipitation in crystalline silicon. Chin J Semicond 24(11):1166–1170
Zhou P-b, Zhou L (2013) Study on thermal degradation of minority carrier lifetime of cast multicrystalline silicon. Acta Energiae Solaris Sinica 34(05):734–740
Zhou P-b, Ke H, Zhou L (2012) Effect of heat treatment and cooling rate on minoritycarrier lifetime of Czochralski silicon. Trans Mater Heat Treat 33(08):23–27
Sopori BL, Jastrzebski L, Tan T (1996) In: Proceedings of the 25th Photovoltaic Specialists Conference, May 13–17, 1996, Washington, D.C. IEEE, New York, p 625
Ballif C, Peters S, Borchert C, Hässler C, Isenberg J, Schindler R, Warta W, Willeke G (2001) In: Proceedings of the 2001 European Photovoltaics Specialists Conference and Exhibition, Oct. 22–26, 2001, Munich, Germany, p 1818
Zoth G, Bergholz W (1990) A fast, preparation-free method to detect iron in silicon. J Appl Phys 67:6764–6771
WT-2000PV User Manual, Semiconductor Physics Laboratory, Co. Ltd. Prielle Kornélia u. 2. 1117 Budapest, Hungary, June 2008
Graff K (1995) Metal impurities in silicon-device fabrication. Springer, Berlin
PLI-1001A User Manual, Semiconductor Physics Laboratory, Co. Ltd. Prielle Kornélia u. 2. 1117 Budapest, Hungary, June 2016
Chen J, Yang D-r, Xi Z-q (2006) Electron back-scattered diffraction and electron-beam-induced current study of grain boundaries in multicrystalline silicon. Acta Energ Sol Sin 27(04):364–368
Rizk R, Portier X, Allais G et al (1994) Electrical and structural studies of copper and nickel precipitates in a Σ=25 silicon bicrysal. J Appl Phys 76:952–958
Yang D-r (2006) Solar cell materials. Chemistry Industry Press, Beijing, p 141
Lauera K, Möller C, Neckermanna K et al (2013) Impact of a p-type solar cell process on the electrical quality of Czochralski silicon, SiliconPV: march 25-27, 2013, Hamelin, Germany. Energy Procedia 38:589–596
Acknowledgements
This work is supported by the National Natural Science Foundation of China (Grant Nos. 51861023 and 52062035) and the Natural Science Foundation of Jiangxi Province (Grant No. 20181BAB206010) and the Science and Technology Research Project of Jiangxi Education Department (Grant No. 14110).
Availability of Data and Materials
All data generated or analysed during this study are included in this published article.
Funding
This study was funded by the National Natural Science Foundation of China (Grant Nos. 51861023 and 52062035) and the Natural Science Foundation of Jiangxi Province (Grant No. 20181BAB206010) and the Science and Technology Research Project of Jiangxi Education Department (Grant No. 14110).
Author information
Authors and Affiliations
Contributions
All the authors contributed to the manuscript. Panbing Zhou: Conceptualization, Methodology, Writing - Original Draft, Validation. Naigen Zhou: Writing - Reviewing and Editing, Formal analysis, Data curation. Shilong Liu: Investigation, Validation. Xiuqin Wei: Writing - Reviewing and Editing. Lang Zhou: Resources, Supervision, Project administration.
Corresponding authors
Ethics declarations
Ethics Approval
This manuscript has not been published or presented elsewhere in part or in entirety and is not under consideration by another journal. We have read and understood your journal’s policies, and we believe that neither the manuscript nor the study violates any of these. There is no plagiarism or copyright dispute in this manuscript.
Consent to Participate
All of our authors understand that my participation is entirely voluntary and that we can withdraw from the study at any time without giving an explanation and with no disbenefit. We understand who will have access to my data, how it will be stored, in what form it will be shared, and what will happen to it at the end of the study.
Consent for Publication
All of our authors confirm that the work described has not been published before, and it is not under consideration for publication elsewhere. We all agree to publish in the esteemed journal“Silicon”.
Disclosure of Potential Conflicts of Interest
All authors have no potential conflicts of interest to declare that are relevant to the content of this article.
Informed Consent
Not applicable.
Research Involving Human Participants and/or Animals
Not applicable.
Competing Interests
All authors certify that they have no affiliations with or involvement in any organization or entity with any financial interest or non-financial interest in the subject matter or materials discussed in this manuscript.
Additional information
Publisher’s Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
Zhou, P., Liu, S., Zhou, N. et al. Effect of Cooling Rate during Thermal Processes on the Electrical Properties of Cast Multi-Crystalline Silicon. Silicon 14, 7793–7798 (2022). https://doi.org/10.1007/s12633-021-01499-1
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s12633-021-01499-1