Skip to main content
Log in

Effect of Cooling Rate during Thermal Processes on the Electrical Properties of Cast Multi-Crystalline Silicon

  • Original Paper
  • Published:
Silicon Aims and scope Submit manuscript

Abstract

Photoluminescence (PL) imaging techniques and the minority carrier lifetime test system were employed to investigate the variation of the interstitial iron (Fei) concentration, the recombination activity of structural defects and the minority carrier lifetime of cast multicrystalline silicon (mc-Si) in response to the cooling rate after heating. The results showed that when the mc-Si wafers are heated to high-temperature (1000 °C) and then cooled to ambient temperature with different cooling rate, the Fei concentration, the number of recombination active dislocations and grain boundaries increased as the cooling rate rises while the minority carrier lifetime decreased. If cast mc-Si is heated followed by faster cooling at 30 °C/s, the Fei concentration increase by 223% and the electrical activity of grain boundaries, dislocations and intragrain increase significantly, that is to say, the whole wafer is heavily contaminated with metal impurities, and present extremely low minority carrier lifetime.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. Yi J, Kim SS, Lim DG (1997) Conduction processes in a-Si:H and poly-Si films. J Korean Phys Soc 30(SUPPL-PART1):S245–S250

    Google Scholar 

  2. Joshi DP (1986) Carrier recombination at grain boundaries in polycrystalline silicon under optical illumination. Solid State Electron 29(01):19–24

    Article  CAS  Google Scholar 

  3. Arafunea K, Sasakia T, Wakabay F (2000) Iron contamination in silicon technology. Appl Phys A Mater Sci Process 70:489–534

    Article  Google Scholar 

  4. International Technology Roadmap for Photovoltaic (ITRPV), Results 2020, Twelfth edition, March 2021:14. https://itrpv.vdma.org/en/

  5. Buonassisi T, Andrei AI, Matthew AM et al (2005) Engineering metal-impurity nanodefects for low-cost solar cells. Nat Mater 4(9):676–679

    Article  CAS  Google Scholar 

  6. Buonassisi T, Istratov A, Marcus M, et al. (2005) Synchrotron-based investigations into metallic impurity distribution and defect engineering in multicrystalline silicon via thermal treatments/Proc.31st IEEEPVSC, Lake Buena Vista, Florida, 1027–1030

  7. Xi Z-q, Yang D-r, Chen J, Wang X-q, Wang L, Que D-l and H. J. Moeller (2003) Iron precipitation in crystalline silicon. Chin J Semicond 24(11):1166–1170

  8. Zhou P-b, Zhou L (2013) Study on thermal degradation of minority carrier lifetime of cast multicrystalline silicon. Acta Energiae Solaris Sinica 34(05):734–740

    CAS  Google Scholar 

  9. Zhou P-b, Ke H, Zhou L (2012) Effect of heat treatment and cooling rate on minoritycarrier lifetime of Czochralski silicon. Trans Mater Heat Treat 33(08):23–27

    Google Scholar 

  10. Sopori BL, Jastrzebski L, Tan T (1996) In: Proceedings of the 25th Photovoltaic Specialists Conference, May 13–17, 1996, Washington, D.C. IEEE, New York, p 625

  11. Ballif C, Peters S, Borchert C, Hässler C, Isenberg J, Schindler R, Warta W, Willeke G (2001) In: Proceedings of the 2001 European Photovoltaics Specialists Conference and Exhibition, Oct. 22–26, 2001, Munich, Germany, p 1818

  12. Zoth G, Bergholz W (1990) A fast, preparation-free method to detect iron in silicon. J Appl Phys 67:6764–6771

    Article  CAS  Google Scholar 

  13. WT-2000PV User Manual, Semiconductor Physics Laboratory, Co. Ltd. Prielle Kornélia u. 2. 1117 Budapest, Hungary, June 2008

  14. Graff K (1995) Metal impurities in silicon-device fabrication. Springer, Berlin

    Book  Google Scholar 

  15. PLI-1001A User Manual, Semiconductor Physics Laboratory, Co. Ltd. Prielle Kornélia u. 2. 1117 Budapest, Hungary, June 2016

  16. Chen J, Yang D-r, Xi Z-q (2006) Electron back-scattered diffraction and electron-beam-induced current study of grain boundaries in multicrystalline silicon. Acta Energ Sol Sin 27(04):364–368

    CAS  Google Scholar 

  17. Rizk R, Portier X, Allais G et al (1994) Electrical and structural studies of copper and nickel precipitates in a Σ=25 silicon bicrysal. J Appl Phys 76:952–958

    Article  CAS  Google Scholar 

  18. Yang D-r (2006) Solar cell materials. Chemistry Industry Press, Beijing, p 141

    Google Scholar 

  19. Lauera K, Möller C, Neckermanna K et al (2013) Impact of a p-type solar cell process on the electrical quality of Czochralski silicon, SiliconPV: march 25-27, 2013, Hamelin, Germany. Energy Procedia 38:589–596

    Article  Google Scholar 

Download references

Acknowledgements

This work is supported by the National Natural Science Foundation of China (Grant Nos. 51861023 and 52062035) and the Natural Science Foundation of Jiangxi Province (Grant No. 20181BAB206010) and the Science and Technology Research Project of Jiangxi Education Department (Grant No. 14110).

Availability of Data and Materials

All data generated or analysed during this study are included in this published article.

Funding

This study was funded by the National Natural Science Foundation of China (Grant Nos. 51861023 and 52062035) and the Natural Science Foundation of Jiangxi Province (Grant No. 20181BAB206010) and the Science and Technology Research Project of Jiangxi Education Department (Grant No. 14110).

Author information

Authors and Affiliations

Authors

Contributions

All the authors contributed to the manuscript. Panbing Zhou: Conceptualization, Methodology, Writing - Original Draft, Validation. Naigen Zhou: Writing - Reviewing and Editing, Formal analysis, Data curation. Shilong Liu: Investigation, Validation. Xiuqin Wei: Writing - Reviewing and Editing. Lang Zhou: Resources, Supervision, Project administration.

Corresponding authors

Correspondence to Panbing Zhou or Naigen Zhou.

Ethics declarations

Ethics Approval

This manuscript has not been published or presented elsewhere in part or in entirety and is not under consideration by another journal. We have read and understood your journal’s policies, and we believe that neither the manuscript nor the study violates any of these. There is no plagiarism or copyright dispute in this manuscript.

Consent to Participate

All of our authors understand that my participation is entirely voluntary and that we can withdraw from the study at any time without giving an explanation and with no disbenefit. We understand who will have access to my data, how it will be stored, in what form it will be shared, and what will happen to it at the end of the study.

Consent for Publication

All of our authors confirm that the work described has not been published before, and it is not under consideration for publication elsewhere. We all agree to publish in the esteemed journal“Silicon”.

Disclosure of Potential Conflicts of Interest

All authors have no potential conflicts of interest to declare that are relevant to the content of this article.

Informed Consent

Not applicable.

Research Involving Human Participants and/or Animals

Not applicable.

Competing Interests

All authors certify that they have no affiliations with or involvement in any organization or entity with any financial interest or non-financial interest in the subject matter or materials discussed in this manuscript.

Additional information

Publisher’s Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Zhou, P., Liu, S., Zhou, N. et al. Effect of Cooling Rate during Thermal Processes on the Electrical Properties of Cast Multi-Crystalline Silicon. Silicon 14, 7793–7798 (2022). https://doi.org/10.1007/s12633-021-01499-1

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s12633-021-01499-1

Keywords

Navigation