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Fabrication of Fixed-Fixed Beam Type Piezoelectric Vibration Energy Harvester

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Abstract

Piezoelectric type vibration energy harvesters are prominently used due to their simple operation and compatibility with MEMS fabrication technology. Cantilever structures fixed from one end and free from the other are widely used to realize a Piezoelectric vibration energy harvester. In this paper, a fixed -fixed or guided beam type Piezoelectric Vibration Energy Harvester has been fabricated and tested for low-frequency operation. Device design and fabrication have been done ensuring low-frequency operation, stable and reliable device operation and higher potential generation. The device exhibits a sensitivity of 1.3925 mV/m/s2 which can be combined in series or parallel to power a wireless sensor node.

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Acknowledgements

This work was supported by the Council of Scientific and Industrial Research, India, under Grant 21(1011)/16/ EMR-II.

Funding

This work was supported by the Council of Scientific and Industrial Research, India, under Grant 21(1011)/16/ EMR-II.

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Authors and Affiliations

  1. School of Electronics and Electrical Engineering, Lovely Professional University, Punjab, 144411, India

    Shanky Saxena

  2. Department of Electronics and Communication Engineering, Malaviya National Institute of Technology, Jaipur, 302017, India

    Ritu Sharma

  3. Smart Sensors Area, Central Electronics Engineering Research Institute, Pilani, 303331, India

    B. D. Pant

Authors
  1. Shanky Saxena
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  2. Ritu Sharma
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  3. B. D. Pant
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Contributions

Shanky Saxena: Investigation and Writing - original draft. Ritu Sharma: Writing - review & editing. B.D. Pant: Conceptualization and Validation.

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Correspondence to Shanky Saxena.

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This chapter does not contain any studies with human participants or animals performed by any of the authors.

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Saxena, S., Sharma, R. & Pant, B.D. Fabrication of Fixed-Fixed Beam Type Piezoelectric Vibration Energy Harvester. Silicon 14, 5975–5982 (2022). https://doi.org/10.1007/s12633-021-01360-5

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  • DOI: https://doi.org/10.1007/s12633-021-01360-5

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