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Design & Development of Laser Etched Porous-Silicon Capacitive Chip for Rapid Sensing of Pesticide Solvents

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Abstract

This work presents the development of a porous silicon-based capacitive sensor for the time-effective and low-cost detection and quantification of organic solvents. The prototype chip was fabricated using a mechanized pulse fiber laser etching process in order to develop a single-layer silicon substrate with uniform porous structures. This enables a consistent surface area for sample distribution inside the pores and provides highly repeatable results essential for silicon-based sensor chip development. The fabricated chip was characterized using a scanning electron microscope, and it shows an average pore diameter of 55.22 μm and pore depth of 98.9 μm. The proposed sensor exhibits stable results up to 35 days at room temperature, and this demonstrates its superior performance over other porous silicon-based optical sensor chips. The application of the proposed sensor chip has been shown for sensing and quantification of the Atrazine chemical, which is a pesticide solvent utilized in farming to control weeds. The sensitivity and the limit of detection were found to be 0.51 nF/ppm and 0.929 ppm, respectively.

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Acknowledgments

The authors thank the Technical Education Quality Improvement Program Phase-III (TEQIP-III), Sardar Vallabhbhai National Institute of Technology, Surat, for supporting this research work. They would also like to acknowledge the Sensor Research Laboratory, Sardar Vallabhai National Institute of Technology, Surat, for providing the research facility. This paper results from the R and D work attempted in the undertaking under the Visvesvaraya Ph.D. Scheme of Ministry of Electronics and Information Technology, Government of India, being executed by Digital India Corporation (once in the past Media Lab Asia). The authors are also thankful to Dr. Bhupendrasinh Solanki, the research scientist cotton, Dr. Preeti R. Parmar, Assistant Research Scientist cotton at Navsari Agricultural University Surat, and Dr. Nafisa Z. Patel Assistant Professor & Head of the Department Microbiology, Naran Lala College of Professional & Applied Sciences, Navsari, for their valuable guidance. The authors are thankful to the Central Instrumentation Facility (CIF) at IIT Gandhinagar for helping in the structural characterization of the samples. The authors also thank Shri. Sagar Jagtap, Sophisticated Instrumentation Centre, Mechanical Engineering Department at Sardar Vallabhbhai National Institute of Technology, Surat, for the structural characterization of the samples.

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  1. Electronics Engineering Department, Sardar Vallabhbhai National Institute of Technology, Surat, 395007, India

    Shailesh M. Gheewala, Chinthakunta Parmesh, Piyush N. Patel & Rasika Dhavse

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  1. Shailesh M. Gheewala
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  2. Chinthakunta Parmesh
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  3. Piyush N. Patel
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  4. Rasika Dhavse
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Correspondence to Shailesh M. Gheewala.

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Gheewala, S.M., Parmesh, C., Patel, P.N. et al. Design & Development of Laser Etched Porous-Silicon Capacitive Chip for Rapid Sensing of Pesticide Solvents. Silicon 14, 6019–6029 (2022). https://doi.org/10.1007/s12633-021-01346-3

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