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Preparation and characterization of barium strontium titanate/silicon nanoporous pillar array composite thin films by a sol-gel method

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Abstract

Barium strontium titanate (Ba0.5Sr0.5TiO3, BST)/silicon nanoporous pillar array (Si-NPA) thin films were prepared by a spin-coating/annealing technique based on Si-NPA with micro/nano-structure. Both the isomer conversion of acetylacetone and the network structure combined by enol and Ti-alkoxide facilitate the formation of the BST sol and the subsequent crystallization. Before the perovskite BST begins to form, the intermediate phase (Ba,Sr)Ti2O5CO3 is found. The boundary between BST and Si-NPA is of clarity and little interface diffusion, disclosing that Si-NPA is an ideal template substrate in the preparation of multifunctional composite films.

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References

  1. S.Y. Hou, J. Kwo, R.K. Watts, J.Y. Cheng, and D.K. Fork, Structure and properties of epitaxial Ba0.5Sr0.5TiO3/SrRuO3/ ZrO2 heterostructure on Si grown by off-axis sputtering, Appl. Phys. Lett., 67(1995), p.1387.

    Article  CAS  Google Scholar 

  2. D. Ivanov, M. Caron, L. Ouellet, S. Blain, N. Hendric, and J. Currie, Structural and dielectric properties of spin-on barium-strontium titanate thin films, J. Appl. Phys., 77(1995), p.2666.

    Article  CAS  Google Scholar 

  3. A. Kumar S.G. Manavalan, Characterization of barium strontium titanate thin films for tunable microwave and DRAM applications, Surf. Coat. Technol., 198(2005), p.406.

    Article  CAS  Google Scholar 

  4. C.S. Hwang, S.O. Park, H.J. Cho, C.S. Kang, H.K. Kang, S.I. Lee, and M.Y. Lee, Deposition of extremely thin (Ba,Sr)TiO3 thin films for ultra-large-scale integrated dynamic random access memory application, Appl. Phys. Lett., 67(1995), p.2819.

    Article  CAS  Google Scholar 

  5. K. Hashimoto, H. Xu, T. Mukaigawa, R. Kubo, H. Zhu, M. Noda, and M. Okuyama, Si monolithic microbolometers of ferroelectric BST thin film combined with readout FET for uncooled infrared image sensor, Sens. Actuators A, 88(2001), p.10.

    Article  Google Scholar 

  6. A. Seema and G.L. Sharma, Humidity sensing properties of (Ba,Sr)TiO3 thin film grown by hydrothermal-electrochemical method, Sens. Actuators B, 85(2002), p.205.

    Article  Google Scholar 

  7. W. Zhu, O.K. Tan, Q. Yan, and J.T. Oh, Microstructure and hydrogen gas sensitivity of amorphous (Ba,Sr)TiO3 thin film sensors, Sens. Actuators B, 65(2000), p.366.

    Article  Google Scholar 

  8. K.B. Chong, L.B. Kong, L.F. Chen, L. Yan, C.Y. Tan, T. Yang, C.K. Ong, and T. Osipowicz, Improvement of dielectric loss tangent of Al2O3 doped Ba0.5Sr0.5TiO3 thin films for tunable microwave devices, J. Appl. Phys., 95(2004), p.1416.

    Article  CAS  Google Scholar 

  9. M.W. Cole, C. Hubbard, E. Ngo, M. Ervin, M. Wood, and R.G. Geyer, Structure-property relationships in pure and acceptor-doped Ba1−x SrxTiO3 thin films for tunable microwave device applications, J. Appl. Phys., 92(2002), p.475.

    Article  CAS  Google Scholar 

  10. S.H. Kim, C.E. Kim, and Y.J. Oh, Influence of A12O3 diffusion barrier and PbTiO3 seed layer on costructural and ferroelectric characteristics of PZT thin films by sol-gel spin coating method, Thin Solid Films, 305(1997), p.32.

    Google Scholar 

  11. U. Gösele and V. Lehmann, Light-emitting porous silicon, Mater. Chem. Phys., 40(1995), p.253.

    Article  Google Scholar 

  12. W.L. Liu, S. Xing, J. Lian, L. Wang, Z.T. Song, C.L. Lin, Z.K. Xu, and P.K. Chu, Microstructure investigation of BaxSr1−x TiO3 thin film grown on porous silicon substrate, Mater. Sci. Semicond. Process., 7(2004), p.253.

    Article  Google Scholar 

  13. T. Yonehara, K. Sakaguchi, and N. Sato, Epitaxial layer transfer by bond and etch back of porous Si, Appl. Phys. Lett., 64(1994), p.2108.

    Article  CAS  Google Scholar 

  14. V.I. Levchenko, L.I. Postnova, V.P. Bondarenko, N.N. Vorozov, V.A. Yakovtseva, and L.N. Dolgyi, Heteroepitaxy of PbS on porous silicon, Thin Solid Films, 348(1999), p.141.

    Article  CAS  Google Scholar 

  15. V.G. Kesler, L.M. Logvinskii, V.I. Mashanov, O.P. Pchelyakov, and V.V. Ulyanov, Study of the component distribution in Si/GexSi1−x /Si heterostructures grown by molecular beam epitaxy, Phys. Solid State, 44(2002), p.709.

    Article  CAS  Google Scholar 

  16. S. Saravanan, Y. Hayashi, T. Soga, T. Jimbo, M. Umeno, N. Sato, and T. Yonehara, Growth of GaAs epitaxial layers on Si substrate with porous Si intermediate layer by chemical beam epitaxy, J. Cryst. Growth, 237–239(2002), p.1450.

    Article  Google Scholar 

  17. H.J. Xu, X.N. Fu, X.R. Sun, and X.J. Li, Investigations on the structural and optical properties of silicon nanoporous pillar array, Acta Phys. Sin., 54(2005), p.2352.

    CAS  Google Scholar 

  18. H.Y. Wang and X.J. Li, Capacitive humidity-sensing properties of Si-NPA and Fe3O4/Si-NPA, Acta Phys. Sin., 54(2005), p.2220.

    CAS  Google Scholar 

  19. X.Y. Chen, Y.F. Lu, L.J. Tang, Y.H. Wu, B.J. Cho, X.J. Xu, J.R. Dong, and W.D. Song, Annealing and oxidation of silicon oxide films prepared by plasma-enhanced chemical vapor deposition, J. Appl. Lett., 97(2005), art. no.014913.

    Google Scholar 

  20. N.E. Korsunskaya, T.V. Torchinskaya, L.Y. Khomenkova, B.R. Dzhumaev, and S.M. Prokes, Suboxide-related centre as the source of the intense red luminescence of porous Si, Microelectron. Eng., 51–52(2000), p.485.

    Article  Google Scholar 

  21. D.F. Mitchell, K.B. Clark, J.A. Bardwell, W.N. Leonard, G.R. Massoumi, and I.V. Mitchell, Film thickness measurements of SiO2 by XPS surface and interface analysis, Surf. Interface Anal., 21(1994), p.44.

    Article  CAS  Google Scholar 

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Correspondence to Shun-hua Xiao.

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This study was financially supported by the Research Funds of Guangxi Key Laboratory of Information Materials, China (No.0710908-04-K), Guangxi Natural Science Fund, China (No.0832257), and the Research Funds of Education Bureau of Guangxi Province, China (No.200708LX333).

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Xiao, Sh., Jiang, Wf. Preparation and characterization of barium strontium titanate/silicon nanoporous pillar array composite thin films by a sol-gel method. Int J Miner Metall Mater 19, 762–767 (2012). https://doi.org/10.1007/s12613-012-0625-z

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  • DOI: https://doi.org/10.1007/s12613-012-0625-z

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