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Analytical modeling, fabrication and characterization of a 3-DOF MEMS gyroscope based on UV-LIGA process

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Abstract

This paper reports a structural configuration of a capacitive gyroscope having 1-DOF drive and anchored 2-DOF sense modes that allows a wide sense bandwidth and high gain without much scaling down the mass on which the sensing comb fingers are attached. The use of the additional anchoring beam in the sense direction also causes the enhancement in the coupling strength of sense mode resonance frequencies. This device has been mathematically modeled considering decoupled frame anchoring effect, designed and then fabricated by using the economical UV-LIGA technology with nickel as a key structural layer of 9-μm thickness with unequally spaced sense comb fingers with 4 µm and 12 µm capacitive gap, respectively. The overall miniature device size is 3 mm × 3 mm. Vibration characterization of the fabricated devices shows sense mode resonances at 4.96 kHz and 5.58 kHz and drive resonance at 5.48 kHz.

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References

  1. N. Yazdi, F. Ayazi, K. Najafi, Micromachined inertial sensors, in Proceedings of the IEEE 86 (1998) pp. 1640–1659

  2. J. Soderkvist, Micromachined gyroscopes. Sens. Actuators A 43, 65–71 (1994)

    Article  Google Scholar 

  3. S.E Alper, MEMS gyroscopes for tactical-grade inertial measurement applications. Ph.D. dissertation Middle East Technical University Turkey. (2005)

  4. K. Liu, W. Zhang, W. Chen, K. Li, F. Dai, F. Cui, X. Wu, G. Ma, Q. Xiao, The development of micro-gyroscope technology. J. Micromech. Microeng. 19, 113001 (2009)

    Article  ADS  Google Scholar 

  5. K.J. Walchko, P.A.C. Mason, Inertial Navigation, in Conference on Recent Advances in Robotics, Florida, (2002) pp. 1–9

  6. J. Borenstein, H.R. Everett, L. Feng, D. Wehe, Mobile robot positioning & sensors and techniques. J.Rob. Syst. 14, 231–249 (1997)

    Article  Google Scholar 

  7. H.H.S. Liu, G.K.H. Pang, Accelerometer for mobile robot positioning. IEEE Trans. Ind. App. 37, 812–819 (2001)

    Article  Google Scholar 

  8. J. Huddleston, A. Alaiti, D. Scarborough, A. Freiberg, H. Rubash, H. Malchau, W. Harris, D. Krebs, Ambulatory measurement of knee motion and physical activity: preliminary evaluation of a smart activity monitor. J. Neu. Eng. Rehabilit. 3, 1–10 (2006)

    Google Scholar 

  9. H.J. Luingea, P.H. Veltinkb, C.T.M. Baten, Ambulatory measurement of arm orientation. J. Biomech. 40, 78–85 (2007)

    Article  Google Scholar 

  10. A.K. Bourke, J.V.O. Brien, G.M. Lyons, Evaluation of a threshold-based tri-axial accelerometer fall detection algorithm. Gait Posture 26, 194–199 (2007)

    Article  Google Scholar 

  11. Y. Tao, H. Hu, A novel sensing and data fusion system for 3-D arm motion tracking in telerehabilitation. IEEE Trans. Instrum. Meas. 57, 1029–1040 (2008)

    Article  ADS  Google Scholar 

  12. M.J. Mathie, B.G. Celler, N.H. Lovell, A.C.F. Coster, Classification of basic daily movements using a triaxial accelerometer. Med. Bio. Eng. Comput. 42, 679–687 (2004)

    Article  Google Scholar 

  13. R. Antonello, R. Oboe, MEMS gyroscopes for consumers and industrial applications, in Microsensors. ed. by O. Minin (Intech, London, 2011), pp.253–275

    Google Scholar 

  14. P. Xu, Z. Wei, Z. Guo, L. Jia, G. Han, C. Si, J. Ning, F. Yang, A real-time circuit phase delay correction system for MEMS vibratory gyroscopes. Micromachines 12(5), 506 (2021)

    Article  Google Scholar 

  15. S.A.R. Bukhari, M.M. Saleem, U.S. Khan, A. Hamza, J. Iqbal, R.I. Shakoor, Microfabrication process-driven design, FEM analysis and system modeling of 3-DoF drive mode and 2-DoF sense mode thermally stable non-resonant MEMS gyroscope. Micromachines 11(9), 862 (2020)

    Article  Google Scholar 

  16. A. Esmaeili, M.A. Kupaei, H. Faghihian, H.R. Mirdamadi, An adaptable broadband MEMS vibratory gyroscope by simultaneous optimization of robustness and sensitivity parameters. Sens. Actuators A Phys. 206, 132–137 (2014)

    Article  Google Scholar 

  17. A.R. Schofield, A.A. Trusov, A.M. Shkel, Micromachined gyroscope concept allowing interchangeable operation in both robust and precision modes. Sens. Actuators A Phy. 165, 35–42 (2011)

    Article  Google Scholar 

  18. R.K. Kupka, F. Bouamrane, C. Cremers, S. Megtert, Microfabrication: LIGA-X and applications. Appl. Surf. Sci. 164, 97–110 (2000)

    Article  ADS  Google Scholar 

  19. C. Acar, A.M. Shkel, Four degrees-of-freedom micromachined gyroscopes. J. Model. Simul. Microsyst. 2, 71–82 (2001)

    Google Scholar 

  20. C. Acar, Robust micromachined vibratory gyroscopes, Ph.D. dissertation University of California Irvin.(2004)

  21. P. Verma, C. Shekhar, S.K. Arya, R. Gopal, New design architecture of a 3-DOF vibratory gyroscope with robust drive operation mode and implementation. Microsyst. Technol. 21(8), 1275–1285 (2015)

    Google Scholar 

  22. P. Verma, K.Z. Khan, S.N. Khonina, N.L. Kazanskiy, R. Gopal, Ultraviolet-LIGA-based fabrication and characterization of a nonresonant drive-mode vibratory gyro/accelerometer. J. Micro/Nanolithogr. MEMS MOEMS 15(3), 035001 (2016)

    Article  ADS  Google Scholar 

  23. P. Verma, S.K. Arya, R. Gopal, Lumped parameter analytic modeling and behavioral simulation of a 3-DOF MEMS gyro-accelerometer. Acta Mech. Sinica 31(6), 910–919 (2015)

    Article  ADS  MathSciNet  Google Scholar 

  24. P. Verma, R. Gopal, S. K. Arya, Dynamic characteristics of vibratory gyro-accelerometer, in Proceeding of the IEEE, 5th International Conference on Computers and Devices for Communication, University of Calcutta, India, (2012) https://doi.org/10.1109/CODEC.2012.6509277.

  25. P. Verma, P. Agrawal, R. Gopal, S.K. Arya, Parametric sensitivity analysis of a 2-DOF drive and 1-DOF sense modes MEMS gyro-accelerometer structure. Adv. Sci. Lett. 20, 1495–1498 (2014)

    Article  Google Scholar 

  26. P. Verma, S. Juneja, D.A. Savelyev, S.N. Khonina, R. Gopal, Design and fabrication of a 1-DOF drive mode and 2-DOF sense mode micro-gyroscope using SU-8 based UV-LIGA process, in Proceedings of the AIP 1724, (2016) https://doi.org/10.1063/1.4945137

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Acknowledgements

The authors wish to thank all members of MEMS and Micro-sensors Group at CSIR-CEERI, Pilani, India. The authors are also thankful to Dr. Prabhash Mishra for his support in SEM measurements at Jamia Millia Islamia University, New Delhi, India.

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This study was not funded by grant.

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Authors and Affiliations

  1. Department of Electronics and Communication Engineering, School of Engineering, Dayananda Sagar University, Bangalore, 560114, India

    H. L. Prakruthi & K. Saara

  2. Department of Electronics and Communication Engineering, Malnad College of Engineering, Hassan, 573202, India

    H. L. Prakruthi

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  1. H. L. Prakruthi
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  2. K. Saara
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Correspondence to K. Saara.

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Prakruthi, H.L., Saara, K. Analytical modeling, fabrication and characterization of a 3-DOF MEMS gyroscope based on UV-LIGA process. J Opt 53, 1068–1078 (2024). https://doi.org/10.1007/s12596-023-01258-y

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