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Study on tool mark-induced performance degradation in optical system: simulation and application of field tracing

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Abstract

Ultra-precision machining is a class of feasible and efficient technology to generate high-precision optical surfaces. However, the machining tool mark is a significant fact that leads to unwanted diffraction, which will seriously affect the optical performance. In this paper, the relationship between optical performance and tool marks is systematically studied. The results show that the effect of tool marks depends on the ratio of tool feed f and tool nose radius R. Moreover, the effect of tool marks is more severe in the optical system with two mirrors because of superposition. It is proposed that a decreasing ratio of f to R and changing the angle of tool marks between two optical elements can assist to improve the optical performance of the system. Hence, this study provides theoretical guidance to reduce the impact of tool marks and improve the optical performance of the system.

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Acknowledgements

This research was funded by the National Key Research and Development Program of China (2017YFA0701200), Tianjin Science and Technology Program (19JCZDJC39100) and National Postdoctoral Program for Innovative Talents of China (BX20190230).

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Authors and Affiliations

  1. State Key Laboratory of Precision Measuring Technology and Instruments, Laboratory of MicroNano Manufacturing Technology, Tianjin University, Tianjin, 300072, China

    Ning Yan, Xianlei Liu, Zexiao Li, Fengzhou Fang & Xiaodong Zhang

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  1. Ning Yan
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  2. Xianlei Liu
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  3. Zexiao Li
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  4. Fengzhou Fang
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  5. Xiaodong Zhang
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Correspondence to Xiaodong Zhang.

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Yan, N., Liu, X., Li, Z. et al. Study on tool mark-induced performance degradation in optical system: simulation and application of field tracing. J Opt 52, 365–375 (2023). https://doi.org/10.1007/s12596-022-00914-z

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