Abstract
We demonstrated two-layer vertical welding of fused silica by femtosecond laser through galvo scanner. Promising approaches to a well-known technique of glasses welding by femtosecond laser were presented, which provided us efficient ways to draw welding route without programming through galvo scanner, gravitational effects on the welding direction by vertical welding and realized two-layer welding at very short intervals to refine microstructure and increase bonding strength in bonding zone. Under the same parameters condition, we found that the maximum joining strength as large as 80.26 MPa could be obtained in two-layer vertical welding through galvo scanner, which exceeded quadruple of one-layer horizontal welding focused by objective lens. Compared with one-layer welding, more uniform and fine microstructure can be obtained in bonding region by two-layer welding.
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References
T. Tamaki, W. Watanabe, J. Nishii, K. Itoh, Welding of transparent materials using femtosecond laser pulses. Jpn. J. Appl. Phys. 44(22), L687–L689 (2005)
W. Watanabe, S. Onda, T. Tamaki, K. Itoh, J. Nishii, Space-selective laser joining of dissimilar transparent materials using femtosecond laser pulses. Appl. Phys. Lett. 89(2), 1726 (2006)
W. Watanabe, S. Onda, T. Tamaki, K. Itoh, Direct joining of glass substrates by 1 kHz femtosecond laser pulses. Appl. Phys. B 87(1), 85–89 (2007)
S.M. Eaton, H. Zhang, M.L. Ng, J. Li, W.J. Chen, S. Ho, P.R. Herman, Transition from thermal diffusion to heat accumulation in high repetition rate femtosecond laser writing of buried optical waveguides. Opt. Express 16(13), 9443–9458 (2008)
C.B. Schaffer, J.F. García, E. Mazur, Bulk heating of transparent materials using a high-repetition-rate femtosecond laser. Appl. Phys. A 76(3), 351–354 (2003)
K. Itoh, T. Tamaki, Ultrafast laser microwelding for transparent and heterogeneous materials, in Proceedings of Spie, vol. 6881 (2008)
S. Richter, F. Zimmermann, S. Döring, A. Tünnermann, S. Nolte, Ultrashort high repetition rate exposure of dielectric materials: laser bonding of glasses analyzed by micro-Raman spectroscopy. Appl. Phys. A 110(1), 9–15 (2013)
I. Miyamoto, K. Cvecek, Y. Okamoto, M. Schmidt, Internal modification of glass by ultrashort laser pulse and its application to microwelding. Appl. Phys. A 114(1), 187–208 (2014)
K. Cvecek, R. Odato, S. Dehmel, I. Miyamoto, M. Schmidt, Gap bridging in joining of glass using ultra short laser pulses. Opt. Express 23(5), 5681–5693 (2015)
S. Richter, F. Zimmermann, A. Tünnermann, S. Nolte, Laser welding of glasses at high repetition rates—Fundamentals and prospects. Opt. Laser Technol. 83, 59–66 (2016)
H. Tan, J.A. Duan, One-step femtosecond laser welding and internal machining of three glass substrates. Appl. Phys. A 123(5), 377 (2017)
K. Itoh, W. Watanabe, S. Nolte, C.B. Schaffer, Ultrafast processes for bulk modification of transparent materials. MRS Bull. 31(8), 620–625 (2006)
Y. Kim, J. Choi, Y. Lee, T. Kim, D. Kim, W. Jang, K.S. Lim, I.B. Sohn, J. Lee, Femtosecond laser bonding of glasses and ion migration in the interface. Appl. Phys. A 101(1), 147–152 (2010)
S. Richter, S. Döring, A. Tünnermann, S. Nolte, Bonding of glass with femtosecond laser pulses at high repetition rates. Appl. Phys. A 103(2), 257–261 (2011)
C.B. Schaffer, A. Brodeur, E. Mazur, Laser-induced breakdown and damage in bulk transparent materials induced by tightly focused femtosecond laser pulses. Meas. Sci. Technol. 12(11), 1784–1794 (2001)
Y. Shimotsuma, K. Hirao, P.G. Kazansky, J. Qiu, Three-Dimensional micro- and nano-fabrication in transparent materials by femtosecond laser. Jpn. J. Appl. Phys. Part 44(7A), 4735–4748 (2005)
K. Sugioka, Y. Cheng, Femtosecond laser three-dimensional micro- and nanofabrication. J. Appl. Phys. 1(4), 041303 (2014)
T. Tamaki, W. Watanabe, and K. Itoh, Laser micro-welding of silicon and borosilicate glass using nonlinear absorption effect induced by 1558-nm femtosecond fiber laser pulses, in Proceedings of Spie, vol. 6460, pp. 646018–646018–646017 (2007)
H. Tan, J.A. Duan, Welding of glasses in optical and partial-optical contact via focal position adjustment of femtosecond-laser pulses at moderately high repetition rate. Appl. Phys. A 123(7), 481 (2017)
H. Tan, Y.X. Zhang, Y.X. Liu, X.Q. Fu, ANSYS workbench simulation of glass welding by femtosecond laser pulses. Infrared Phys. Tech. 98(2019), 334–340 (2019)
W. Watanabe, Y. Li, K. Itoh, Ultrafast laser micro-processing of transparent material. Opt. Laser Technol. 78, 52–61 (2016)
L. Rayleigh, Optical contact. Nature 139, 781–783 (1937)
I. Miyamoto, J. Strauss, K. Cvecek, M. Schmidt, M. Wolf, T. Frick, Sample preparation method for glass welding by ultrashort laser pulses yields higher seam strength. Appl. Opt. 50(13), 1941–1944 (2011)
I. Alexeev, Characterization of shear strength and bonding energy of laser pro-duced welding seams in glass. J. Laser Micro 7(3), 279–283 (2012)
Z. Tang, T. Shi, G. Liao, S. Liu, Modeling the formation of spontaneous wafer direct bonding under low temperature. Microelectron. Eng. 85(8), 1754–1757 (2008)
K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, Photowritten optical waveguides in various glasses with ultrashort pulse laser. Appl. Phys. Lett. 71(23), 3329–3331 (1998)
L. Sudrie, M. Franco, B. Prade, A. Mysyrowicz, Writing of permanent birefringent microlayers in bulk fused silica with femtosecond laser pulses. Opt. Commun. 171(4–6), 279–284 (1999)
Y. Shimotsuma, P.G. Kazansky, J. Qiu, K. Hirao, Self-organized nanogratings in glass irradiated by ultrashort light pulses. Phys. Rev. Lett. 91(24), 247405 (2003)
C. Hnatovsky, R.S. Taylor, P.P. Rajeev, E. Simova, V.R. Bhardwaj, D.M. Rayner, P.B. Corkum, Pulse duration dependence of femtosecond-laser-fabricated nanogratings in fused silica. Appl. Phys. Lett. 87(1), 1729 (2005)
S. Juodkazis, K. Nishimura, S. Tanaka, H. Misawa, E.G. Gamaly, B. Luther-Davies, L. Hallo, P. Nicolai, V.T. Tikhonchuk, Laser-induced microexplosion confined in the bulk of a sapphire crystal: evidence of multimegabar pressures. Phys. Rev. Lett. 96(16), 166101 (2006)
K.M. Davis, K. Miura, N. Sugimoto, K. Hirao, Writing waveguides in glass with a femtosecond laser. Opt. Lett. 21(21), 1729–1731 (1996)
J.A. Armstrong, N. Bloembergen, J. Ducuing, P.S. Pershan, Interactions between light waves in a nonlinear dielectric. Phys. Rev. 127(6), 1918–1939 (1962)
W.T. Welford, The principles of nonlinear optics. J. Mod. Opt. 21(4), 400 (1985)
I. Fanderlík, Optical properties of glass. Opt. Laser Technol. 17(1), 50 (1983)
S.C. Huh, J.S. Lee, G.N. Kim, W.J. Park, J.S. Park, C.H. Park, A study on evaluation of residual stress by multilayer welding. Int. J. Mod. Phys. B 25(31), 1106678 (2011)
J. Pascal, A. Simar, and R. C. Van Der, Method for welding at least two layers, Free Patents Online (2015)
Acknowledgements
This research was supported by Research start-up funds of DGUT (The Mechanism and Intelligent Manufacturing of Glass Welding by Femtosecond Laser) (GC300501-098); Guangdong Provincial Key Platforms and Major Scientific Research Projects in Colleges and Universities featured innovation programs (The Research of Coupling Mechanism of Thermal-mechanical-magnetic and High-performance Manufacturing of Glass Miro-nano Welding by Femtosecond Laser Pulses) (2018KTSCX228); The Development of Society and Technology Project in Dongguan City (The Manufacturing of Micro-pore and Multicolor Eco-friendly Glass Welding by Femtosecond Laser) (2019507140179); China Scholarship Council (202008440014); The Project of Rural Technical Task Force of Guangdong Province in 2020 (KTP20200241); The Open-ended Project of a New-type Integration and Development of Cities and Towns Research Institute in Dongguan City (The Manufacturing of Ecological and Environmental Multilayer Glass and its Applied Research of in Greenhouse) (Grant No., Pending).
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Tan, H., Zhang, Y., Liu, Y. et al. Two-layer vertical welding of glasses by femtosecond laser through galvo scanner. J Opt 49, 408–415 (2020). https://doi.org/10.1007/s12596-020-00635-1
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DOI: https://doi.org/10.1007/s12596-020-00635-1