Skip to main content
SpringerLink
Log in

Comparative study of a standard optical steel plate surface using ellipsometry and speckle interferometry

  • Research Article
  • Published:
Journal of Optics Aims and scope Submit manuscript

Abstract

Defected areas purposely made in a standard steel plate of the type used in optical length metrology are investigated by ellipsometric and interferometric methods. The defects range from nano-metric scratches developed by routine work usage to heavy scratches. The optical constants n and k (refractive index and extinction coefficients) of the steel platen measured at different defected areas were obtained by ellipsometry and results were used to deduce the surface roughness of the studied areas. Surface roughness measurement by speckle interferometry based on interference fringes intensities is used to evaluate the ellipsometric measurements of the same defected areas. Results of both measurements allowed us to correlate the optical constants to the roughness degree and revealed that surface defects could be evaluated by ellipsometry. A source of error in the thickness measurement of thin film arising from surface imperfection can then be quantitatively evaluated by ellipsometry. Methods of measurement, analysis, and uncertainties are presented in details.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9

Similar content being viewed by others

References

  1. F.L. McCrackin, E. Passaglia, R.R. Stromberg, H.L. Steinberg, Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometry. J. Res. Natl. Bureau Stand. A Phys. Chem. 67A, 363–377 (1963)

    Article  Google Scholar 

  2. R.M.A. Azzam, N.M. Bashara, Ellipsometry And Polarized Light (North Holland, Amsterdam, 1977)

    Google Scholar 

  3. N.N. Nagib, N.A. Mahmoud, L.Z. Ismail, M.A. Amer, K. Abd-El-Sabour, Effect of surface roughness on the optical constants of bulk polycrystalline gold samples. Optik 125, 1085–1087 (2014)

    Article  ADS  Google Scholar 

  4. S.N. Svitasheva, Random phase mask as model of rough surface. Part I theory. Thin Solid Films 519, 2718–2721 (2011). https://doi.org/10.1016/j.tsf.2010.11.070

    Article  ADS  Google Scholar 

  5. M. Losurdo, A.S. Brown, G. Bruno, Graphene and Plasmonics: The Nanoscale Challenges for Real-time Spectroscopic Ellipsometry. E-MRS Fall Meeting, K-X-1: www.european-mrs.com (2012)

  6. N. Farid, H. Hussein, M. Bahrawi, Employing of diode lasers in speckle photography and application of FFT in measurements. MAPAN 30, 125–129 (2015)

    Article  Google Scholar 

  7. M. Nicklawy, A. Fahim, M. Bahrawi, N. Farid, Characterizing surface roughness by speckle pattern analysis. J. Sci. Ind. Res. 68, 118–121 (2009)

    Google Scholar 

  8. I. Ohlidal, F. Luke, K. Navratil, The problem of surface roughness in ellipsometry and reflectometry. J. de Phys. Colloq. 38, 77–88 (1977)

    Article  Google Scholar 

  9. J.R. Blanco, P.J. McMarr, K. Vedam, Roughness measurements by spectroscopic ellipsometry. Appl. Opt. 24(22), 3773–3779 (1985)

    Article  ADS  Google Scholar 

  10. S. Lovan, I. Boca, A. Lovan, A computer program for ellipsometric rough surface measurements. Trans. Built Environ., Vol. 12, WIT Press, www.witpress.com, ISSN 1743-3509, pp. 89–94 (1995)

  11. F.S. Cohen, Z. Fan, Rotation and scale invariant texture classification. Proc. IEEE Int. Conf. Robot. Autom. 22(22), 1394–1399 (1988)

    Google Scholar 

  12. B. Ramamoorthy, V. Radhakrishnan, Statistical approaches to surface texture classification. Wear 167, 155–161 (1993)

    Article  Google Scholar 

  13. F. Luk, V. Huynh, W. North, Measurement of surface roughness by machine vision. J. Phys. E Sci. Instrum 22, 977–980 (1989)

    Article  ADS  Google Scholar 

  14. M.B. Kiran, B. Ramamoorthy, V. Radhakrishnan, Evaluation of surface roughness by vision system. Int. J. Mach. Tools Manuf 38, 685–690 (1998)

    Article  Google Scholar 

  15. Ulf Persson, Measurement of surface roughness on rough machined surfaces using spectral speckle correlation and image analysis. Wear 160, 221–225 (1993)

    Article  ADS  Google Scholar 

  16. B. Dhanasekar, B. Ramamoorthy, Digital speckle interferometry for assessment of surface roughness. Opt. Lasers Eng. 46, 272–280 (2008)

    Article  Google Scholar 

  17. ISO: Guide to the expression of uncertainty in measurements, International standardizations organization publications (1995)

  18. S.V. Kumar, S. Gopa, Surface roughness characterization using interference fringe analysis. Int. J. Innov. Res. Sci. Eng. Technol. 2, 565–574 (2013)

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Length and Engineering Precision, National Institute for Standards, Tersa st., P.O.B 136, Giza, 12211, Egypt

    Niveen Farid, Naglaa Mahmoud & Nabil Nagib

Authors
  1. Niveen Farid
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Naglaa Mahmoud
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Nabil Nagib
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Niveen Farid.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Farid, N., Mahmoud, N. & Nagib, N. Comparative study of a standard optical steel plate surface using ellipsometry and speckle interferometry. J Opt 47, 366–373 (2018). https://doi.org/10.1007/s12596-018-0455-0

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s12596-018-0455-0

Keywords

Search

Navigation