Complex optical interference filters with stress compensation for space applications
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We present hereafter a study of complex bandpass optical interference filters with central wavelengths ranging in blue region or in the near infrared. For these applications, the required functions are particularly complex as they must present a very narrow bandwidth as well as a high level of rejection over a broad spectral range. Moreover, these components must have a good flatness meaning that the stress induced by the different layers has to be taken in account in the filter design. We present a thorough study of these filters including their design, fabrication using Plasma Assisted Reactive Magnetron Sputtering (PARMS) and characterization. Excellent agreement between experimental and theoretical spectral performances associated with a final sag of 326 and 13 nm, and uniformity from −0.05 to 0.10 and −0.10 to 0.20% are demonstrated for the two manufactured filters.
KeywordsOptical interference filters Thin films Narrow bandpass filters Fabrication technology
This work was performed within an ESA redevelopment contract with the financial support of the SODERN Company. The Perkin Elmer Lambda 1050, the ZYGO NewView 7300 and BUHLER Optics HELIOS machine were acquired within the framework of the Espace Photonique facility and funded by the financial support of the French Department of Industry, CNRS, the local administrations (Provence-Alpes Côte d’Azur Regional council, Bouche du Rhône council, town of Marseille), and the European Community. The authors acknowledges the CONCEPT team of the Institut Fresnel for the SALSA measurement of the 3MI-3 filter.
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