Fabrication of Hollow Polymer Microchannels Using the MIMIC Technique with Subsequent Heat Treatment

Abstract

The hollow polymer microchannels with different shapes and dimensions have been fabricated by the MIMIC method and the heating process for the first time. The smallest cross-sectional dimensions of hollow polymer microchannels were about 2.6 μm in the vertical direction and 3.5 μm in the horizontal direction. The length of hollow polymer microchannels increased parabolically with the heating temperature in the range of 30–135 °C. And the influence of the PDMS mold cross-sectional areas on the length of the microchannels was invetigated. Furthermore, the forming mechanism of hollow polymer microchannels was disscussed in detail. This technique provides a cheap, simple and controllable way for the preparation of microchannels.

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Acknowledgements

This work was supported by the National Natural Science Foundation of China (Nos. 61705096 and 61675093), A Project of Shandong Province Higher Educational Science and Technology Program (No. J17KA176), the China Postdoctoral Science Foundation funded project (No. 2018M631385), and the Startup Foundation for Doctors of Ludong University (No. LY2014005).

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Correspondence to Dengying Zhang.

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Li, W., Xing, W., Zhao, F. et al. Fabrication of Hollow Polymer Microchannels Using the MIMIC Technique with Subsequent Heat Treatment. Int. J. Precis. Eng. Manuf. 22, 1453–1460 (2021). https://doi.org/10.1007/s12541-021-00553-7

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Keywords

  • Hollow microchannels
  • The MIMIC method
  • Capillary action
  • Through holes
  • S1813 photoresist