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Non-resonant 3D Elliptical Vibration Cutting Induced Submicron Grating Coloring

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Abstract

Surface Submicron grating manufacturing has broad application prospects, which has also been the subject of intensive research and development by scholars with many efforts. In this paper, a grating coloring manufacturing method is proposed based on three-dimensional elliptical vibration cutting and non-resonant piezoelectric actuator. Based on the mechanism of elliptical motion, an effective cutting depth model was established. Nonlinear interaction of machining parameters (overlap rate, nominal cutting speed, vibration frequency) on the geometry of the grating were analyzed and controllable modulation model of grating geometry was established. The geometrical dimensions of the grating were predicted and grooved experiments were performed on brass and aluminum surfaces. A set of angle-adjustable detection device was designed independently to check the diffraction quality of the grating. The quantitative experimental results show that grating distances of copper and aluminum rods are 752 nm and 684 nm, respectively. The average width of the aluminum rod overall grating is 764 nm, the accuracy error is 9.25%. In addition, aluminum rod gratings can diffract red light at non-specific angles, which is more effective at viewing angle of 70°. The experimental results are in agreement with the theory which have positive significance for expanding the functional surface.

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Abbreviations

OR :

Critical overlap rate

v f :

Spindle velocity

τ :

Cross feed (Z axis)

V C :

Nominal cutting velocity

f :

Tool vibration frequency

ω :

Angular velocityof drive signal

φ 1, φ 2, φ 3 :

Phase of the drive signal in three axes

a,b :

Semi-major amplitude in x,y axis direction

θ :

Angle corresponding to the toolnose coordinate at time t

ϕ t :

Phase shift between the two axes at time t (time/s)

A 1 , A 2 , A 3 :

Vibration amplitude of signal in the X-axis and Y-axis

Y 1 , Y 2 , Z 1 :

Drive signals applied by the three PEA in the device

α , β :

Light incident angle and the angle of diffracted beams of order m

p :

Grating period

D :

Grating distance

R P :

Resolution of grating

λ :

The wavelength

H effect :

Effective depth of cut

PEA :

Piezoelectric actuator

m :

Integer indicating the diffractionorder

3D–EVC :

Three-dimensional elliptical vibration cutting

LIPSS :

Laser-induced periodic surface structure

X s , Y s , Z s :

Vibrationdisplacement of signal in the X-axis and Y-axis

ω 1 , ω 2 , ω Z :

Angular velocityof the drive signal in three axes

σλ :

Analytic minimum wavelength interval at wavelengtht λt

L 1 , L 2 :

Vertical distance from the driving point of PEA to the YOZ plane

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Funding

This project is supported by National Natural Science Foundation of China (Grant No. 51905046), Key Projects of Jilin Province Talent Development Fund, Micro-Nano and Ultra-Precision Key Laboratory of Jilin Province (20140622008JC), Science and Technology Development Projects of Jilin Province (20190201303JC).

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Correspondence to Mingming Lu.

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Chen, J., Lu, M., Lin, J. et al. Non-resonant 3D Elliptical Vibration Cutting Induced Submicron Grating Coloring. Int. J. Precis. Eng. Manuf. 22, 659–669 (2021). https://doi.org/10.1007/s12541-021-00470-9

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