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PSD Integrated Calibration Method Based on Annunciator in Vacuum Environment

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Abstract

In this paper, an integrated calibration method for position sensitive detector (PSD) of moving support mechanism in vacuum plasma environment is proposed. That is, the PSD is used to track the laser spot to restore the coordinate information of the signal. Firstly, a PSD integrated calibration principle is proposed to reduce the position error of the signaler by tracking laser points with PSD. Then on this basis, due to the spatial declination angle in the PSD imaging model, a spatial declination correction model was established to compensate the spatial declination error. Finally, there are errors occurred in the measurement because of the nonlinearity of PSD, and the improved backpropagation (BP) neural network calibration algorithm is adopted to further correct the errors through the Fletcher–Reeves linear search method to obtain the accurate coordinate information of the annunciator. MATLAB is used to verify the convergence of the calibration algorithm error. Simulation results show that 951 epochs need to be trained by using the traditional BP algorithm to make the position error converge to 0.001 mm. But when using the improved BP algorithm, only 44 epochs are needed.

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References

  1. Matsuya, I., et al. (2010). Measuring relative-story displacement and local inclination angle using multiple position-sensitive detectors. Sensors (Basel, Switzerland),10(11), 9687–9697.

    Google Scholar 

  2. Ernesto Martín, G., et al. (2011). Infrared sensor system for mobile-robot positioning in intelligent spaces. Sensors (Basel, Switzerland),11(5), 5416–5438.

    Google Scholar 

  3. Matsuya, I. (2010). Noncontact-type relative displacement monitoring system using position sensitive detector. AIJ Journal of Technology and Design,16(13), 496.

    Google Scholar 

  4. Blank, S., et al. (2011). High precision PSD guided robot localization: design, mapping, and position control. In IEEE/RSJ international conference on intelligent robots and systems (pp. 52–57).

  5. Nieves, E., et al. (2013). Development of a position sensitive device and control method for automated robot calibration. In IEEE international conference on automation science and engineering (pp. 1127–1132).

  6. Li, L., et al. (2014). Epsilon: A visible light based positioning system. In Usenix Org (pp. 331–343).

  7. Yang, C. H., & Wu, T. C. (2017). Vibration measurement method of a string in transversal motion by using a PSD. Sensors,17(7), 1643.

    Google Scholar 

  8. Kim, J. K., et al. (2000). Gap measurement by position-sensitive detectors. Applied Optics,39(16), 2584–2591.

    Google Scholar 

  9. Olyaee, S., & Rezazadeh, M. (2012). 3-D measurement by dual four-quadrant position-sensitive detectors in the stereo mode. International Journal of Engineering Research and Applications,2(3), 1157–1161.

    Google Scholar 

  10. Lee, J. G., Kim, D. M., & Suk, J. Y. (2010). Development of a 3D position determination device using PSD sensor. In International conference on control automation and systems (Vol. 10, No. 1063, pp. 1733–1736).

  11. Rodríguez-Navarro, D., et al. (2016). Mathematical model and calibration procedure of a PSD sensor used in local positioning systems. Sensors (Basel, Switzerland),16(9), 1484.

    Google Scholar 

  12. Su, C., et al. (2015). Modelling and control for simultaneous laser beam alignment of a dual-PSD industrial robot calibration system. In IEEE international conference on cyber technology in automation, control, and intelligent systems (Vol. 10, No. 1119, pp. 902–907).

  13. Wang, X., & Ye, M. (2002). Modeling and non-linear correction of two-dimension photoelectric position sensitive detector. Advanced Materials and Devices for Sensing and Imaging,10(1117), 452–461.

    Google Scholar 

  14. Zhou, Y. G., et al. (2009). Research of 3D spatial localizing system based on PSD sensor. In International conference on measuring technology and mechatronics automation (Vol. 10, No. 1109, pp. 414).

  15. Kumaki, H., et al. (2016). 3D indoor positioning and rapid data transfer using modulated illumination. In Proceedings of the international conference on indoor positioning and indoor navigation (IPIN), Alcalá de Henares, Spain (pp. 4–7).

  16. Rodríguez-Navarro, D., et al. (2016). Analysis and calibration of sources of electronic error in PSD sensor response. Sensors,16(5), 619.

    Google Scholar 

  17. Chen, C., & Mo, C. (2004). Study on correction of non-linearity to two-dimension position sensitive detector for laser alignment measurement. Chinese Journal of Mechanical Engineering,40(4), 127.

    Google Scholar 

  18. Wang, J., & Jeong, J. (2017). Wavelet-content-adaptive BP neural network-based deinterlacing algorithm. Soft Computing,10(1007), 1–7.

    Google Scholar 

  19. Liu, B. (2016). Global exponential convergence of non-autonomous cellular neural networks with multi-proportional delays. Neurocomputing,10(1016), 352–355.

    Google Scholar 

  20. Huang, F. G. (2007). Comparison of evaluating precision of straightness error between least square method and least envelope zone method. Optics & Precision Engineering,15(6), 889–893.

    Google Scholar 

  21. Luo, Y., Shen, Y., Cordero, J., & Zaklit, J. (2013). Enhancing measurement accuracy of position sensitive detector (PSD) systems using the Kalman filter and distortion rectifying. In Sensors, 2013 IEEE, Baltimore, MD (Vol. 10, No. 1109, pp. 1–4).

  22. Huang, Z. H., Fang, S., Zhang, Y. N., Cai, H. Y., & Zhang, Y. X. (2018). Calibration technology of space laser alignment system based on position sensor. Advances in Laser and Optoelectronics,55(11), 86–92.

    Google Scholar 

Download references

Acknowledgements

This work was supported in part by Science and Technology Development Project of Science and Technology Department of Jilin Province (20180101325JC), Science and Technology Research Project of Education Department of Jilin Province (JJKH20181139KJ, JJKH20190562KJ), Innovation Foundation of Changchun University of Science and Technology (XJJLG-2017-13) and the “111” Project of China (D17017). In addition, the authors thank Xiyu Zheng and Ziyu Xu for useful discussion and suggestions.

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Authors and Affiliations

  1. College of Mechanical and Electric Engineering, Changchun University of Science and Technology, No. 7089, Weixing Road, Changchun, 130022, Jilin Province, China

    Demin Wang, Junxia Jiang, Jinghua Wang, Lei Bie & Yu Zheng

  2. College of Electronics and Information Engineering, Changchun University of Science and Technology, No. 7089, Weixing Road, Changchun, 130022, Jilin Province, China

    Chen Wang

  3. Ministry of Education Key Laboratory for Cross-Scale Micro and Nano Manufacturing, Changchun University of Science and Technology, No. 7089, Weixing Road, Changchun, 130022, Jilin Province, China

    Jinghua Wang

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  1. Demin Wang
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  2. Junxia Jiang
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  3. Chen Wang
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  4. Jinghua Wang
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  5. Lei Bie
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  6. Yu Zheng
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Correspondence to Jinghua Wang.

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Wang, D., Jiang, J., Wang, C. et al. PSD Integrated Calibration Method Based on Annunciator in Vacuum Environment. Int. J. Precis. Eng. Manuf. 21, 1153–1161 (2020). https://doi.org/10.1007/s12541-020-00328-6

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  • DOI: https://doi.org/10.1007/s12541-020-00328-6

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