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Development of a Three-Dimensional Ultrasonic Elliptical Vibration Transducer (3D-UEVT) Based on Sandwiched Piezoelectric Actuator for Micro-grooving

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Abstract

A three-dimensional ultrasonic elliptical vibration transducer (3D-UEVT) based on a sandwiched piezoelectric actuator for micro-grooving was manufactured and assessed in this study. The 3D-UEVT generates an elliptical locus of a tool tip in three-dimensional space. The 3D-UEVT operates in resonance mode by coupling the first longitudinal-vibration mode and the two directions of the third bending-vibration mode. Modal simulation analysis was performed to determine the proper dimensions to ensure that the resonance frequencies between the longitudinal and two of the bending-vibration modes were similar. The swept-sine assessment indicated that the 3D-UEVT working resonance frequency was approximately 20.4 kHz. The 3D-UEVT generated an amplitude peak-to-peak of approximately 0.8 µm in two-bending directions and 0.3 to 0.5 µm in the longitudinal direction when the piezoelectric sandwiched actuator was driven at a peak-to-peak voltage of 150 V. The output amplitude of the 3D-UEVT increased as the driven input voltage increased. The performance of the proposed 3D-UEVT was assessed by a micro-grooving test. An adequate micro-grooving result confirmed that the proposed 3D-UEVT produced an acceptable micro-groove pattern.

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Acknowledgements

This research was supported by the Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science, ICT, and Future Planning [Grant Number NRF-2017R1A2B2003932], and was partially supported by the Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education [NRF-2017R1A4A1015581].

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Authors and Affiliations

  1. School of Mechanical Engineering, Yeungnam University, 214-1, Dae-dong, Gyeongsan-si, Gyeongsangbuk-do, 712-749, South Korea

    Rendi Kurniawan, Saood Ali, Ki Moon Park & Tae Jo Ko

  2. College of Mechanical and Electrical Engineering, Hunan University of Science and Technology, Taoyuan Road, Xiangtan, Hunan, China

    Chang Ping Li & Tae Jo Ko

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  1. Rendi Kurniawan
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  2. Saood Ali
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  3. Ki Moon Park
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  5. Tae Jo Ko
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Correspondence to Rendi Kurniawan or Tae Jo Ko.

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Kurniawan, R., Ali, S., Park, K.M. et al. Development of a Three-Dimensional Ultrasonic Elliptical Vibration Transducer (3D-UEVT) Based on Sandwiched Piezoelectric Actuator for Micro-grooving. Int. J. Precis. Eng. Manuf. 20, 1229–1240 (2019). https://doi.org/10.1007/s12541-019-00126-9

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  • DOI: https://doi.org/10.1007/s12541-019-00126-9

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