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Touch Probe Tip Compensation Using a Novel Transformation Algorithm for Coordinate Measurements of Curved Surfaces

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Abstract

A transformation algorithm compensating a radius of the probe tip and pre-travel errors is proposed to improve measurement uncertainty of a coordinate measuring machine (CMM). The transformation algorithm does not only compensate a radius of the probe tip, but it also compensates a slipping displacement from the predicted contact point caused by vertical tension for each data point. The performance of the transformation algorithm was successfully demonstrated by applying the transformation algorithm to raw data of an on-axis lens and an off-axis mirror measured with the CMM and comparing them with a reference data measured with UA3P-5 having several tens of nanometer accuracy.

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Abbreviations

(x, y, z):

Coordinates of measured point

(x c, y c, z c):

Coordinates of the predicted contact point

(x ʹ c , y ʹ c , z ʹ c ):

Coordinates of the predicted contact point

r :

Distance from the origin to the measured point in xy plane

r b :

Probe tip radius

R :

Radius of curvature of the test surface

k :

Conic constant of the test surface

θ :

Slope of the test surface

ϕ :

Azimuthal angle in the xy-plane

(T x, T y, T z):

Translation in x-, y-, z-axes

(R x, R y, R z):

Rotation about x-, y-, z-axes

(dx, dy, dz):

Differences between measured data and target data in x-, y-, z-axes

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Acknowledgements

This research was funded by Korea Research Institute of Standards and Science (KRISS-2018-GP2018-0014) and National Research Council of Science and Technology (NST) Grant (MSIP) (No. CAP-12-04-KRISS) by the Korea government.

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Authors and Affiliations

  1. Space Optics Team, Advanced Instrumentation Institute, Korea Research Institute of Standards and Science, 267 Gajeong-ro, Yuseong-gu, Daejeon, 34113, South Korea

    Hee Kyung Ahn, Young-Sik Ghim & Ho-Soon Yang

  2. College of Optical Sciences, University of Arizona, 1630 E. University Blvd., Tucson, AZ, 85721, USA

    Hyukmo Kang

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  1. Hee Kyung Ahn
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Correspondence to Hee Kyung Ahn.

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Ahn, H.K., Kang, H., Ghim, YS. et al. Touch Probe Tip Compensation Using a Novel Transformation Algorithm for Coordinate Measurements of Curved Surfaces. Int. J. Precis. Eng. Manuf. 20, 193–199 (2019). https://doi.org/10.1007/s12541-019-00076-2

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