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Multi-beam angle sensor for flatness measurement of mirror using circumferential scan technology

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Abstract

Flatness tolerance of mirror is usually determined for a particular manufactured product based on the user’s requirement. To help meet this requirement, we here propose a high-accuracy microscale flatness-measuring machine (micro-FMM) that consists of a multi-beam angle sensor (MBAS). We review the techniques and the sensors predominantly used in the industry to quantify flatness. Compared with other methods, the MBAS can eliminate zero-difference error by circumferential scan and automatically eliminates the tilt error caused by the rotation of a workpiece. Our optical probe uses the principle of an autocollimator, and the flatness measurement of the mirror comprises two steps. First, the MBAS is designed to rotate around a circle with a given radius. The workpiece surface profile along this trajectory is then measured by the micro-FMM. Experimental results, confirming the suitability of the MBAS for measuring flatness are also presented.

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References

  1. ISO 1101, “Geometrical Product Specifications (GPS)-Geometrical Tolerancing-Tolerances of Form, Orientation, Location and Run-Out,” 2012.

  2. ISO 17450, “Geometrical Product Specifications (GPS)-General Concepts-Part 1: Model for Geometrical Specification and Verification,” 2011.

  3. Whitehouse, D. J., “Handbook of Surface Metrology,” CRC Press, 1994.

    Google Scholar 

  4. Huang, M. F., Wang, Q. Y., Zhong, Y. R., Kuang, B., and Li, X. Q., “On the Flatness Uncertainty Estimation based on Data Elimination,” Applied Mechanics and Materials, Vols. 16-19, pp. 347–351, 2009.

    Article  Google Scholar 

  5. Cui, C., Fu, S., and Huang, F., “Research on the Uncertainties from Different Form Error Evaluation Methods by Cmm Sampling,” The International Journal of Advanced Manufacturing Technology, Vol. 43, No. 1-2, pp. 136–145, 2009.

    Article  Google Scholar 

  6. Choi, W. and Kurfess, T. R., “Uncertainty of Extreme Fit Evaluation for Three-Dimensional Measurement Data Analysis,” Computer-Aided Design, Vol. 30, No. 7, pp. 549–557, 1998.

    Article  MATH  Google Scholar 

  7. Bachmann, J., marc Linares, J., Sprauel, J. M., and Bourdet, P., “Aide in Decision-Making: Contribution to Uncertainties in Three-Dimensional Measurement,” Precision Engineering, Vol. 28, No. 1, pp. 78–88, 2004.

    Article  Google Scholar 

  8. Kolivand, H. and Sunar, M. S., “An Overview on Base Real-Time Shadow Techniques in Virtual Environments,” TELKOMNIKA (Telecommunication Computing Electronics and Control), Vol. 10, No. 1, pp. 171–178, 2012.

    Article  Google Scholar 

  9. Kiyono, S., Asakawa, Y., Inamoto, M., and Kamada, O., “A Differential Laser Autocollimation Probe for On-Machine Measurement,” Precision Engineering, Vol. 15, No. 2, pp. 68–76, 1993.

    Article  Google Scholar 

  10. Bünnagel, R., Oehring, H.-A., and Steiner, K., “Fizeau Interferometer for Measuring the Flatness of Optical Surfaces,” Applied Optics, Vol. 7, No. 2, pp. 331–335, 1968.

    Article  Google Scholar 

  11. Hariharan, P., “Interferometric Testing of Optical Surfaces: Absolute Measurements of Flatness,” Optical Engineering, Vol. 36, No. 9, pp. 2478–2481, 1997.

    Article  Google Scholar 

  12. Kim, W. J., Shimizu, Y., Kimura, A., and Gao, W., “Fast Evaluation of Period Deviation and Flatness of a Linear Scale by using a Fizeau Interferometer,” Int. J. Precis. Eng. Manuf., Vol. 13, No. 9, pp. 1517–1524, 2012.

    Article  Google Scholar 

  13. Yokoyama, T., Yokoyama, S., Yoshimori, K., and Araki, T., “Sub-Nanometre Double Shearing Heterodyne Interferometry for Profiling Large Scale Planar Surfaces,” Measurement Science and Technology, Vol. 15, No. 12, pp. 2435–2443, 2004.

    Article  Google Scholar 

  14. Yoder, P., Schlesinger, E. R., and Chickvary, J., “Active Annular-Beam Laser Autocollimator System,” Applied Optics, Vol. 14, No. 8, pp. 1890–1895, 1975.

    Article  Google Scholar 

  15. Ennos, A. and Virdee, M., “High Accuracy Profile Measurement of Quasi-Conical Mirror Surfaces by Laser Autocollimation,” Precision Engineering, Vol. 4, No. 1, pp. 5–8, 1982.

    Article  Google Scholar 

  16. Schuda, F. J., “High-Precision, Wide-Range, Dual-Axis, Angle Monitoring System,” Review of Scientific Instruments, Vol. 54, No. 12, pp. 1648–1652, 1983.

    Article  Google Scholar 

  17. Luther, G. G., Deslattes, R. D., and Towler, W. R., “Single Axis Photoelectronic Autocollimator,” Review of Scientific Instruments, Vol. 55, No. 5, pp. 747–750, 1984.

    Article  Google Scholar 

  18. Gao, W., Yokoyama, J., Kojima, H., and Kiyono, S., “Precision Measurement of Cylinder Straightness using a Scanning Multi-Probe System,” Precision Engineering, Vol. 26, No. 3, pp. 279–288, 2002.

    Article  Google Scholar 

  19. Fujimoto, I., Nishimura, K., Takatsuji, T., and Pyun, Y.-S., “A Technique to Measure the Flatness of Next-Generation 450mm Wafers using a Three-Point Method with an Autonomous Calibration Function,” Precision Engineering, Vol. 36, No. 2, pp. 270–280, 2012.

    Article  Google Scholar 

  20. Fujimoto, I., Takatsuji, T., Nishimura, K., and Pyun, Y.-S., “An Uncertainty Analysis of Displacement Sensors with the Three-Point Method,” Measurement Science and Technology, Vol. 23, No. 11, Paper No. 115102, 2012.

    Article  Google Scholar 

  21. Chen, M., Takahashi, S., and Takamasu, K., “Development of High-Precision Micro-Roundness Measuring Machine using a High-Sensitivity and Compact Multi-Beam Angle Sensor,” Precision Engineering, Vol. 42, pp. 276–282, 2015.

    Article  Google Scholar 

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Authors and Affiliations

  1. Faculty of Engineering, Department of Precision Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-8656, Japan

    Meiyun Chen & Kiyoshi Takamasu

  2. Research Center for Advanced Science and Technology, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo, 153-8904, Japan

    Satoru Takahashi

Authors
  1. Meiyun Chen
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  2. Satoru Takahashi
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  3. Kiyoshi Takamasu
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Correspondence to Meiyun Chen.

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Chen, M., Takahashi, S. & Takamasu, K. Multi-beam angle sensor for flatness measurement of mirror using circumferential scan technology. Int. J. Precis. Eng. Manuf. 17, 1093–1099 (2016). https://doi.org/10.1007/s12541-016-0133-6

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  • DOI: https://doi.org/10.1007/s12541-016-0133-6

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