Skip to main content
SpringerLink
Log in

Characterization of atomic layer deposited and sputtered yttria-stabilized-zirconia thin films for low-temperature solid oxide fuel cells

  • Published:
International Journal of Precision Engineering and Manufacturing Aims and scope Submit manuscript

Abstract

Electrolyte thin films of yttria-stabilized- zirconia (YSZ) for low temperature solid oxide fuel cell applications are investigated. Films of same thickness and composition are fabricated by using two distinct thin film deposition techniques, atomic layer deposition (ALD) and radio frequency (RF) sputtering. Scanning electron microscopic images indicate that both methods form uniform, polycrystalline films on amorphous matrix. Deposition rates of ALD and sputtered YSZ electrolyte films are easily controllable. In-plane ionic conductivity of O2− ions for YSZ is measured using electrochemical impedance spectroscopy. Experimental results show that, at a low temperature of 250°C, ALD YSZ thin films exhibit considerably lower resistance to the conduction of oxygen ions as compared to the sputtered films. This lower resistance results in better ionic conductivity of ALD YSZ thin films.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

Abbreviations

σ:

Thin film electrolyte conductivity

References

  1. Wachsman, E. D. and Lee, K. T., “Lowering the Temperature of Solid Oxide Fuel Cells,” Science, Vol. 334, No. 6058, pp. 935–939, 2011.

    Article  Google Scholar 

  2. Service, R. F., “The Hydrogen Backlash,” Science, Vol. 305, No. 5686, pp. 958–961, 2004.

    Article  Google Scholar 

  3. Steele, B. C. and Heinzel, A., “Materials for Fuel-Cell Technologies,” Nature, Vol. 414, No. 6861, pp. 345–352, 2001.

    Article  Google Scholar 

  4. O'Hayre, R. P., Cha, S.-W., Colella, W., and Prinz, F. B., “Fuel Cell Fundamentals,” John Wiley & Sons New York, 1st Ed., pp. 23–54, 2006.

    Google Scholar 

  5. Han, M., Tang, X., Yin, H., and Peng, S., “Fabrication, Microstructure and Properties of a YSZ Electrolyte for SOFCs,” Journal of Power Sources, Vol. 165, No. 2, pp. 757–763, 2007.

    Article  Google Scholar 

  6. Chen, K., L, Z., Chen, X., Ai, N., Huang, X., Du, X., and Su, W., “Development of LSM-based Cathodes for Solid Oxide Fuel Cells based on YSZ Films,” Journal of Power Sources, Vol. 172, No. 2, pp. 742–748, 2007.

    Article  Google Scholar 

  7. de Souza, S., Visco, S. J., and De Jonghe, L. C., “Thin-Film Solid Oxide Fuel Cell with High Performance at Low-Temperature,” Solid State Ionics, Vol. 98, No. 1, pp. 57–61, 1997.

    Article  Google Scholar 

  8. Ji, S., Chang, I., Lee, Y. H., Park, J., Paek, J. Y., Lee, M. H., and Cha, S. W., “Fabrication of Low-Temperature Solid Oxide Fuel Cells with a Nanothin Protective Layer by Atomic Layer Deposition,” Nanoscale Research Letters, Vol. 8, No. 1, pp. 1–7, 2013.

    Article  Google Scholar 

  9. Muecke, U. P., Beckel, D., Bernard, A., Bieberle-Hü tter, A., Graf, S., et al., “Micro Solid Oxide Fuel Cells on Glass Ceramic Substrates,” Advanced Functional Materials, Vol. 18, No. 20, pp. 3158–3168, 2008.

    Article  Google Scholar 

  10. Shim, J. H., Chao, C.-C., Huang, H., and Prinz, F. B., “Atomic Layer Deposition of Yttria-Stabilized Zirconia for Solid Oxide Fuel Cells,” Chemistry of Materials, Vol. 19, No. 15, pp. 3850–3854, 2007.

    Article  Google Scholar 

  11. Wikipedia, “Atomic Layer Deposition,” http://en.wikipedia.org/wiki/ Atomic_layer_deposition (Accessed 29 JUL 2015)

  12. Behrisch, R. and Wittmaack, K., “Sputtering by Particle Bombardment,” Springer, pp. 15–17, 1983.

    Book  Google Scholar 

  13. O’Hayre, R., Cha, S. W., Colella, W., and Prinz, F. B., “Fuel Cell Fundamentals,” John Wiley & Sons, 2nd Ed., pp. 303–304, 2009.

    Google Scholar 

  14. Smith, D. L., “Thin-Film Deposition: Principles and Practice,” McGraw-Hill New York, pp. 139–154, 1995.

    Google Scholar 

  15. Park, J. S., Holme, T. P., Shim, J. H., and Prinz, F. B., “Improved Oxygen Surface Exchange Kinetics at Grain Boundaries in Nanocrystalline Yttria-Stabilized Zirconia,” MRS Communications, Vol. 2, No. 3, pp. 107–111, 2012.

    Article  Google Scholar 

  16. Sillassen, M., Eklund, P., Pryds, N., Johnson, E., Helmersson, U., and Bøttiger, J., “Low-Temperature Superionic Conductivity in Strained Yttria-Stabilized Zirconia,” Advanced Functional Materials, Vol. 20, No. 13, pp. 2071–2076, 2010.

    Article  Google Scholar 

  17. O’Hayre, R., Cha, S. W., Colella, W., and Prinz, F. B., “Fuel Cell Fundamentals,” John Wiley & Sons, 2nd Ed., pp. 234–243, 2009.

    Google Scholar 

  18. Xie, Z., Song, C., Andreaus, B., Navessin, T., Shi, Z., Zhang, J., and Holdcroft, S., “Discrepancies in the Measurement of Ionic Conductivity of PEMs using Two-and Four-Probe ACImpedance Spectroscopy,” Journal of the Electrochemical Society, Vol. 153, No. 10, pp. E173–E178, 2006.

    Article  Google Scholar 

  19. Infortuna, A., Harvey, A. S., and Gauckler, L. J., “Microstructures of CGO and YSZ Thin Films by Pulsed Laser Deposition,” Advanced Functional Materials, Vol. 18, No. 1, pp. 127–135, 2008.

    Article  Google Scholar 

  20. Kosacki, I., Rouleau, C. M., Becher, P. F., Bentley, J., and Lowndes, D. H., “Nanoscale Effects on the Ionic Conductivity in Highly Textured YSZ Thin Films,” Solid State Ionics, Vol. 176, No. 13, pp. 1319–1326, 2005.

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. School of Mechanical & Aerospace Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul, 151-742, South Korea

    Waqas Hassan Tanveer, Wonjong Yu & Suk Won Cha

  2. Graduate School of Convergence Science & Technology, Seoul National University, 145, Gwanggyo-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do, 16229, South Korea

    Sanghoon Ji & Suk Won Cha

Authors
  1. Waqas Hassan Tanveer
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Sanghoon Ji
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Wonjong Yu
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Suk Won Cha
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Suk Won Cha.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Tanveer, W.H., Ji, S., Yu, W. et al. Characterization of atomic layer deposited and sputtered yttria-stabilized-zirconia thin films for low-temperature solid oxide fuel cells. Int. J. Precis. Eng. Manuf. 16, 2229–2234 (2015). https://doi.org/10.1007/s12541-015-0287-7

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s12541-015-0287-7

Keywords

Search

Navigation