Abstract
High definition metrology can measure three-dimensional surface topography of discontinuous surfaces that have holes and grooves with large field of field and high lateral resolution. However, when separating discontinuous surfaces in to various scale-limited surface such as form, waviness and roughness, filtering techniques such as Gaussian filters cause “boundary distortion problems. This is because the discontinuous surfaces do not have large enough continuous evaluation area for Gaussian filtering. Therefore, this research proposes a modified anisotropic diffusion filter, which is formulated in terms of heat diffusion, to separate discontinuous surfaces into various scale-limited surfaces. An edge detector is proposed to ensure that the diffusion process only takes place inside the surface but not blur the surface boundaries. In addition, the diffusion time is specified considering the linkage with the cutoff wavelength of Gaussian filters. The performance of the proposed filter is validated by simulated and practical discontinuous surfaces. Moreover, the three dimensional areal surface texture features specified in ISO 25178 can be evaluated from the filtered scale-limited surfaces. Results have demonstrated that the proposed approach is an effective tool for separating and evaluating areal surface texture for discontinuous surfaces regardless of the continuity of the evaluation surface.
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Wang, M., Shao, YP., Du, SC. et al. A diffusion filter for discontinuous surface measured by high definition metrology. Int. J. Precis. Eng. Manuf. 16, 2057–2062 (2015). https://doi.org/10.1007/s12541-015-0267-y
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DOI: https://doi.org/10.1007/s12541-015-0267-y