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A Fuzzy-P controller of an active reaction force compensation (RFC) mechanism for a linear motor motion stage

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Abstract

Residual vibration of system base due to high-speed motion of a stage may significantly reduce life span and productivity of the manufacturing equipment. Although a passive reaction force compensation (RFC) mechanism was developed to reduce residual vibration of a linear motor motion stage, the passive RFC mechanism should be redesigned according to variation of motion profiles. In this paper, we develop a fuzzy-P (proportional) controller of an active RFC mechanism to automatically tune the gain according to variation of motion profiles. First, frequency components of motion profiles for a linear motion stage are analyzed and performances of the passive RFC mechanism are approximately evaluated using a motion profile analysis. An active RFC mechanism with an additional control coil is introduced to overcome limitation of the passive RFC mechanism and a fuzzy rule is proposed to automatically tune the P controller of the active RFC mechanism according to variations of motion profiles. Simulations and experiments are performed to show effectiveness of the proposed fuzzy rule for tuning the P control gain of the active RFC mechanism.

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Abbreviations

a M :

acceleration of mover

c MT :

damping of magnet track

k MT :

stiffness of magnet track

k v :

viscous friction of mover

k P :

gain of P control

F f :

thrust force for mover friction

F fc :

Column friction of mover

F fs :

Stribeck friction of mover

F m :

thrust force for mover motion

F t :

thrust or reaction force

F tran :

transmitted force

m M :

mass of mover

m MT :

mass of magnet track

n :

index of frequency component

n s :

Stribeck friction coefficient for exponential function

n max :

index of frequency component at peak acceleration of mover

n MT :

index of natural frequency of magnet track

n’ MT :

output of defuzzification block

T :

period of motion profile

T a :

acceleration time

T dw :

dwell time

T r :

run time

v s :

Stribeck friction coefficient for velocity

x MT :

position of magnet track

ẋ MT :

velocity of magnet track

ẍ MT :

acceleration of magnet track

ω :

frequency

ω MT :

natural frequency of magnet track

ω T :

fandamental frequency of motion profile

ζ :

damping ratio

θ n :

phase of magnet track motion

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Authors and Affiliations

  1. Department of Mechanical Engineering, Graduate School, Soongsil University, 369 Sangdo-ro, Dongjak-gu, Seoul, 156-743, South Korea

    Duc Canh Nguyen

  2. Department of Mechanical Engineering, Soongsil University, 369 Sangdo-ro, Dongjak-gu, Seoul, 156-743, South Korea

    Hyeong-Joon Ahn

Authors
  1. Duc Canh Nguyen
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  2. Hyeong-Joon Ahn
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Correspondence to Hyeong-Joon Ahn.

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Nguyen, D.C., Ahn, HJ. A Fuzzy-P controller of an active reaction force compensation (RFC) mechanism for a linear motor motion stage. Int. J. Precis. Eng. Manuf. 16, 1067–1074 (2015). https://doi.org/10.1007/s12541-015-0138-6

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  • DOI: https://doi.org/10.1007/s12541-015-0138-6

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