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Plasmonic nanoantennae fabricated by focused Ion beam milling

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Abstract

We show a novel approach to fabricate plasmonic nanoantennae based on a maskless focused ion beam nanoring patterning process. Antenna nanoarrays with desired outlines are achieved by precisely controlling the geometric parameters during the milling process. Various nanoantenna designs of bow-tie, nanoclusters (pentamers), and ellipsoid shaped satellites surrounded particle lattices are realized. The whole fabrication method is programmable and monolithic since only a one-step milling process is involved. The optical properties are experimentally characterized. Such nanoantennae may find extensive applications in chemical/bio-sensing due to remarkably enhanced near field intensity at the plasmon resonance.

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Abbreviations

ri :

inner radius of the ring aperture for nanoantennae patterning

ro :

outer radius of the ring aperture for nanoantennae patterning

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Authors and Affiliations

  1. College of Information Science and Engineering, Northeastern University, No. 3-11, Wenhua Road, Heping District, Shenyang, 110819, China

    Jiang-Tao Lv, Yuan Yan, Wei-Kang Zhang, Yun-Hui Liu & Guang-Yuan Si

  2. School of Information Engineering, Hebei University of Technology, No. 5340, Xiping Road, Beichen District, Tianjin, 300130, China

    Zi-Yu Jiang

Authors
  1. Jiang-Tao Lv
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  2. Yuan Yan
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  3. Wei-Kang Zhang
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  4. Yun-Hui Liu
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  5. Zi-Yu Jiang
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  6. Guang-Yuan Si
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Correspondence to Guang-Yuan Si.

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Lv, JT., Yan, Y., Zhang, WK. et al. Plasmonic nanoantennae fabricated by focused Ion beam milling. Int. J. Precis. Eng. Manuf. 16, 851–855 (2015). https://doi.org/10.1007/s12541-015-0112-3

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  • DOI: https://doi.org/10.1007/s12541-015-0112-3

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