Abstract
This paper presents a novel piezo driven motion stage employing multiple motion levers allowing for an amplification ratio that exceeds 60x enabled by a newly contrived cross hinge structure. Optimization of the motion stage was performed and simulation results proved the superiority of the newly devised cross hinge compared to the conventional flexure hinge. Measurements of the motion stage were made using an optical microscope. The motion stage was incorporated into a visually served close loop motion control scheme and experimental results prove that the feedback system is capable of 20 nm nano-stepping.
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Jung, H.J., Kim, J.H. Novel piezo driven motion amplified stage. Int. J. Precis. Eng. Manuf. 15, 2141–2147 (2014). https://doi.org/10.1007/s12541-014-0574-8
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DOI: https://doi.org/10.1007/s12541-014-0574-8