Abstract
With increasing concerns of environmental issues in manufacturing process, energy efficient and waste free manufacturing processes have been widely studied. In the field of nano/micro manufacturing, many research results of direct writing processes such as ink jet printing, gravure printing, and rapid prototyping processes have been reported to remove waste-producing conventional lift-off process for patterning. In addition, the use of toxic solvents such as acetone, toluene, xylene and so on has been decreased. At the same time, energy efficiency becomes one of environmental issues in manufacturing process. In this research, Nano particle deposition system (NPDS), a dry spray deposition process for fabrication of meta and ceramic direct patterning at room temperature, was introduced according to the environmental aspects. In previous studies, NPDS has shown the feasibility of the depositions of metals such as Sn and Ni, and the depositions of ceramics such as Al2O3, and TiO2 by spraying powders under low vacuum condition. The advantages of NPDS are 1) solvent free dry deposition process, 2) relatively low energy consumption with room temperature and low vacuum process condition, and 3) direct patterning process. The energy consumption in NPDS was briefly compared with similar processes including aerosol deposition and cold spray. The direct patterning results with 200μm width line pattern using micro-nozzle were fabricated without any post-processes. These results confirmed NPDS can become a solvent-free energy efficient direct patterning process for metals and ceramics.
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Abbreviations
- P :
-
pressure (Pa)
- P atm :
-
atmospheric pressure (101.3kPa)
- V :
-
volume (m3)
- W :
-
work done by expansion or compression (J)
- n :
-
adiabatic index (Air: 1.4)
- Δ:
-
infinitesimal
- ṁ:
-
mass flow rate (kg/s)
- A*:
-
area of nozzle throat or nozzle exit (m2)
- ρ 0,in :
-
total density of inlet gas (kg/m3)
- ρ0,out :
-
total density of outlet gas (kg/m3)
- P 0,in :
-
total pressure of inlet gas (Pa)
- P 0,out :
-
total pressure of outlet gas (Pa)
- \(\dot V_{in}\) :
-
volume flow rate of inlet gas (m3/s)
- \(\dot V_{out}\) :
-
volume flow rate of outlet gas (m3/s)
- R:
-
gas constant (8.3145 J/mol·K)
- T 0,in :
-
total temperature of inlet gas (K)
References
Park, C. W., Kwon, K. S., Kim, W. B., Min, B. K., Park, S. J., Sung, I. H., Yoon, Y. S., Lee, K. S., Lee, J. H., and Seok, J., “Energy Consumption Reduction Technology in Manufacturing - A Selective Review of Policies, Standards, and Research,” Int. J. Precis. Eng. Manuf., Vol. 10, No. 5, pp. 151–173, 2009.
Jiang, W., Sun, L., Nyandoto, G., and Malshe, A. P., “Electrostatic Spray Deposition of Nanostructured Hydroxyapatite Coating for Biomedical Applications,” Journal of Manufacturing Science and Engineering, Vol. 130, No. 2, pp. 021001-1–021001-7, 2008.
Oh, H., Krantz, J., Litzov, I., Stubhan, T., Pinna, L., and Brabec, C. J., “Comparison of various sol-gel derived metal oxide layers for inverted organic solar cells,” Solar Energy Materials & Solar Cells, Vol. 95, No. 8, pp. 2194–2199, 2011.
Singh, M., Haverinen, H. M., Dhagat, P., and Jabbour, G. E., “Inkjet printing-process and its applications,” Advanced Materials, Vol. 22, No. 6, pp. 673–685, 2010.
Znaidi, L., “Sol-gel-deposited ZnO thin films: A review,” Materials Science and Engineering: B, Vol. 174, No. 1–3, pp. 18–30, 2010.
Rahman, K., Khan, A., Nam, N. M., Choi, K. H., and Kim, D.-S., “Study of drop-on-demand printing through multi-step pulse voltage,” Int. J. Precis. Eng. Manuf., Vol. 12, No. 4, pp. 663–669, 2011.
Goedkoop, M. J., “The Eco-indicator 95, Final report,” PRé Consultantsb.v., 1995.
Goedkoop, M. J., “The Eco-indicator 99: A damage oriented method for Life Cycle Impact Assessment,” PRé Consultantsb.v., 1999.
Papyrin, A., Kosarev, V., Klinkov, S., Alkhimov, A., and Fomin, V., “Cold Spray Technology,” Elsevier, 2007.
Akedo, J., “Aerosol Deposition of Ceramic Thick Films at Room Temperature: Densification Mechanism of Ceramic Layers,” Journal of the American Ceramic Society, Vol. 89, No. 6, pp. 1834–1839, 2006.
Fan, S. Q., Yang, G. J., Li, C. J., Liu, G. J., Li, C. X., and Zhang, L. Z.,“Characterization of microstructure of Nano-TiO2 coating deposited by vacuum cold spraying,” Journal of Thermal Spray Technology, Vol. 15, No. 4, pp. 513–517, 2006.
Jodoin, B., Richer, P., Berube, G., Ajdelsztajn, L., Erdi-Betchi, A., and Yandouzi, M., “Pulsed-Gas Dynamic Spraying: Process analysis, development and selected coating examples,” Surface and Coatings Technology, Vol. 201, No. 16–17, pp. 7544–7551, 2007.
Pattison, J., Celotto, S., Morgan, R., Bray, M., and O’Neill, W., “Cold gas dynamic manufacturing: A non-thermal approach to freeform fabrication,” International Journal of Machine Tools and Manufacture, Vol. 47, No. 3–4, pp. 627–634, 2007.
Bray, M., Cockburn, A., and O’Neill, W., “The Laser-assisted Cold Spray process and deposit characterisation,” Surface and Coatings Technology, Vol. 203, No. 19, pp. 2851–2857, 2009.
Huang, M.-R., Peng, C.-J., and Lu, H.-Y., “Lead Zirconate Titanate Thin Films by Aerosol Plasma Deposition: Microstructure Analysis,” Journal of the American Ceramic Society, Vol. 86, No. 12, pp. 2167–2175, 2003.
Baba, S. and Akedo, J., “Thickness dependence of aerosoldeposited Pb(Zr,Ti)O3 films on stainless-steel sheet annealed by CO2 laser radiation,” Journal of Crystal Growth, Vol. 275, No. 1–2, pp. e1247–e1252, 2005.
Baba, S. and Akedo, J., “Damage-Free and Short Annealing of Pb(Zr,Ti)O3 Thick Films Directly Deposited on Stainless Steel Sheet by Aerosol Deposition with CO2 Laser Radiation,” Journal of the American Ceramic Society, Vol. 88, No. 6, pp. 1407–1410, 2005.
Sugimoto, S., Maki, T., Kagotani, T., Akedo, J., and Inomata, K., “Effect of applied field during aerosol deposition on the anisotropy of Sm-Fe-N thick films,” Journal of Magnetism and Magnetic Materials, Vol. 290–291, No. P2, pp. 1202–1205, 2005.
White, M. F., “Fluid Mechanics,” McGraw-Hill, pp. 510–522, 1994.
Chun, D. M. and Ahn, S. H., “Deposition mechanism of dry sprayed ceramic particles at room temperature using a nanoparticle deposition system (NPDS),” Acta Materialia, Vol. 59, No. 7, pp. 2693–2703, 2011.
American Vacuum Society, “Glossary, AVS Reference Guide,” http://www.aip.org/avsguide/refguide/glossary.html
Japanese Law Translation, “Electrical Appliances and Materials Safety Act,” http://www.japaneselawtranslation.go.jp/law/detail/?ft=1&re=01&dn=1&co=01&ky=%E9%AB%98%E5%9C%A7%E3%82%AC%E3%82%B9&page=8
Jung, K., Song, W., Chun, D. M., Yeo, J. C., Kim, M. S., Ahn, S. H., and Lee, C. S., “Coating of Ni powders through micronozzle in a nano particle deposition system,” Metals and Materials International, Vol. 16, No. 3, pp. 465–467, 2010.
Chun, D. M., “Development of nano particle deposition system (NPDS) for room temperature deposition of metals and ceramics and its applications,” Ph.D. Dissertation, Mechanical Engineering, Seoul National University, 2010.
Ahn, S. H., Chun, D. M., and Kim, C. S., “Nanoscale Hybrid Manufacturing Process by Nano Particle Deposition System (NPDS) and Focused Ion Beam (FIB),” CIRP Annals - Manufacturing Technology, Vol. 60, No. 1, pp. 583–586, 2011.
Chun, D. M., Kim, M. H., Lee, J. C., and Ahn, S. H., “TiO2 Coating on Metal and Polymer Substrates by Nano Particle Deposition System (NPDS),” CIRP Annals - Manufacturing Technology, Vol. 57, No. 1, pp. 551–554, 2008.
Kim, M. S., Chun, D. M., Choi, J. O., Lee, J. C., Kim, K. S., Kim, Y. H., Lee, C. S., and Ahn, S. H., “Room temperature deposition of TiO2 using nano particle deposition system (NPDS): Application to dye-sensitized solar cell (DSSC),” Int. J. Precis. Eng. Manuf., Vol. 12, No. 4, pp. 749–752, 2011.
Chun, D. M., Kim, M. H., Lee, J. C., and Ahn, S. H., “A Nanoparticle Deposition System for Ceramic and Metal Coating at Room Temperature and Low Vacuum Conditions,” Int. J. Precis. Eng. Manuf., Vol. 9, No. 1, pp. 51–53, 2008.
Ahn, S. H., Choi, J. O., Kim, C. S., Lee, G. Y., Lee, H. T., Cho, K., Chun, D. M., and Lee, C. S., “Laser-assisted nano particle deposition system and its application for dye sensitized solar cell fabrication,” CIRP Annals - Manufacturing Technology, Vol. 61, No. 1, pp. 575–578, 2012.
Chun, D. M., Kim, M. S., Yeo, J. C., Kim, M. H., Ahn, S. H., and Lee, C. S., “Nano/Micro particle beam for ceramic deposition and mechanical etching,” Physica Scripta, Vol. 2010, No. T139, Paper No. 014047, 2010.
Chun, D. M., Choi, J. O., Lee, C. S., and Ahn, S. H., “Effect of stand-off distance for cold gas spraying of fine ceramic particles (< 5 μm) under low vacuum and room temperature using nanoparticle deposition system (NPDS),” Surface and Coatings Technology, Vol. 206, No. 8–9, pp. 2125–2132, 2012.
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Chun, DM., Choi, JO., Lee, C.S. et al. Nano-particle deposition system (NPDS): Low energy solvent-free dry spray process for direct patterning of metals and ceramics at room temperature. Int. J. Precis. Eng. Manuf. 13, 1107–1112 (2012). https://doi.org/10.1007/s12541-012-0145-9
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DOI: https://doi.org/10.1007/s12541-012-0145-9