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An on-machine and vision-based depth-error measurement method for micro machine tools

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Abstract

The error measurement method is an essential for further enhancing the machining accuracy of a micro machine tool. An on-machine vision-based measurement method that can measure 2-D contouring-/tracking errors of a micro machining process had been previously developed. An on-machine depth-error measurement method was proposed in this study to fulfill the complete 3-D machining errors measurement. The method adopts image re-constructive technology and camera pixel correction to provide non-contact measurement capability. To improve the measurement limits due to the pixel resolution and the filler of view of a CCD, a 2-step measurement method with use of a depth model was developed. Because of the capability of eliminating the shadow effects caused by the tilting light source, the proposed method provides more accurate and reliable measurement results. Sensitivity analysis was conducted to assess the influence of the CCD setup errors on the measurement accuracy for implementation. Experiment was conducted and the results have shown the effectiveness and feasibility of the measurement method.

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Abbreviations

S[i, j]:

grey level of (i, j) with Gaussian smoothing filter

I[i, j]:

grey level without Gaussian filter

σ :

Standard Deviation

x, y :

coordinates of Gaussian smoothing filter

M[i, j]:

magnitude of the gradient of coordinates (i, j)

θ :

orientation of the gradient of coordinates (i, j)

ζ(i, j):

Sector Value

N[i, j]:

Non-maxima Suppression, NMS

B1:

rotation angle

b :

actual depth of the machined side wall of the work-piece

D1:

width of shadow

D2:

width of the iso-gray level area (distance between upper and lower edges) in the image taken at B1°(B1 ≠ 0)

D3:

width of the iso-gray level area (distance between upper and lower edges) in the image taken at (B1 + B2)° (B1 + B2 ≠ 0)

b′:

the actual depth measurement

(Δ b)Δc :

the depth measurement error

ΔC :

Rotation error

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Correspondence to Shih-Ming Wang.

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Wang, SM., Yu, HJ., Liu, SH. et al. An on-machine and vision-based depth-error measurement method for micro machine tools. Int. J. Precis. Eng. Manuf. 12, 1071–1077 (2011). https://doi.org/10.1007/s12541-011-0143-3

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  • DOI: https://doi.org/10.1007/s12541-011-0143-3

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