Micro ECM with ultrasonic vibrations using a semi-cylindrical tool



In recent years, there has been a growing demand for micro holes. However, electrochemical machining has rarely been employed in drilling these holes because of problems with electrolyte diffusion. In this research, a semi-cylindrical tool was used as a tool electrode to increase the flow space of the electrolyte, and electrolyte diffusion was improved via the application of ultrasonic vibrations. Micro holes with a specified diameter of 76 μm were drilled on a 304 stainless steel plate of 300μm thickness. The proposed technique reduced both the machining time and the machining gap.


Micro electrochemical machining Ultrasonic vibration Semi-cylindrical tool Micro hole 


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© Korean Society for Precision Engineering and Springer-Verlag GmbH 2009

Authors and Affiliations

  1. 1.School of Mechanical and Aerospace EngineeringSeoul National UniversitySeoulKorea
  2. 2.Division of Mechanical and Automotive EngineeringWonkwang UniversityChonbukKorea

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