Abstract
Diamond like carbon (DLC) thin films with metallic interfacial layers of aluminum and nickel-chromium (Al and Ni-Cr) were grown using a low cost hybrid technique involving a resistive heating thermal evaporator and radio frequency plasma enhanced chemical vapor deposition techniques. Stress, hardness, elastic modulus, bonding, phase, and electrical conductivity of these films were investigated. Introduction of interfacial Al and Ni-Cr layers in DLC led to drastic improvement of its conductivity along with a significant reduction in residual stress but with some reduction of hardness and the elastic modulus. The structural and surface properties of thin films were studied using X-ray diffraction, X-ray photoelectron spectroscopy, and scanning electron microscopy techniques.
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Dwivedi, N., Kumar, S., Sreekumar, C. et al. Effect of metallic interfacial layers on the properties of diamond-like carbon thin films. Met. Mater. Int. 18, 231–236 (2012). https://doi.org/10.1007/s12540-012-2005-7
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DOI: https://doi.org/10.1007/s12540-012-2005-7