A case study was conducted to find out the groundwater potential zones in Kattakulathur block, Tamil Nadu, India with an aerial extent of 360.60 km2. The thematic maps such as geology, geomorphology, soil hydrological group, land use / land cover and drainage map were prepared for the study area. The Digital Elevation Model (DEM) has been generated from the 10 m interval contour lines (which is derived from SOI, Toposheet 1:25000 scale) and obtained the slope (%) of the study area. The groundwater potential zones were obtained by overlaying all the thematic maps in terms of weighted overlay methods using the spatial analysis tool in ArcGIS 9.2. During weighted overlay analysis, the ranking has been given for each individual parameter of each thematic map and weights were assigned according to the influence such as soil −25%, geomorphology − 25%, land use/land cover −25%, slope − 15%, lineament − 5% and drainage / streams − 5% and find out the potential zones in terms of good, moderate and poor zones with the area of 49.70 km2, 261.61 km2 and 46.04 km2 respectively. The potential zone wise study area was overlaid with village boundary map and the village wise groundwater potential zones with three categories such as good, moderate and poor zones were obtained. This GIS based output result was validated by conducting field survey by randomly selecting wells in different villages using GPS instruments. The coordinates of each well location were obtained by GPS and plotted in the GIS platform and it was clearly shown that the well coordinates were exactly seated with the classified zones.